公开(公告)号：US20130312431A1

公开(公告)日：2013-11-28

申请号：US13983973

申请日：2012-02-08

申请人： Sergei Syssoev ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells ,  JR. Michael J. Eacobacci

发明人： Sergei Syssoev ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells ,  JR. Michael J. Eacobacci

IPC分类号： B01D8/00 ,  F04B37/08

CPC分类号： F04B37/08 ,  B01D8/00 ,  Y10T29/49236

摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

摘要翻译： 低温泵具有易于制造的前挡板，具有改进的气体分布，并且具有大面积的第二级阵列板以捕获II型气体。 低温泵具有第一级前挡板，其具有从孔口弯曲并连接到孔口的孔口和翼片。 低温泵具有比第二级阵列的冷却挡板更大的面积的第二级顶板。

公开(公告)号：US09266038B2

公开(公告)日：2016-02-23

申请号：US13983973

申请日：2012-02-08

申请人： Sergei Syssoev ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells ,  Michael J. Eacobacci, Jr.

发明人： Sergei Syssoev ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells ,  Michael J. Eacobacci, Jr.

IPC分类号： B01D8/00 ,  F04B37/08

CPC分类号： F04B37/08 ,  B01D8/00 ,  Y10T29/49236

摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

公开(公告)号：US09266039B2

公开(公告)日：2016-02-23

申请号：US13988497

申请日：2011-11-23

申请人： Michael J. Eacobacci, Jr. ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells

发明人： Michael J. Eacobacci, Jr. ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells

IPC分类号： B60H1/00 ,  B01D8/00 ,  F04B37/08 ,  F04B37/14

CPC分类号： B01D8/00 ,  F04B37/08 ,  F04B37/14

摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.

摘要翻译： 低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。 第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内， 在再次达到完全负载的低温泵的第二冷却阶段变暖。

公开(公告)号：US20130239593A1

公开(公告)日：2013-09-19

申请号：US13988497

申请日：2011-11-23

申请人： Michael J. Eacobacci, JR. ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells

发明人： Michael J. Eacobacci, JR. ,  Allen J. Bartlett ,  John J. Casello ,  Jeffrey A. Wells

IPC分类号： B01D8/00

CPC分类号： B01D8/00 ,  F04B37/08 ,  F04B37/14

摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.

摘要翻译： 低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。 第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内， 在再次达到完全负载的低温泵的第二冷却阶段变暖。