公开(公告)号：US11590460B2

公开(公告)日：2023-02-28

申请号：US17239644

申请日：2021-04-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Wonguk Seo ,  Sungyong Park ,  Hongju Kim ,  Ansook Sul ,  Seok Heo ,  Yinghu Xu

IPC: B01F23/10 ,  B01F23/231 ,  B01F101/56

Abstract: A chemical solution vaporization device includes a chemical solution tank including chemical solution vaporization rooms, a chemical solution sensing room, and a chemical solution supply room. A first internal wall separating the plurality of chemical solution vaporization rooms from each other includes a first opening at a lower portion thereof. A second internal wall separating at least one of the plurality of chemical solution vaporization rooms from the chemical solution supply room includes a second opening at a lower portion thereof. A third internal wall separating at least one of the plurality of chemical solution vaporization rooms from the chemical solution sensing room includes a third opening at a lower portion thereof. And a lower portion of a fourth internal wall separating the chemical solution sensing room from the chemical solution supply room is combined with the lower wall.

公开(公告)号：US12214491B2

公开(公告)日：2025-02-04

申请号：US17672081

申请日：2022-02-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyeongsup Byeon ,  Inwook Koo ,  Dongwon Kim ,  Minyoung Kim ,  Yi Jin ,  Jongkyu Kim ,  Jinho So ,  Byungjun An ,  Yinghu Xu ,  Beomsoo Hwang

IPC: B65G1/137 ,  B25J11/00 ,  B25J15/00 ,  B25J19/02 ,  F17C13/04 ,  G06K7/14 ,  B25J9/16

Abstract: A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.