公开(公告)号：US12214491B2

公开(公告)日：2025-02-04

申请号：US17672081

申请日：2022-02-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyeongsup Byeon ,  Inwook Koo ,  Dongwon Kim ,  Minyoung Kim ,  Yi Jin ,  Jongkyu Kim ,  Jinho So ,  Byungjun An ,  Yinghu Xu ,  Beomsoo Hwang

IPC: B65G1/137 ,  B25J11/00 ,  B25J15/00 ,  B25J19/02 ,  F17C13/04 ,  G06K7/14 ,  B25J9/16

Abstract: A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.