Mask frame and deposition apparatus including the same

    公开(公告)号:US12173396B2

    公开(公告)日:2024-12-24

    申请号:US18230714

    申请日:2023-08-07

    Abstract: A mask frame includes a support substrate including a plurality of inner side surfaces. The plurality of inner side surfaces defines a first opening through the support substrate. A heat dissipation plate is disposed on the plurality of inner side surfaces. A plurality of fixing portions is disposed between the support substrate and the heat dissipation plate. The plurality of fixing portions includes a plurality of adhesive portions attaching the support substrate to the heat dissipation plate.

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