公开(公告)号：US20240334692A1

公开(公告)日：2024-10-03

申请号：US18193899

申请日：2023-03-31

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Zeng Zhang ,  Jack Qian ,  Keith Jarreau ,  Tamer San ,  Mark Eskew

IPC: H10B41/30 ,  H01L29/788 ,  H10B20/25 ,  H10B41/10

CPC classification number: H10B41/30 ,  H01L29/788 ,  H10B20/25 ,  H10B41/10

Abstract: An integrated circuit comprises a transistor extending into a semiconductor substrate and having a gate structure having major and minor axes parallel to a surface of the semiconductor substrate, and a UV-opaque sheet structure vertically spaced apart from a top surface of the gate structure by a first distance and including an opening, the opening having first and second sides about parallel to the major axis, at least one of the first and second sides laterally spaced apart from a corresponding side of the gate structure by a second distance that is less than or equal to the first distance.