公开(公告)号：US20150153593A1

公开(公告)日：2015-06-04

申请号：US14316525

申请日：2014-06-26

Applicant: Samsung Display Co., Ltd. ,  Samsung Electronics Co., Ltd.

Inventor： Sung-Mo GU ,  SUK CHOI ,  Youngjin NOH ,  YOUNGWON KIM ,  Changhyun RYU ,  CHI YOUN CHUNG

IPC: G02F1/13 ,  H01B13/00 ,  B05D1/00

CPC classification number: G02F1/1313 ,  G02F1/1309 ,  G02F1/1334 ,  G02F1/133553 ,  G02F2001/133368

Abstract: A substrate inspection apparatus includes a liquid crystal modulator configured to be provided on a substrate, a light source unit provided to be spaced apart from the liquid crystal modulator, a beam splitter provided between the liquid crystal modulator and the light source unit configured to reflect a beam of light from the light source to the liquid crystal modulator, and a measurement unit configured to sense the beam of light reflected by the substrate.

Abstract translation: 基板检查装置包括：液晶调制器，被配置为设置在基板上;光源单元，设置为与液晶调制器间隔开;光束分离器，设置在液晶调制器和光源单元之间，该光束分离器被配置为反射 从光源到液晶调制器的光束;以及被配置为感测由基板反射的光束的测量单元。

公开(公告)号：US20160187262A1

公开(公告)日：2016-06-30

申请号：US14746427

申请日：2015-06-22

Applicant: Samsung Display Co., Ltd.

Inventor： Wal jun KIM ,  JoongYoung RYU ,  Seung-Young BAECK ,  Changhyun RYU ,  Deok joo LIM

IPC: G01N21/88 ,  G01N21/84 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/8422 ,  G01N21/95 ,  G01N2021/8427 ,  G01N2021/8848 ,  G01N2201/0683

Abstract: An inspection device of a display device includes a first illumination unit providing a first incident light to the display device at a first incident angle, a second illumination unit providing a second incident light to the display device at a second incident angle, a third illumination unit providing a third incident light to the display device at a third incident angle, and a defect detector receiving at least one of a first reflection light obtained from the first incident light reflected by the display device at a first reflection angle, a second reflection light obtained from the second incident light reflected by the display device at a second reflection angle, and a third reflection light obtained from the third incident light reflected by the display device at a third reflection angle to detect defects of the display device.

Abstract translation: 显示装置的检查装置包括以第一入射角向显示装置提供第一入射光的第一照明单元，以第二入射角向显示装置提供第二入射光的第二照明单元，第三照明单元 以第三入射角向显示装置提供第三入射光;以及缺陷检测器，其接收从第一反射角度的由显示装置反射的第一入射光获得的第一反射光中的至少一个，获得的第二反射光 从显示装置以第二反射角反射的第二入射光和由第三反射角反射的第三入射光获得的第三反射光，以检测显示装置的缺陷。