公开(公告)号：US20230170877A1

公开(公告)日：2023-06-01

申请号：US17537776

申请日：2021-11-30

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Jeronimo SEGOVIA-FERNANDEZ ,  Bichoy BAHR ,  Ting-Ta YEN ,  Michael Henderson PERROTT ,  Zachary SCHAFFER

IPC: H03H9/17 ,  H03H9/13 ,  H03H9/02

CPC classification number: H03H9/175 ,  H03H9/131 ,  H03H9/02015

Abstract: A tunable bulk acoustic wave (BAW) resonator includes: a first electrode adapted to be coupled to an oscillator circuit; a second electrode adapted to be coupled to the oscillator circuit; and a piezoelectric layer between the first electrode and the second electrode; and a Bragg mirror. The Bragg mirror has: a metal layer; and a dielectric layer between the metal layer and either of the first electrode or the second electrode. The tunable BAW resonator also includes: a radio-frequency (RF) signal source having a first end and a second end, the first end coupled to the first electrode, and the second end coupled to the second electrode; and an amplifier circuit between either the first electrode or the second electrode and the Bragg mirror metal layer.