公开(公告)号：US20220262599A1

公开(公告)日：2022-08-18

申请号：US17470337

申请日：2021-09-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyunbae KIM ,  Hyunjae LEE ,  Youngdo KIM ,  Hyejin KIM ,  Sangki NAM ,  Chanhee PARK ,  Minho JUNG

IPC: H01J37/32

Abstract: A variable frequency and non-sinusoidal power generator includes a pulse module circuit, a slope module circuit, and first and second cooling systems. The pulse module circuit and the slope module circuit includes control switches, and generates at least one of a output currents and a output voltages by selectively turning on/off the control switches based on control signals. The first and second cooling systems are disposed at first and second sides of the control switches. A bias power having a variable frequency and a non-sinusoidal waveform is generated based on the control signals, at least one of the output currents and the output voltages.

公开(公告)号：US20230075642A1

公开(公告)日：2023-03-09

申请号：US17901263

申请日：2022-09-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jihwan KIM ,  Hyunbae KIM ,  Hongseung CHO ,  Seungbo SHIM ,  Sungyeol KIM

IPC: H01J37/32

Abstract: A high voltage power supply apparatus includes a high voltage direct current voltage source, a power switch configured to apply an output of the high voltage direct current voltage source to process equipment, and a sensing circuit unit including a sensor unit including a sensor and at least one operational amplifier, a reference voltage detection unit connected to a node between the sensor and the at least one operational amplifier, and a digital signal processing unit, wherein the sensing circuit unit is connected to an output terminal through which an output of the high voltage direct current voltage source is applied to the process equipment.