公开(公告)号：US20250076360A1

公开(公告)日：2025-03-06

申请号：US18823964

申请日：2024-09-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daesung JUNG ,  Seongbeom LEE ,  Gyouil JEONG ,  Sangyoon HAN ,  Myungjoon KIM ,  Kyuhwang WON ,  Jaein JEONG ,  Hoomi CHOI

IPC: G01R29/24 ,  H01L21/66 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687

Abstract: A substrate inspection apparatus includes a substrate support portion that fixedly holds a semiconductor substrate such that an upper surface and a lower surface of the semiconductor substrate are exposed; an upper inspection portion including an upper probe having a first end portion spaced apart from the upper surface, and an upper charge sensor in the first end portion that obtains an upper surface charge sensing value from the upper surface; and a lower inspection portion including a lower probe having a second end portion spaced apart from the lower surface, and a lower charge sensor in the second end portion that obtains a lower surface charge sensing value from the lower surface.

公开(公告)号：US20210159101A1

公开(公告)日：2021-05-27

申请号：US16926956

申请日：2020-07-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daesung JUNG ,  Kwangil KIM

IPC: H01L21/67 ,  H01L21/677

Abstract: A semiconductor substrate treatment system includes: a chamber having an internal space defined by a first surface and a second surface of the chamber opposing each other, and a third surface of the chamber connected the first surface and the second surface; a transfer device in a central region of the internal space for transferring a semiconductor substrate; an ionizing device including first and second discharge devices on the second surface for emitting ions having a first polarity and a second polarity, respectively, to charge particles in the internal space with the first and second polarities, and a third discharge device disposed above the transfer device, and configured to emit ions having the first and second polarities together; and first and second dust collecting assemblies on the third surface, facing each other, and configured to collect charged particles by generating electric fields having different polarities.