公开(公告)号：US20160097981A1

公开(公告)日：2016-04-07

申请号：US14867292

申请日：2015-09-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： SANGJOON HONG ,  JONGJIN LEE ,  HiKUK LEE ,  SANGDON JANG ,  Inbae CHANG

IPC: G03F7/20 ,  G03F7/16

CPC classification number: G03F7/16 ,  G03F7/70383 ,  G03F7/70791 ,  G03F7/7085

Abstract: An optical apparatus and a manufacturing method using the optical apparatus are disclosed. The optical apparatus includes a stage supporting a substrate, first optical systems providing a first light onto the substrate, a gantry supporting the first optical systems to transfer them on the stage, and second optical systems disposed between the gantry and the stage and detecting displacement of the first optical systems. Each of the second optical systems includes a beam source generating a second light different with the first light, and sensor arrays for sensing the second light provided to the first optical systems to detect displacement of the first optical systems.

Abstract translation: 公开了一种使用该光学装置的光学装置和制造方法。 光学装置包括支撑基板的台，在基板上提供第一光的第一光学系统，支撑第一光学系统以将它们传送到台上的台架，以及设置在台架与台之间的第二光学系统， 第一个光学系统。 每个第二光学系统包括产生与第一光不同的第二光的光束源和用于感测提供给第一光学系统的第二光以检测第一光学系统的位移的传感器阵列。