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公开(公告)号:US20240251181A1
公开(公告)日:2024-07-25
申请号:US18602787
申请日:2024-03-12
Inventor: Suyeon Lee , Q-Han Park , Unjeong Kim , Hyunjun Ma
Abstract: Provided are a method and a device, for processing spectrum data of an image sensor. The method includes obtaining spectrum response signals corresponding to channels of spectrum data of light, the spectrum data being obtained from an object by an image sensor; determining a set of bases corresponding to the obtained spectrum response signals; performing, based on the determined set of bases, a change of basis on at least one basis included in the determined set of bases; and generating, by using a pseudo inverse, reconstructed spectrum data from the spectrum response signals on which the change of basis has been performed.
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公开(公告)号:US20190170563A1
公开(公告)日:2019-06-06
申请号:US16013199
申请日:2018-06-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sangkil Lee , Yusin Yang , Sung Yoon Ryu , Q-Han Park , Hyun Lee
Abstract: Disclosed are mass flow controllers, apparatuses for manufacturing semiconductor devices, and methods of maintenance thereof. The mass flow controller may control an amount of a gas provided into a chamber. The mass flow controller may be configured to obtain an absolute volume of the gas provided into the chamber at a standard flow rate when the mass flow controller is initially used. The mass flow controller may be configured to obtain a detected flow rate of the gas provided at a measured flow rate after the mass flow controller has been used for a predetermined time. The mass flow controller may be configured to compare the detected flow rate and the standard flow rate to verify a full-scale error in the measured flow rate.
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公开(公告)号:US12212864B2
公开(公告)日:2025-01-28
申请号:US18602787
申请日:2024-03-12
Inventor: Suyeon Lee , Q-Han Park , Unjeong Kim , Hyunjun Ma
Abstract: Provided are a method and a device, for processing spectrum data of an image sensor. The method includes obtaining spectrum response signals corresponding to channels of spectrum data of light, the spectrum data being obtained from an object by an image sensor; determining a set of bases corresponding to the obtained spectrum response signals; performing, based on the determined set of bases, a change of basis on at least one basis included in the determined set of bases; and generating, by using a pseudo inverse, reconstructed spectrum data from the spectrum response signals on which the change of basis has been performed.
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公开(公告)号:US20230128654A1
公开(公告)日:2023-04-27
申请号:US17845582
申请日:2022-06-21
Inventor: Suyeon LEE , Q-Han Park , Unjeong Kim , Hyunjun Ma
Abstract: Provided are a method and a device, for processing spectrum data of an image sensor. The method includes obtaining spectrum response signals corresponding to channels of spectrum data of light, the spectrum data being obtained from an object by an image sensor; determining a set of bases corresponding to the obtained spectrum response signals; performing, based on the determined set of bases, a change of basis on at least one basis included in the determined set of bases; and generating, by using a pseudo inverse, reconstructed spectrum data from the spectrum response signals on which the change of basis has been performed.
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公开(公告)号:US11962921B2
公开(公告)日:2024-04-16
申请号:US17845582
申请日:2022-06-21
Inventor: Suyeon Lee , Q-Han Park , Unjeong Kim , Hyunjun Ma
Abstract: Provided are a method and a device, for processing spectrum data of an image sensor. The method includes obtaining spectrum response signals corresponding to channels of spectrum data of light, the spectrum data being obtained from an object by an image sensor; determining a set of bases corresponding to the obtained spectrum response signals; performing, based on the determined set of bases, a change of basis on at least one basis included in the determined set of bases; and generating, by using a pseudo inverse, reconstructed spectrum data from the spectrum response signals on which the change of basis has been performed.
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