公开(公告)号：US06881268B2

公开(公告)日：2005-04-19

申请号：US10168823

申请日：2000-12-21

申请人： Setsuji Shinoda ,  Toshiharu Nakazawa ,  Nobuharu Noji ,  Shunichi Aiyoshizawa

发明人： Setsuji Shinoda ,  Toshiharu Nakazawa ,  Nobuharu Noji ,  Shunichi Aiyoshizawa

IPC分类号： F17D1/02 ,  C23C16/40 ,  C23C16/44 ,  C23C16/455 ,  H01L21/00 ,  B01D39/16 ,  B01D47/05 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/45593 ,  C23C16/405 ,  C23C16/4402 ,  C23C16/4412 ,  H01L21/67017

摘要： The present apparatus includes a casing (1) having a gas introduction opening (3) for introducing a gas into the casing and a gas discharge opening (5) for discharging the gas from the casing, a gas circulating tube passage (8) communicating with the casing for effecting circulation of the gas, a circulating fan (11) for effecting circulation of the gas in the casing through the gas circulating tube passage, and a valve (6, 7) switchable between a position for conducting the introducing and discharging of the gas into and from the casing through the gas introduction opening and the gas discharge opening and a position for effecting circulation of the gas in the casing through the gas circulating tube passage. The apparatus further includes a trap (10), a filter (4) and a heat exchanger (9) for conducting a desired treatment with respect to the circulated gas, such as removal of particles.

摘要翻译： 本发明的装置包括具有用于将气体引入壳体的气体导入口（3）和用于从壳体排出气体的排气口（5）的壳体（1），与气体排出口 用于实现气体循环的壳体，用于通过气体循环管通道使壳体中的气体循环的循环风扇（11）;以及可在可引导和排出的位置之间切换的阀（6,7） 气体通过气体引入开口和气体排出口进入和离开壳体，以及通过气体循环管通道使气体在壳体中循环的位置。 该装置还包括用于对循环气体进行所需处理的捕集器（10），过滤器（4）和热交换器（9），例如去除颗粒。

公开(公告)号：US20060042059A1

公开(公告)日：2006-03-02

申请号：US10960778

申请日：2004-10-08

申请人： Ichiju Satoh ,  Setsuji Shinoda ,  Yoshinori Jono ,  Tsutomu Nishihashi

发明人： Ichiju Satoh ,  Setsuji Shinoda ,  Yoshinori Jono ,  Tsutomu Nishihashi

IPC分类号： H01L21/00

CPC分类号： H01L21/6719 ,  F04B37/14 ,  F04B39/0044 ,  F16F15/0275 ,  H01L21/67288

摘要： The present invention provides a vibration isolation system which can prevent transmission of vibration from a transfer unit or other unit to a vacuum chamber, and can accurately perform positioning of the vacuum chamber connected to an elastic member having a simple structure and a transfer space therein. The present invention includes a vacuum chamber (11) placed on a vibration isolation unit, a transfer chamber (13) having a transfer space through which a work is transferred into the vacuum chamber (11), an elastic member (15) for connecting the vacuum chamber (11) and the transfer chamber (13), an actuator (24, 24) for elastically supporting the vacuum chamber (11) with respect to a fixed-side member, a position sensor (22) for detecting a displacement of the vacuum chamber (11) with respect to the fixed-side member, and a control unit (23) for controlling the actuator (24) based on output of the position sensor.

摘要翻译： 本发明提供一种可以防止振动从传送单元或其他单元传递到真空室的隔振系统，并且可以精确地执行连接到具有简单结构和传递空间的弹性构件的真空室的定位。 本发明包括放置在隔振单元上的真空室（11），具有传送空间的传送室（13），工件通过该传送空间传送到真空室（11）中;弹性构件（15） 真空室（11）和传送室（13），用于相对于固定侧构件弹性支撑真空室（11）的致动器（24,24），用于检测真空室 相对于固定侧构件的真空室（11），以及用于基于位置传感器的输出来控制致动器（24）的控制单元（23）。