公开(公告)号：US11592502B2

公开(公告)日：2023-02-28

申请号：US15647466

申请日：2017-07-12

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Ann Gabrys

IPC: G01R33/26

Abstract: An integrated sensor includes a sensor cell, a signal source, an input optical rotator, and a signal detector. The integrated sensor includes a positioner for a signal-processing component. The positioner may be a linear positioner for the signal-processing component, such as a signal source or a signal detector, or may be a rotational positioner for the signal-processing component, such as a polarizer or a polarized signal source. The signal-processing component is located on a signal path of the integrated sensor. A method of adjusting a linear position or rotational position of a signal-processing component is also disclosed. A linear position or a rotational position of the signal-processing component may be adjusted to improve performance of the integrated sensor.

公开(公告)号：US11193990B2

公开(公告)日：2021-12-07

申请号：US15621088

申请日：2017-06-13

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  David Brian McDonald ,  Ann Gabrys ,  Paul Mawson ,  Anston Joel Lobo

IPC: G01R33/26

Abstract: An integrated microfabricated alkali vapor cell sensor includes two alkali vapor regions, with a signal path through each. One or two signal emitters, with associated optical signal rotators, such as quarter wave plates, provide circularly polarized input signals into the alkali vapor regions, so that a first signal through the first alkali vapor region is circularly polarized in an opposite direction from a second signal through the second alkali vapor region. Output signals from the two alkali vapor regions are transformed to linearly polarized signals and then measured by one or more signal detectors. A first Larmor frequency is estimated from the output signal from the first alkali vapor region, and a second Larmor frequency is estimated from the output signal from the second alkali vapor region. A heading error-free Larmor frequency is estimated from the first Larmor frequency and the second Larmor frequency.

公开(公告)号：US20190164934A1

公开(公告)日：2019-05-30

申请号：US16264733

申请日：2019-02-01

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Dok Won Lee ,  William D. French ,  Ann Gabrys

IPC: H01L25/065 ,  H01L23/00 ,  H01F17/00 ,  H01L23/522

Abstract: An inductor conductor design which minimizes the impact of skin effect in the conductors at high frequencies in integrated circuits and the method of manufacture thereof is described herein.

公开(公告)号：US20180306876A1

公开(公告)日：2018-10-25

申请号：US15621088

申请日：2017-06-13

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  David Brian McDonald ,  Ann Gabrys ,  Paul Mawson ,  Anston Joel Lobo

IPC: G01R33/26

CPC classification number: G01R33/26

Abstract: An integrated microfabricated alkali vapor cell sensor includes two alkali vapor regions, with a signal path through each. One or two signal emitters, with associated optical signal rotators, such as quarter wave plates, provide circularly polarized input signals into the alkali vapor regions, so that a first signal through the first alkali vapor region is circularly polarized in an opposite direction from a second signal through the second alkali vapor region. Output signals from the two alkali vapor regions are transformed to linearly polarized signals and then measured by one or more signal detectors. A first Larmor frequency is estimated from the output signal from the first alkali vapor region, and a second Larmor frequency is estimated from the output signal from the second alkali vapor region. A heading error-free Larmor frequency is estimated from the first Larmor frequency and the second Larmor frequency.

公开(公告)号：US20180259600A1

公开(公告)日：2018-09-13

申请号：US15457608

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: G01R33/26

CPC classification number: G04F5/14 ,  H03L7/26

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to a first surface, and a second window attached to a second surface, opposite to the first window. The cell body laterally surrounds a cavity, so that the first window and the second window are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cell body has recesses on opposing exterior sides of the cell body; each recess extends from the first surface to the second surface. Exterior portions of the cell body wall in the recesses are recessed from singulation surfaces on the cell body exterior. The cell body is formed by etching the cavity and the recesses concurrently through a body substrate. After the windows are attached, the sensor cell is singulated from the body substrate through the recesses.

公开(公告)号：US20170299661A1

公开(公告)日：2017-10-19

申请号：US15099561

申请日：2016-04-14

Applicant: Texas Instruments Incorporated

Inventor： Iouri N. Mirgorodski ,  Roozbeh Parsa ,  William French ,  Dok Won Lee ,  Ann Gabrys

IPC: G01R33/00 ,  H05K1/02 ,  H05K3/06

CPC classification number: G01R33/0005 ,  G01R33/0052 ,  H05K1/0296 ,  H05K1/0306 ,  H05K3/064 ,  H05K2201/083

Abstract: A magnetic sensor has a circuit segment with a quadrupole region. The quadrupole region includes a supply line, a first return line and a second return line, all in a conductor layer. The first supply line is laterally adjacent to the supply line on a first side, and the second return line is laterally adjacent to the supply line on a second, opposite side. A space between the supply line and the first return line is free of the conductor layer; similarly, a space between the supply line and the second return line is free of the conductor layer. The first return line and the second return line are electrically coupled to the supply line at a terminus of the circuit segment.

公开(公告)号：US20150311355A1

公开(公告)日：2015-10-29

申请号：US14703364

申请日：2015-05-04

Applicant: Texas Instruments Incorporated

Inventor： Peter J. Hopper ,  William French ,  Paul Mawson ,  Steven Hunt ,  Roozbeh Parsa ,  Martin Fallon ,  Ann Gabrys ,  Andrei Papou

IPC: H01L31/024 ,  H01L31/18 ,  H01L31/0224

Abstract: A micro-fabricated atomic clock structure is thermally insulated so that the atomic clock structure can operate with very little power in an environment where the external temperature can drop to −40° C., while at the same time maintaining the temperature required for the proper operation of the VCSEL and the gas within the vapor cell.

Abstract translation: 微制造的原子钟结构是绝热的，使得原子钟结构可以在外部温度下降到-40℃的环境中以非常小的功率运行，同时保持适当的温度 VCSEL和蒸汽池内的气体的操作。

公开(公告)号：US10712401B2

公开(公告)日：2020-07-14

申请号：US15457669

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Ann Gabrys ,  Nathan Brockie ,  Terry Dyer ,  Roozbeh Parsa ,  William French

IPC: G01R33/032 ,  G04F5/14

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

公开(公告)号：US10591872B2

公开(公告)日：2020-03-17

申请号：US15457608

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: H01L21/00 ,  G04F5/14 ,  H03L7/26

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to a first surface, and a second window attached to a second surface, opposite to the first window. The cell body laterally surrounds a cavity, so that the first window and the second window are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cell body has recesses on opposing exterior sides of the cell body; each recess extends from the first surface to the second surface. Exterior portions of the cell body wall in the recesses are recessed from singulation surfaces on the cell body exterior. The cell body is formed by etching the cavity and the recesses concurrently through a body substrate. After the windows are attached, the sensor cell is singulated from the body substrate through the recesses.

公开(公告)号：US10067201B2

公开(公告)日：2018-09-04

申请号：US15099561

申请日：2016-04-14

Applicant: Texas Instruments Incorporated

Inventor： Iouri N Mirgorodski ,  Roozbeh Parsa ,  William French ,  Dok Won Lee ,  Ann Gabrys

IPC: G01R33/09 ,  G01R33/00 ,  H05K1/02 ,  H05K3/06

Abstract: A magnetic sensor has a circuit segment with a quadrupole region. The quadrupole region includes a supply line, a first return line and a second return line, all in a conductor layer. The first supply line is laterally adjacent to the supply line on a first side, and the second return line is laterally adjacent to the supply line on a second, opposite side. A space between the supply line and the first return line is free of the conductor layer; similarly, a space between the supply line and the second return line is free of the conductor layer. The first return line and the second return line are electrically coupled to the supply line at a terminus of the circuit segment.