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公开(公告)号：US20220274780A1
公开(公告)日：2022-09-01
申请号：US17672081
申请日：2022-02-15
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kyeongsup BYEON , Inwook KOO , Dongwon KIM , Minyoung KIM , Yi JIN , Jongkyu KIM , Jinho SO , Byungjun AN , Yinghu XU , Beomsoo HWANG
Abstract: A gas supply system includes a loading/unloading stage including a cradle loader where a cradle loaded with a gas container is loaded, a test buffer chamber is configured to test the gas container, and a loading/unloading robot configured to transfer the gas container between the cradle and the test buffer chamber. A gas supply stage includes a storage queue configured to temporarily store the gas container, a gas supply cabinet where the gas container is mounted, and a transfer robot configured to transfer the gas container between the test buffer chamber and the storage queue and between the storage queue and the gas supply cabinet.
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公开(公告)号：US20240375269A1
公开(公告)日：2024-11-14
申请号：US18660985
申请日：2024-05-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jongkyu KIM , Kwangjun KIM , Dongwon KIM , Minyoung KIM , Seounghyun SEOK , Jinho SO , Jaehwa YANG , Heedoo YANG , Hyungho CHOI
Abstract: A chemical drum replacement apparatus includes an automated robotic assembly configured to attach or detach a drum cap and a coupler module to or from a chemical drum and a transfer robotic assembly configured to transfer the chemical drum, where the automated robotic assembly includes a travelling module configured to move the automated robotic assembly, a manipulator on an upper surface of the travelling module, and a gripper at an end of the manipulator, the gripper configured to attach or detach the drum cap and the coupler module to or from the chemical drum.
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公开(公告)号：US20210028052A1
公开(公告)日：2021-01-28
申请号：US16846792
申请日：2020-04-13
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jinho SO , Keonwoo KIM , Joohee KIM , Minsung KIM , Eultae KIM , Bora YOON
IPC: H01L21/687 , H01L21/67 , H01L21/68 , H01J37/32
Abstract: A substrate processing apparatus and a lift pin alignment apparatus, the substrate processing apparatus including a chamber; a substrate plate on which the substrate is seatable; a plurality of movable lift in the substrate plate to support the substrate; a leveling sensor configured to be loadable in the chamber on the lift pins; a controller configured to receive measurement values of roll (φ) and pitch (θ) of a plane of the lift pins to calculate a rotation matrix (T) of the plane from the measurement values of roll (φ) and pitch (θ), and to calculate travel distances of the lift pins for leveling the plane to be parallel with a horizontal reference plane by using the rotation matrix (T) and to output a lift pin control signal for aligning the lift pins; and a lift pin driver to move the lift pins according to the lift pin control signal.
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公开(公告)号：US20230129083A1
公开(公告)日：2023-04-27
申请号：US17876064
申请日：2022-07-28
Applicant: Samsung Electronics Co., Ltd.
Inventor： Jinho SO , Kwangiun KIM , Chigun AN , Huigwan LEE , Hyungho CHOI , Junhyong LEE
Abstract: A gas cylinder automation system may include: a transfer path automatically supply gas in a gas cylinder brought into the gas cylinder automation system to a semiconductor process line; and a cylinder-type sensor checking whether the transfer path is abnormal by moving along the transfer path, wherein the cylinder-type sensor includes: a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and having a first detecting sensor disposed on the end cap fastening member to detect one of a force or torque applied to the end cap and a cylinder body connected to the cylinder head and having a second detecting sensor including at least one of an acceleration sensor or an inclination sensor mounted thereon.
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