公开(公告)号：US20220274780A1

公开(公告)日：2022-09-01

申请号：US17672081

申请日：2022-02-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyeongsup BYEON ,  Inwook KOO ,  Dongwon KIM ,  Minyoung KIM ,  Yi JIN ,  Jongkyu KIM ,  Jinho SO ,  Byungjun AN ,  Yinghu XU ,  Beomsoo HWANG

IPC: B65G1/137 ,  B25J15/00 ,  B25J19/02 ,  B25J11/00 ,  G06K7/14

Abstract: A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.

公开(公告)号：US20190088515A1

公开(公告)日：2019-03-21

申请号：US15950303

申请日：2018-04-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jae Won JEONG ,  Yi JIN ,  Chang Gi MIN ,  Jin Woo LEE ,  Seok HEO ,  Yong Won CHOI ,  Yun Jong CHOI

IPC: H01L21/67 ,  G05B19/418

Abstract: A method for controlling a semiconductor manufacturing facility includes measuring output change amounts of differential pressure sensors in the facility when pressure conditions change by a number of fans. The fans are then classified into different groups and subgroups and control sequences of the subgroups are determined based on the change amounts. Difference values are then calculated, and a control signal is generated to adjust the rotation speed of the fans.