公开(公告)号：US20240191337A1

公开(公告)日：2024-06-13

申请号：US18389138

申请日：2023-11-13

Applicant: Samsung Display Co., LTD.

Inventor： WONYOUNG JANG ,  JONGDAE LEE ,  SOOHYUN MIN ,  Mina WOO ,  SEUNGJU HONG

IPC: C23C14/04 ,  C23C14/24 ,  H10K71/16

CPC classification number: C23C14/042 ,  C23C14/24 ,  H10K71/166

Abstract: A deposition apparatus includes: a chamber; a stage defining a stage-opening therein and disposed inside the chamber; a frame disposed on the stage and defining a frame-opening therein corresponding to the stage-opening; a mask coupled to the frame and defining a plurality of deposition openings therein corresponding to the frame-opening; a deposition source configured to spray a deposition material to the frame-opening; alignment units coupled to the stage and contacting the frame to move a position of the frame on the stage; and correction units each of which includes a magnetic force part disposed on the stage and adjacent to the frame, and a driving part configured to provide a magnetic force to the magnetic force part, wherein the correction units are configured to change a shape of the frame, and are coupled to the stage.

公开(公告)号：US20240229220A9

公开(公告)日：2024-07-11

申请号：US18449822

申请日：2023-08-15

Applicant: Samsung Display Co., Ltd.

Inventor： JONGDAE LEE ,  WONYOUNG JANG

IPC: C23C14/04 ,  C23C16/04

CPC classification number: C23C14/042 ,  C23C16/042

Abstract: A mask assembly includes a frame opening, and a mask sheet. The mask sheet includes a first mask including a first body part having at least one first deposition opening, first coupling portions, each of which protrudes from at least one first side of the first body part, and a second mask including a second body part having at least one second deposition opening, second coupling portions, each of which protrudes from at least one first side of the second body part, The at least one first side of the first mask and the at least one first side of the second mask face each other. The first coupling portions overlap the second coupling portions, respectively.

公开(公告)号：US20240425965A1

公开(公告)日：2024-12-26

申请号：US18631220

申请日：2024-04-10

Applicant: Samsung Display Co., Ltd.

Inventor： SEUNGJU HONG ,  JONGDAE LEE ,  SOOHYUN MIN ,  JONGSUNG PARK ,  Mina WOO ,  WONYOUNG JANG

IPC: C23C14/04 ,  H10K71/16

Abstract: A mask assembly includes a mask frame including a frame opening, a first stick disposed on the mask frame, overlapping the frame opening, and extending in a first direction to have a first length, a second stick disposed on the first stick, overlapping the frame opening, and extending in a second direction intersecting the first direction to have a second length longer than the first length, and a mask disposed on the second stick and including a mask opening overlapping the frame opening. The second stick includes a first center portion crossing the frame opening and a first end portion extending from the first center portion in the second direction.

公开(公告)号：US20240279788A1

公开(公告)日：2024-08-22

申请号：US18646003

申请日：2024-04-25

Applicant: Samsung Display Co., Ltd.

Inventor： JONGDAE LEE ,  WONYOUNG JANG

IPC: C23C14/04 ,  C23C16/04

CPC classification number: C23C14/042 ,  C23C16/042

Abstract: A mask assembly includes a frame opening, and a mask sheet. The mask sheet includes a first mask including a first body part having at least one first deposition opening, first coupling portions, each of which protrudes from at least one first side of the first body part, and a second mask including a second body part having at least one second deposition opening, second coupling portions, each of which protrudes from at least one first side of the second body part, The at least one first side of the first mask and the at least one first side of the second mask face each other. The first coupling portions overlap the second coupling portions, respectively.

公开(公告)号：US20240133019A1

公开(公告)日：2024-04-25

申请号：US18449822

申请日：2023-08-14

Applicant: Samsung Display Co., Ltd.

Inventor： JONGDAE LEE ,  WONYOUNG JANG

IPC: C23C14/04 ,  C23C16/04

CPC classification number: C23C14/042 ,  C23C16/042

Abstract: A mask assembly includes a frame opening, and a mask sheet. The mask sheet includes a first mask including a first body part having at least one first deposition opening, first coupling portions, each of which protrudes from at least one first side of the first body part, and a second mask including a second body part having at least one second deposition opening, second coupling portions, each of which protrudes from at least one first side of the second body part, The at least one first side of the first mask and the at least one first side of the second mask face each other. The first coupling portions overlap the second coupling portions, respectively.

公开(公告)号：US20240093350A1

公开(公告)日：2024-03-21

申请号：US18332895

申请日：2023-06-12

Applicant: Samsung Display Co., Ltd.

Inventor： SEUNGJU HONG ,  Mina WOO ,  JONGDAE LEE ,  SOOHYUN MIN ,  JONGSUNG PARK ,  MINCHUL SONG ,  WONYOUNG JANG

IPC: C23C14/04

CPC classification number: C23C14/044 ,  H10K71/166

Abstract: A mask frame assembly includes a mask frame including: a first surface including a first long side part extending in a first direction, a first short side part extending in a second direction intersecting the first direction, and a first recessed part extending in the first direction or the second direction, a second surface opposite to the first surface and including a second long side part extending in the first direction, a second short side part extending in the second direction, and a second recessed part disposed in the first direction or the second direction, a third surface connected to the first surface and the second surface and defining a frame opening part; a first support member disposed in the first recessed part; and a second support member disposed in the second recessed part.