公开(公告)号：US20250096016A1

公开(公告)日：2025-03-20

申请号：US18726891

申请日：2022-12-22

Applicant: TORAY ENGINEERING CO., LTD.

Inventor： Kenji HAMAKAWA ,  Takashi HARE ,  Kensuke TASHIMA ,  Shigeru TOHNO ,  Ken KITAMURA

IPC: H01L21/67 ,  H01L21/60 ,  H01L21/687

Abstract: A positioning device is provided for determining a relative position between a substrate and a processing unit that is configured to perform an attachment process, when performing the attachment process at a prescribed position of the substrate. The positioning device comprises a substrate table configured to hold the substrate, a processing position movement mechanism including a driving unit configured to move the substrate table and the processing unit relative to each other, and a braking unit configured to restrict movement, caused by the driving unit, of at least one of the substrate table and the processing unit, and a control unit connected to the driving unit and the braking unit. The control unit is configured to restrict, by using the braking unit, the movement of the at least one of the substrate table and the processing unit during the attachment process.