公开(公告)号：US20160130133A1

公开(公告)日：2016-05-12

申请号：US14891033

申请日：2014-05-21

Applicant: TRONICS MICROSYSTEMS S.A.

Inventor： François-Xavier BOILLOT ,  Rémi LAOUBI

IPC: B81B3/00 ,  B81B7/02 ,  G01C19/5762

CPC classification number: B81B3/0021 ,  B81B3/0048 ,  B81B7/02 ,  G01C19/5747 ,  G01C19/5762 ,  G01P2015/0837

Abstract: A sensor for measuring physical parameters such as acceleration, rotation, magnetic field, comprises a substrate (13) defining a substrate plane and at least one sensing plate (11, 12) suspended above the substrate (13) for performing a movement having at least a first component in a sensing direction. The sensing direction is orthogonal to the substrate plane. There is at least one detection arm (14.1, 14.2) that is suspended above the substrate (13) for performing a rotational movement about a rotation axis parallel to the substrate plane. An out-of-plane coupling structure (17.1, 17.4) is used to couple the first component of the movement of said sensing plate (11, 12) to said detection arm (14.1, 14.2) for generating the rotational movement of the detection arm (14.1, 14.2). A rotation detection structure cooperates with the detection arm (14.1, 14.2) for detecting the rotational movement of the detection arm (14.1, 14.2) with respect to the substrate plane. A pivot element (17.2, 17.3) is arranged at a distance from the out-of-plane coupling structure (17.1, 17.4), said pivot element (17.2, 17.3) coupling the sensing plate to a geometric reference plane (19), which is at a fixed distance above the substrate plane, so that the sensing plate (11, 12) performs a tilting out-of-plane movement.

Abstract translation: 用于测量诸如加速度，旋转，磁场的物理参数的传感器包括限定衬底平面的衬底（13）和悬挂在衬底（13）上方的至少一个感测板（11,12），用于执行至少具有 感测方向上的第一分量。 检测方向与基板平面正交。 至少有一个检测臂（14.1,14.2）悬挂在基板（13）上方，用于围绕平行于基板平面的旋转轴线进行旋转运动。 平面外耦合结构（17.1,17.4）用于将所述感测板（11,12）的运动的第一分量耦合到所述检测臂（14.1,14.2），以产生检测臂的旋转运动 （14.1,14.2）。 旋转检测结构与检测臂（14.1,14.2）配合，用于检测检测臂（14.1,14.2）相对于基板平面的旋转运动。 枢轴元件（17.2,17.3）被布置成离开平面外联接结构（17.1,17.4）一定距离，所述枢转元件（17.2,17.3）将感测板联接到几何参考平面（19），其中 在基板平面上方固定距离，使得感测板（11,12）执行倾斜的平面外运动。