Method of fabricating anisotropic optical interference filter

    公开(公告)号:US12000033B2

    公开(公告)日:2024-06-04

    申请号:US17745395

    申请日:2022-05-16

    Inventor: Robert Sprague

    CPC classification number: C23C14/044 G02B5/285

    Abstract: In a method of manufacturing a one-dimensionally varying optical filter, a substrate is coated to form a stack of layers of two or more different types. The coating may, for example, employ sputtering, electron-beam evaporation, or thermal evaporation. During the coating, the time-averaged deposition rate is varied along an optical gradient direction by generating reciprocation between a shadow mask and the substrate in a reciprocation direction that is transverse to the optical gradient direction. In some approaches, the shadow mask is periodic with a mask period defined along the direction of reciprocation, and the generated reciprocation has a stroke equal to or greater than the mask period along the direction of reciprocation. The substrate and the shadow mask may also be rotated together as a unit during the coating. Also disclosed are one-dimensionally varying optical filters, such as linear variable filters, made by such methods.

    Hybrid-type mask stick and mask frame assembly adopting the same

    公开(公告)号:US11970763B2

    公开(公告)日:2024-04-30

    申请号:US16454183

    申请日:2019-06-27

    Abstract: Provided are a hybrid-type mask stick and a mask frame assembly adopting the same. The mask frame assembly includes a mask frame; and a mask stick including a first mask stick extending in a first direction, a second mask stick extending in a second direction crossing the first direction, and a plurality of third mask sticks connected to the first mask stick and the second mask stick, the at least one first mask stick, the at least one second mask stick and the plurality of third mask sticks defining a plurality of deposition areas, wherein the first mask stick includes a first stick and a second stick arranged on the first stick, and at least one of the first stick and the second stick includes a partially-recessed portion in which the first mask stick is connected to the second mask stick.

    VANE COATING APPARATUS
    9.
    发明申请

    公开(公告)号:US20170274403A1

    公开(公告)日:2017-09-28

    申请号:US15622747

    申请日:2017-06-14

    Inventor: Hideyuki MIKI

    Abstract: To prevent a height difference from being produced between a metal sheath and a paint layer formed on a vane surface of a vane body. A coating apparatus includes a jig adapted to support a guide vane equipped with a metal sheath for covering a leading edge portion; a nozzle adapted to spray paint onto a vane body; a robot adapted to move the nozzle; and a control unit adapted to control a spraying operation of the nozzle and robot. The jig includes a movable covering body adapted to separably cover the metal sheath and cover an exposed portion of adhesive between a lateral edge portion of the metal sheath and the vane surface of the vane body, and a covering body drive unit adapted to move the movable covering body between a state in which the movable covering body covers the metal sheath and a state in which the movable covering body is separated from the metal sheath while covering the metal sheath. The control unit performs control to make transition from a sheath cladding coating mode to a finish coating mode.

    DEVICE EQUIPPED WITH AN ION BEAM SOURCE FOR COATING A SUBSTRATE IN A VACUUM CHAMBER

    公开(公告)号:US20170263423A1

    公开(公告)日:2017-09-14

    申请号:US15259069

    申请日:2016-09-08

    Inventor: Wolfgang Ebert

    Abstract: A device has an ion beam source for coating at least one substrate in a vacuum chamber, which chamber has an inlet that is closable in a pressure-tight manner using a closure apparatus and through which the at least one substrate can be fixed in the vacuum chamber in a substrate holder in a substrate holder receptacle, and can be removed therefrom once the coating process has finished, wherein the substrate holder, together with the substrate, in the substrate holder receptacle is designed to be reversibly movable in a translational manner inside the vacuum chamber, between turning points that are in particular settable, using a motor-drivable transport apparatus of the device.

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