公开(公告)号：US09228685B2

公开(公告)日：2016-01-05

申请号：US13992148

申请日：2011-11-30

申请人： Sensho Kobayashi ,  Keita Kumagai

发明人： Sensho Kobayashi ,  Keita Kumagai

IPC分类号： H01L21/67 ,  F16L53/00 ,  C23C16/44

CPC分类号： F16L53/00 ,  C23C16/4408 ,  H01L21/67109 ,  H01L21/67201 ,  Y10T137/6416

摘要： A load lock device includes a vessel of which an internal pressure is variable between a pressure corresponding to a vacuum chamber and an atmospheric pressure; a purge gas supply source configured to supply a purge gas into the vessel; an exhaust device configured to evacuate an inside of the vessel; a pressure controller configured to adjust the internal pressure of the vessel to be the pressure corresponding to the vacuum chamber and the atmospheric pressure; a cooling member within the vessel configured to cool a substrate while the substrate is placed adjacent thereto; a first purge gas discharging member configured to discharge the purge gas to flow in parallel with the substrate while controlling a turbulent flow thereof; and a second purge gas discharging member formed of a porous material and configured to discharge the purge gas toward a bottom surface of the substrate from below the substrate.

摘要翻译： 一种装载锁定装置包括容器，其内部压力在对应于真空室的压力和大气压之间是可变的; 净化气体供应源，其构造成将吹扫气体供应到所述容器中; 构造成排出容器内部的排气装置; 压力控制器，被配置为将所述容器的内部压力调节为与所述真空室对应的压力和所述大气压力; 所述容器内的冷却构件构造成在所述衬底相邻放置时冷却衬底; 第一吹扫气体排出构件，其构造成排出吹扫气体，同时控制其流动; 以及第二吹扫气体排出构件，其由多孔材料形成，并且构造成从衬底的下方朝向衬底的底表面排出吹扫气体。

公开(公告)号：US20130248014A1

公开(公告)日：2013-09-26

申请号：US13992148

申请日：2011-11-30

申请人： Sensho Kobayashi ,  Keita Kumagai

发明人： Sensho Kobayashi ,  Keita Kumagai

IPC分类号： F16L53/00

CPC分类号： F16L53/00 ,  C23C16/4408 ,  H01L21/67109 ,  H01L21/67201 ,  Y10T137/6416

摘要： A load lock device includes a vessel of which an internal pressure is variable between a pressure corresponding to a vacuum chamber and an atmospheric pressure; a purge gas supply source configured to supply a purge gas into the vessel; an exhaust device configured to evacuate an inside of the vessel; a pressure controller configured to adjust the internal pressure of the vessel to be the pressure corresponding to the vacuum chamber and the atmospheric pressure; a cooling member within the vessel configured to cool a substrate while the substrate is placed adjacent thereto; a first purge gas discharging member configured to discharge the purge gas to flow in parallel with the substrate while controlling a turbulent flow thereof; and a second purge gas discharging member formed of a porous material and configured to discharge the purge gas toward a bottom surface of the substrate from below the substrate.

摘要翻译： 一种装载锁定装置包括容器，其内部压力在对应于真空室的压力和大气压之间是可变的; 净化气体供应源，其构造成将吹扫气体供应到所述容器中; 构造成排出容器内部的排气装置; 压力控制器，被配置为将所述容器的内部压力调节为与所述真空室对应的压力和所述大气压力; 所述容器内的冷却构件构造成在所述衬底相邻放置时冷却衬底; 第一吹扫气体排出构件，其构造成排出吹扫气体，同时控制其流动; 以及第二吹扫气体排出构件，其由多孔材料形成，并且构造成从衬底的下方朝向衬底的底表面排出吹扫气体。