公开(公告)号：US20240395615A1

公开(公告)日：2024-11-28

申请号：US18631548

申请日：2024-04-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seokwon Kim ,  Bongjin Kuh ,  Sukhoon Kim ,  Jiho Park ,  Sanghyeok Yu ,  Yongho Ha ,  Musarrat Hasan

IPC: H01L21/768 ,  C23C16/34 ,  C23C16/505

Abstract: A method of manufacturing a semiconductor device includes forming a substrate including a structure having a first region and a contact hole exposing the first region, loading the substrate into a process chamber, repeatedly performing two or more times, a deposition process that includes repeatedly applying radio frequency (RF) plasma power to a process gas for a first time duration and not applying the RF plasma power to the process gas for a second time duration, and a soak process that does not use plasma, at a metal-semiconductor compound formation temperature or higher, within the process chamber, and thereby forming a metal-semiconductor compound layer on the first region, a sidewall material layer on a sidewall of the contact hole, and an upper material layer on the structure, performing a removal process of removing at least a portion of the sidewall material layer in the process chamber, and unloading the substrate from the process chamber after performing the removal process.

公开(公告)号：US11340781B2

公开(公告)日：2022-05-24

申请号：US16795334

申请日：2020-02-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seokwon Kim ,  Jinseok Kim ,  Dami Jeon

IPC: G06F3/041 ,  G06F3/04886

Abstract: An electronic device includes a display, at least one processor, and a memory. The memory is configured to store instructions that when executed enable the processor to control the display to display an execution screen of application stored in the memory. The instructions also enable the processor to identify an occurrence of an event for displaying an execution screen of the virtual keyboard application while displaying the execution screen of the application. The instructions further enable the processor to, based on the occurrence of the event, identify at least one color value related to the at least one element included in the execution screen of the application, and control the display to display the execution screen of the virtual keyboard application corresponding to the at least one identified color value.