公开(公告)号：US20250112072A1

公开(公告)日：2025-04-03

申请号：US18885568

申请日：2024-09-14

Applicant: Tokyo Electron Limited

Inventor： Lingxin JIANG ,  Tsukasa CHIDA

IPC: H01L21/677 ,  H02J50/10 ,  H02J50/40

Abstract: Provided is a substrate transfer device comprising: a tile part forming a moving surface of an area where a substrate is transferred and provided with a plurality of first coils that generate magnetic field on the moving surface by a power supplied from a power supply part; and a substrate transfer module including a plurality of magnets that exert a repulsive force against the magnetic field and a substrate holder configured to hold a substrate to be transferred, the substrate transfer module configured to move above the moving surface by magnetic levitation using the repulsive force, wherein the substrate transfer module includes a second coil for wirelessly supplying a power to a power consuming device provided in the substrate transfer module during movement above the moving surface using an electromotive force that is exerted against the magnetic field generated by the first coils.

公开(公告)号：US20230170239A1

公开(公告)日：2023-06-01

申请号：US17991345

申请日：2022-11-21

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takehiro SHINDO ,  Dongwei LI ,  Lingxin JIANG ,  Shinya OKANO ,  Toshiaki KODAMA ,  Wataru MATSUMOTO

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67748 ,  H01L21/67265 ,  H01L21/67333

Abstract: An apparatus for transferring a substrate to a substrate processing chamber. The apparatus comprises: a substrate transfer chamber having a floor and a side wall; a substrate transfer module comprising a holder and second magnets, and configured to be movable in the substrate transfer chamber by magnetic levitation; and a controller configured to control an operating force for moving the substrate transfer module. The controller comprises: a parameter storage configured to store at least one model parameter; a control schedule creating section configured to acquire identification information and a movement schedule, to obtain the operating force, and to output a control schedule; and a magnetic force adjusting section configured to perform feedforward control.