公开(公告)号：US20190064059A1

公开(公告)日：2019-02-28

申请号：US16058545

申请日：2018-08-08

Applicant: Samsung Display Co., Ltd. ,  K-MAC

Inventor： Yong Jun Park ,  Seung-Ho Han ,  Kyoung Su Kim ,  Jin Seo ,  Se Yoon Oh ,  Dong-Seop Lim ,  Sung Hoon Yang ,  Jun-Yeong Choi

IPC: G01N21/21 ,  H01L21/67 ,  H01L21/66

Abstract: A laser crystallization measuring apparatus including a spectrometer configured to measure actual data of a spectrum of an actual polycrystalline silicon layer crystallized by a laser crystallization device, and a simulation device that is connected to the spectrometer and is configured to determine simulation data of a spectrum of a virtual polycrystalline silicon layer according to a shape of a virtual protrusion formed in the virtual polycrystalline silicon layer, wherein a shape of an actual protrusion formed in the actual polycrystalline silicon layer is determined by using final data determined by selecting simulation data that is approximate to the actual data.