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公开(公告)号：US06881268B2
公开(公告)日：2005-04-19
申请号：US10168823
申请日：2000-12-21
IPC分类号： F17D1/02 , C23C16/40 , C23C16/44 , C23C16/455 , H01L21/00 , B01D39/16 , B01D47/05 , C23F1/00 , H01L21/306
CPC分类号： C23C16/45593 , C23C16/405 , C23C16/4402 , C23C16/4412 , H01L21/67017
摘要： The present apparatus includes a casing (1) having a gas introduction opening (3) for introducing a gas into the casing and a gas discharge opening (5) for discharging the gas from the casing, a gas circulating tube passage (8) communicating with the casing for effecting circulation of the gas, a circulating fan (11) for effecting circulation of the gas in the casing through the gas circulating tube passage, and a valve (6, 7) switchable between a position for conducting the introducing and discharging of the gas into and from the casing through the gas introduction opening and the gas discharge opening and a position for effecting circulation of the gas in the casing through the gas circulating tube passage. The apparatus further includes a trap (10), a filter (4) and a heat exchanger (9) for conducting a desired treatment with respect to the circulated gas, such as removal of particles.
摘要翻译： 本发明的装置包括具有用于将气体引入壳体的气体导入口（3）和用于从壳体排出气体的排气口（5）的壳体（1），与气体排出口 用于实现气体循环的壳体，用于通过气体循环管通道使壳体中的气体循环的循环风扇（11）;以及可在可引导和排出的位置之间切换的阀（6,7） 气体通过气体引入开口和气体排出口进入和离开壳体，以及通过气体循环管通道使气体在壳体中循环的位置。 该装置还包括用于对循环气体进行所需处理的捕集器（10），过滤器（4）和热交换器（9），例如去除颗粒。
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公开(公告)号：US06700273B1
公开(公告)日：2004-03-02
申请号：US09633139
申请日：2000-08-04
IPC分类号： H02K1700
CPC分类号： H02K5/128 , F04C18/00 , F04C29/0085 , F04C2220/10 , F04C2240/51 , H02K3/44
摘要： A gas transfer machine for use as a vacuum pump, for example, has a pump rotor mounted on a rotatable shaft for transferring a gas, and a reluctance-type motor for rotating the rotatable shaft. The reluctance-type motor has a stator, a motor rotor surrounded by the stator, and a shield member isolating the stator from the motor rotor. The motor rotor is directly coupled to the rotatable shaft and has a plurality of magnetic salient poles.
摘要翻译： 例如，用作真空泵的气体输送机具有安装在用于输送气体的旋转轴上的泵转子和用于旋转可旋转轴的磁阻型电动机。 磁阻型电动机具有定子，由定子包围的电机转子以及将定子与电动机转子隔离的屏蔽部件。 马达转子直接与可转动轴相连，并具有多个磁性突出极。
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公开(公告)号：US06873075B2
公开(公告)日：2005-03-29
申请号：US10257937
申请日：2001-04-20
申请人： Akiko Taira , Toshiharu Nakazawa
发明人： Akiko Taira , Toshiharu Nakazawa
CPC分类号： F16C32/0442 , F16C32/0444 , F16C32/0457 , F16C2360/45 , F16C2380/26 , H02P27/08
摘要： A magnetic bearing control device that can operate a motor with low noise, has a simple system construction and is compact and inexpensive comprises: at least a pair of opposed electromagnets for supporting a suspended unit without contact; a motor M for rotating the suspended unit; and a controller for driving and controlling them.A DC/DC converter 13 supplies a driving power to an inverter 14 for driving the motor M. The inverter 14 for driving the motor M uses both PWM and PAM control schemes to drive and rotate the motor M.
摘要翻译： 一种能够操作具有低噪声的电动机的磁性轴承控制装置，具有简单的系统结构并且紧凑且便宜的包括：至少一对相对的电磁体，用于支撑悬挂单元而不接触; 用于旋转悬挂单元的马达M; 一个用于驱动和控制它们的控制器.DC / DC转换器13向用于驱动电动机M的逆变器14提供驱动电力。用于驱动电动机M的逆变器14使用PWM和PAM控制方案来驱动和旋转电动机 M.
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公开(公告)号：US06617722B2
公开(公告)日：2003-09-09
申请号：US09950054
申请日：2001-09-12
IPC分类号： H02K2914
CPC分类号： F16C32/0446
摘要： A magnetic levitation rotating machine is provided which can stably detect the displacement and rotating speed of a rotator and, at the same time, can reduce the size of the whole apparatus, that is, can render the whole apparatus compact. The magnetic levitation rotating machine for supporting a rotator in a levitated state by magnetic force of an electromagnet or a permanent magnet comprises: a position detection plane provided in the rotator and a concave and/or a convex provided in the plane; a displacement sensor provided on the fixed side, for detecting the displacement of the plane including the concave or the convex; and a detection mechanism for detecting the displacement of the rotator and the rotating speed of the rotator from the output of the displacement sensor.
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公开(公告)号：US06539043B1
公开(公告)日：2003-03-25
申请号：US09856138
申请日：2001-05-29
IPC分类号： H01S322
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： The present invention provides a discharge-pumped excimer laser device which includes a laser chamber filled with a laser gas that is deteriorated to a small extent, magnetic bearings and a motor that are resistant to the entry of dust particles, and parts that are held in contact with the laser gas and suffer little damage, and has a long service life. The discharge-pumped excimer laser device according to the present invention has a laser chamber (1) filled with a laserigas and housing at least a pair of main discharge electrodes (2, 2) for producing an electric discharge to be able to oscillate a laser beam, housings (6, 7) joined to opposite sides of the laser chamber (1), a cross flow fan (3) having opposite ends rotatably supported by magnetic bearings (8, 9, 10, 11) accommodated in the housings (6, 7), for producing a high-speed laser gas flow between the main discharge electrodes (2, 2), a motor (12) accommodated in the housing (7) for rotating the cross flow fan (3), laser gas flow passages (61, 62) extending through gaps between rotor side and stator side of the magnetic bearings (8, 9, 10, 11) and the motor (12) over an axial entire length of the housings (6, 7), and communicating with an interior of the laser chamber (1), a laser gas introduction passage (60) extending from the interior of the laser chamber (1) and communicating with the laser gas flow passages (61, 62), and filters (20, 20) disposed in the laser gas introduction passage (60).
摘要翻译： 本发明提供了一种排出泵浦的准分子激光装置，其包括填充有少量劣化的激光气体的激光室，磁性轴承和抵抗灰尘颗粒进入的电动机以及保持在 与激光气体接触，损伤小，使用寿命长。本发明的排出泵浦准分子激光装置具有填充有激光的激光室（1），并容纳至少一对主放电电极 （2,2），用于产生能够振荡激光束的放电，与激光室（1）的相对侧接合的壳体（6,7），具有相对端部的交叉流动风扇（3），其可旋转地支撑在 容纳在壳体（6,7）中的磁性轴承（8,9,10,11），用于在主放电电极（2,2）之间产生高速激光气流，容纳在壳体 （7），用于旋转横流风扇（3），激光气体 在所述壳体（6,7）的轴向整个长度上延伸穿过所述磁性轴承（8,9,10,11）和所述电动机（12）的转子侧和定子侧之间的间隙的流动通道（61,62），以及 与所述激光室（1）的内部连通，从所述激光室（1）的内部延伸并与所述激光气体流路（61,62）连通的激光气体导入通路（60） 20）设置在激光气体导入通路（60）中。
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公开(公告)号：US06404088B1
公开(公告)日：2002-06-11
申请号：US09657067
申请日：2000-09-07
IPC分类号： H02K709
CPC分类号： F16C32/0446 , F16C32/0442 , F16C2231/00
摘要： A magnetic bearing device has an object levitated in an arbitrary position between confronting electromagnets. Positional displacement sensors detect a positional displacement of the object. When the electromagnets are successively energized, the object is moved in a mechanically movable maximum range between the electromagnets, and maximum and minimum values of a detected positional displacement signal from the positional displacement sensors are detected. A middle value between the maximum and minimum values is calculated and compared with a threshold level. An adjustment signal is applied to an offset corrector which produces an offset-corrected signal from the detected positional displacement signal, so as to substantially eliminate the difference between the middle value and the threshold level so that the middle value represents a position in which the object is to be levitated between the electromagnets.
摘要翻译： 磁性轴承装置具有悬浮在面对的电磁体之间的任意位置的物体。 位置位移传感器检测物体的位置位移。 当电磁体依次通电时，物体在电磁铁之间以机械方式移动的最大范围内移动，并且检测来自位置位移传感器的检测到的位置位移信号的最大值和最小值。 计算最大值和最小值之间的中间值，并将其与阈值级别进行比较。 调整信号被应用于从检测到的位置位移信号产生偏移校正信号的偏移校正器，以便基本上消除中间值和阈值水平之间的差异，使得中间值表示对象 将在电磁铁之间悬浮。
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公开(公告)号：US5679992A
公开(公告)日：1997-10-21
申请号：US729031
申请日：1996-10-09
CPC分类号： F16C27/00 , F04D19/048 , F16C32/0425 , F16C32/0478 , F16C39/063 , F16C2360/45
摘要： A magnetic bearing unit is disclosed which comprises a rotor supported in a radial direction by magnetic effects generated by permanent magnets arranged within a passive radial magnetic bearing and supported in an axial direction by an actively-controlled axial magnetic bearing. The unit also comprises a movable member arranged between the stator and rotor, and the passive magnetic member is arranged between the movable member and the rotor. At least first and second pairs of axially opposing faces are provided on the stator and the movable member respectively. A biasing means is in functional association with the movable member for forcing the movable member to shorten a spacing between the first pair of opposing faces. The first pair of opposing faces is formed with a recess having a curved cross sectional shape on each of the opposing faces, and a plurality of balls having a radius not more than a radius of the recess are disposed in the recess. The second pair of opposing faces are bridged with a damping member made of an elastic material. The resulting bearing unit in such a compressive state can be used in any orientation without causing any operational problems such as those encountered when the conventional magnetic bearing is used in a horizontal orientation. The unit is easy to control and produces stable smooth operation in radial and axial directions at all times.
摘要翻译： 公开了一种磁轴承单元，其包括通过由被动径向磁轴承中布置的永磁体产生的并且通过主动控制的轴向磁轴承沿轴向支撑的磁力作用沿径向方向支撑的转子。 该单元还包括设置在定子和转子之间的可动构件，并且被动磁构件设置在可动构件和转子之间。 至少第一和第二对轴向相对的面分别设置在定子和可动件上。 偏压装置与可动件功能相关联，用于迫使可动件缩短第一对相对面之间的间距。 第一对相对面形成有在每个相对面上具有弯曲横截面形状的凹部，并且具有半径不大于凹部半径的多个球设置在凹部中。 第二对相对面与由弹性材料制成的阻尼构件桥接。 所得到的轴承单元处于这种压缩状态，可以以任何方向使用，而不会引起任何操作问题，例如当常规磁性轴承以水平方向使用时所遇到的问题。 该单元易于控制，始终在径向和轴向方向均匀平稳运行。
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8.发明授权Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system 失效真空泵自诊断方式，真空泵自诊断系统和真空泵中央监控系统公开(公告)号：US08721295B2
公开(公告)日：2014-05-13
申请号：US11813716
申请日：2006-04-07
CPC分类号： F04B51/00 , F04C18/126 , F04C18/16 , F04C23/001 , F04C25/02 , F04C2220/10 , F04C2270/80 , F04C2280/02
摘要： There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages. A self-diagnosis unit is provided for calculating an integrated value or an average value of a current of a motor for rotating said rotor, and making self-diagnosis of the vacuum pump when the integrated value or average value exceeds a predetermined alarm set value. The self-diagnosis unit switches from one self-diagnosis calculation method to another or interrupts the self-diagnosis calculation based on a pressure value detected by said pressure sensor.
摘要翻译： 提供真空泵自诊断方法，真空泵自诊断系统，能够对干式真空泵进行自诊断的真空泵中央监控系统。 真空泵自诊断方法决定故障的发生，并且当超过预定的报警设定值的积分值或用于旋转所述真空泵的转子的电动机的电流的平均值时，产生报警。 在用于进行真空泵的自诊断的真空泵自诊断系统中，所述真空泵包括壳体和可转动地设置在所述壳体中的转子，用于通过所述转子的旋转吸入和排出气体，所述转子包括多个级和 压力传感器设置在转子级之间。 提供自诊断单元，用于计算用于旋转所述转子的电动机的电流的积分值或平均值，并且当所述积分值或平均值超过预定报警设定值时，进行所述真空泵的自诊断。 自诊断单元从一个自诊断计算方法切换到另一个，或者基于由所述压力传感器检测到的压力值中断自诊断计算。
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公开(公告)号：US07360454B2
公开(公告)日：2008-04-22
申请号：US11418142
申请日：2006-05-05
IPC分类号： G01F1/22
摘要： A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter includes: a casing having an enlarged portion and being disposed vertically; and a float enclosed in the enlarged portion of the casing and at least partly having a detection surface. The float is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing. The flowmeter also includes at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.
摘要翻译： 流量计可以测量流量小的流量，测量精度高，可制成小型化，可以处理各种类型的化学药品，并能以低成本轻松生产。 该流量计包括：具有放大部分并垂直设置的壳体; 以及包围在壳体的扩大部分中并且至少部分地具有检测表面的浮子。 浮子被从下方流入壳体的液体向上推，并在壳体内向上流动。 流量计还包括设置在壳体的扩大部分外部的至少一个位移传感器，用于通过磁化浮子的检测表面来检测浮子的轴向位移。
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公开(公告)号：US20070075673A1
公开(公告)日：2007-04-05
申请号：US11527502
申请日：2006-09-27
申请人： Toshiharu Nakazawa , Atushi Ooyama
发明人： Toshiharu Nakazawa , Atushi Ooyama
IPC分类号： H02P1/46
摘要： A brushless synchronous motor is provided in a simple configuration and at a low cost. The brushless synchronous motor comprises a rotor having salient magnets arranged in a circumferential direction, a stator having driving magnetic poles arranged in the circumferential direction, and an exciting coil wound around each driving magnetic pole, where the rotor is made in a non-circular profile. For example, the rotor may comprise a cylindrical body which has at least one flat surface perpendicular to one magnetic pole direction of the rotor, or a cylindrical body having an elliptic profile with a longer diameter in one magnetic pole direction of the rotor. A detector circuit is associated with each of a predetermined number of exciting coils for outputting a detection signal indicative of the impedance of the exciting coil in accordance with the distance between the driving magnetic pole and rotor, to detect a rotating angle of the rotor.
摘要翻译： 以简单的结构和低成本提供无刷同步电动机。 无刷同步电动机包括沿圆周方向布置的突出磁体的转子，具有沿周向布置的驱动磁极的定子和缠绕在每个驱动磁极上的励磁线圈，其中转子被制成非圆形轮廓 。 例如，转子可以包括具有垂直于转子的一个磁极方向的至少一个平坦表面的圆柱体，或者具有在转子的一个磁极方向上具有较长直径的椭圆形轮廓的圆柱体。 检测器电路与预定数量的励磁线圈中的每一个相关联，用于根据驱动磁极和转子之间的距离输出指示励磁线圈的阻抗的检测信号，以检测转子的旋转角度。
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