公开(公告)号：US20130208486A1

公开(公告)日：2013-08-15

申请号：US13762782

申请日：2013-02-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Won-Don JOO ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sue-Jin CHO ,  Sang Don JANG ,  Byeong Hwan JEON

IPC: F21V13/04

CPC classification number: F21V13/04 ,  G01N21/8806 ,  G01N21/9501 ,  G03B2215/0582 ,  G03B2215/0592

Abstract: An illumination optic system includes a convex mirror to reflect light from a light source to towards a lens. The light source is at a first focus position and the lens is at a second focus position of the mirror. The system also includes a reflector to reflect light not incident on the lens toward the convex mirror. The reflector has a light guide hole to guide light to the incidence surface of the lens.

Abstract translation: 照明光学系统包括用于将来自光源的光反射到透镜的凸面镜。 光源处于第一焦点位置，并且透镜处于反射镜的第二焦点位置。 该系统还包括反射器，以将未入射到透镜的光反射到凸面镜。 反射器具有导光孔以将光引导到透镜的入射表面。

公开(公告)号：US20130169140A1

公开(公告)日：2013-07-04

申请号：US13667203

申请日：2012-11-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Woo-Seok KO ,  Yu-Sin YANG ,  Sue-Jin CHO ,  Won-Don JOO ,  Min-Kook KIM ,  Sang-Kil LEE ,  Byeong-Hwan JEON

IPC: H05H1/46 ,  H01J65/04

CPC classification number: H01J65/04

Abstract: A broadband light illuminator of an optical inspector for optically detecting defects of an inspection object may include an electrode-less chamber including a plasma area from which broadband light is generated; a first energy provider, exterior to the chamber, configured to provide first energy for ionizing high pressure gases to form ionized gases in the chamber; a second energy provider, exterior to the chamber, configured to provide second energy for transforming the ionized gases into a plasma state to form the plasma area at a central portion of the chamber; an elliptical reflector having a first focus at which the chamber is positioned and a second focus such that the broadband light is reflected from the elliptical reflector toward the second focus; and a lens unit focusing the reflected broadband light onto the inspection object to form an inspection light for detecting the defects of the inspection object.

Abstract translation: 用于光学检测检查对象的缺陷的光学检查器的宽带照明器可以包括：无电极室，包括产生宽带光的等离子体区域; 第一能量提供者，在室外，被配置为提供第一能量，用于离子化高压气体以在室中形成离子化气体; 第二能量供应器，室外，被配置为提供第二能量，用于将电离气体转换成等离子体状态，以在室的中心部分形成等离子体区域; 具有第一焦点的椭圆形反射器，室被定位，第二焦点使得宽带光从椭圆形反射器反射到第二焦点; 以及透镜单元，将反射的宽带光聚焦到检查对象上，以形成用于检测检查对象的缺陷的检查光。