公开(公告)号：US20180275161A1

公开(公告)日：2018-09-27

申请号：US15469754

申请日：2017-03-27

Applicant: NXP USA, INC.

Inventor： Jun Tang

IPC: G01P15/125 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0805 ,  G01P2015/082 ,  G01P2015/0837

Abstract: An inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has a first section and a second section, where the first section has a first mass that is greater than a second mass of the second section. An anchor is coupled to the surface of the substrate and a spring system is interconnected between the anchor and the first and second sections of the proof mass. The spring system enables translational motion of the first and second sections of the proof mass in response to linear acceleration forces imposed on the inertial sensor in any of three orthogonal directions.

公开(公告)号：US20170074658A1

公开(公告)日：2017-03-16

申请号：US15260757

申请日：2016-09-09

Applicant: Seiko Epson Corporation

Inventor： Satoru TANAKA

IPC: G01C19/5755 ,  G01C19/5769

CPC classification number: G01C19/5755 ,  G01C19/5769 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837 ,  G01P2015/0874

Abstract: A physical quantity sensor includes a base substrate, a movable portion that is oscillatably provided around an axis while facing the base substrate and that is divided into a first movable portion and a second movable portion, a first fixed electrode that is disposed on the base substrate facing the first movable portion, and a second fixed electrode that is disposed on the base substrate facing the second movable portion. The first fixed electrode and the second fixed electrode are configured so as to offset at least a part of a difference between a first fringe capacitance, which is between the first movable portion and the first fixed electrode, and a second fringe capacitance, which is between the second movable portion and the second fixed electrode.

Abstract translation: 一种物理量传感器，包括基底基板，可动部分，其围绕轴线可摆动地设置，同时面向基底基板并分为第一可动部分和第二可动部分，第一固定电极设置在基底基板上 面对第一可移动部分，以及第二固定电极，其设置在与第二可动部分相对的基底基板上。 第一固定电极和第二固定电极被配置为偏移第一可移动部分和第一固定电极之间的第一条纹电容和第二条纹电容之间的差异的至少一部分， 第二可动部和第二固定电极。

公开(公告)号：US09513310B2

公开(公告)日：2016-12-06

申请号：US14220979

申请日：2014-03-20

Applicant: STMicroelectronics S.r.l.

Inventor： Leonardo Baldasarre ,  Alessandro Tocchio ,  Sarah Zerbini

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: A z-axis micro-electro-mechanical detection structure, having a substrate defining a plane and a suspended mass carried by two anchorage elements. The suspended mass includes a translating mass, suspended over the substrate, mobile in a transverse direction to the plane and arranged between the anchorage elements and two tilting masses, each of which is supported by the anchorage elements through respective elastic anchorage elements so as to be able to rotate with respect to respective oscillation axes. The oscillation axes are parallel to each other to enable a translation movement of the translating mass. Fixed electrodes face at a distance the tilting masses or the translating mass so as to be able to detect displacement of the suspended mass as a result of external forces. Elastic supporting elements are arranged between the translating mass and the tilting masses to enable relative rotation between the translating mass and the tilting masses.

Abstract translation: z轴微电子机械检测结构，其具有限定平面的基板和由两个锚固元件承载的悬架。 悬挂质量包括悬挂在基板上的平移质量块，在横向方向移动到平面并且布置在锚固元件和两个倾斜块之间，每个倾斜块通过相应的弹性锚固元件由锚固元件支撑，以便是 能够相对于各个摆动轴线旋转。 振荡轴线彼此平行，以便平移质量的平移运动。 固定电极面对倾斜质量或平移质量的距离，以便能够检测由于外力而导致的悬浮质量的位移。 弹性支撑元件设置在平移质量块和倾斜质量块之间，以实现平移质量块与倾斜质量块之间的相对旋转。

公开(公告)号：US20150233965A1

公开(公告)日：2015-08-20

申请号：US14435925

申请日：2013-08-30

Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.

Inventor： Meihan Guo ,  Xinwei Zhang ,  Changfeng Xia ,  Wei Su

IPC: G01P15/125 ,  B81B7/02 ,  H02N1/08

CPC classification number: G01P15/125 ,  B81B7/02 ,  G01P2015/0837 ,  H01G5/16 ,  H02N1/08

Abstract: A parallel plate capacitor includes a first polar plate (10), and a second polar plate disposed opposite to the first polar plate (10). The parallel plate capacitor further includes at least a pair of sensitive units disposed on a substrate forming the first polar plate (10); the sensitive units includes sensitive elements (21a, 21b, 22a, 22b) and element connecting arms (23a, 23b, 24a, 24b) connecting the sensitive elements (21a, 21b, 22a, 22b) to the first polar plate (10). The parallel plate capacitor further includes anchoring bases (30, 31, 32, 33) disposed on a substrate where the second polar plate is located; the anchoring bases (30, 31, 32, 33) are connected to the element connecting arms (23a, 23b, 24a, 24b) via cantilever beams (30a, 30b, 31a, 31b, 32a, 32b, 33a, 33b); each element connecting arm (23a, 23b, 24a, 24b) is connected to at least two anchoring bases (30, 31, 32, 33), which are symmetric with respect to the element connecting arm. The parallel plate capacitor is more likely to be influenced by an external factor, thus being more likely to experience capacitance change. An acceleration sensor including the parallel plate capacitor is also provided.

Abstract translation: 平行板电容器包括第一极板（10）和与第一极板（10）相对设置的第二极板。 平行板电容器还包括至少一对设置在形成第一极板（10）的基板上的敏感单元。 敏感单元包括将敏感元件（21a，21b，22a，22b）连接到第一极板（10）的敏感元件（21a，21b，22a，22b）和元件连接臂（23a，23b，24a，24b）。 平行板电容器还包括设置在第二极板所在的基板上的固定基座（30,31,32,33）。 通过悬臂梁（30a，30b，31a，31b，32a，32b，33a，33b）将锚定基座（30,31,32,33）连接到元件连接臂（23a，23b，24a，24b） 每个元件连接臂（23a，23b，24a，24b）连接到至少两个相对于元件连接臂对称的锚定基座（30,31,32,33）。 并联平板电容更可能受到外部因素的影响，因此更容易发生电容变化。 还提供了包括平行板电容器的加速度传感器。

公开(公告)号：US20140260618A1

公开(公告)日：2014-09-18

申请号：US14190721

申请日：2014-02-26

Applicant: Agency for Science Technology and Research (A*STAR) ,  PGS Geophysical AS

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01P15/125

CPC classification number: G01V1/18 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0862 ,  G01P2015/0882 ,  G01V1/09 ,  G01V1/38

Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Abstract translation: 公开了具有分离的感测和力反馈电极的微机电系统（MEMS）加速计。 在一些实施例中，单独电极的使用可以增加这种装置的动态范围。 其他可能的优点包括例如更好的灵敏度，更好的噪声抑制和更好的信噪比。 在一个实施例中，加速度计包括三个硅晶片，由感应电极制成，其形成全差分电容结构的电容器，并且具有单独的力反馈电极，形成用于力反馈的电容器。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合间隔物和力反馈电极，其可以对检测质量区域施加恢复力。 具有力反馈电极的MEMS加速度计可用于地球物理勘测，例如用于地震检测或声学定位。

公开(公告)号：US20140260617A1

公开(公告)日：2014-09-18

申请号：US14190673

申请日：2014-02-26

Applicant: Agency for Science Technology and Research (A*STAR) ,  PGS Geophysical AS

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0882 ,  G01V1/02 ,  G01V1/38

Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Abstract translation: 公开了一种配置成测量Z轴加速度的全差分微机电系统（MEMS）加速计。 这可以避免传统电容感测架构中的一些缺点，例如由于布朗噪声导致的灵敏度较低，低噪声抑制和低SNR。 在一个实施例中，加速度计包括三个硅晶片，其由在全差分电容结构中形成电容器的电极制成。 这些电极可以分离在二氧化硅层上。 在一些实施例中，加速度计还包括二氧化硅层，压电结构，吸气剂层，接合垫，粘合隔离物和力反馈电极，其可以向检测质量区域施加力。 全差分MEMS加速度计可用于地球物理测量，例如用于地震检测或声学定位。

公开(公告)号：US08459116B2

公开(公告)日：2013-06-11

申请号：US13296991

申请日：2011-11-15

Applicant: Akira Miyatake ,  Toru Takahashi ,  Hisanobu Ohkawa ,  Katsuya Kikuiri ,  Hisayuki Yazawa ,  Toshihiro Kobayashi ,  Yoshitaka Uto

Inventor： Akira Miyatake ,  Toru Takahashi ,  Hisanobu Ohkawa ,  Katsuya Kikuiri ,  Hisayuki Yazawa ,  Toshihiro Kobayashi ,  Yoshitaka Uto

IPC: G01P15/125

CPC classification number: G01P15/08 ,  B81B3/001 ,  B81B3/0021 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0837 ,  G01P2015/0871

Abstract: A physical quantity sensor includes an anchor portion, a movable portion displaceable in a height direction, a supporting portion rotatably connected to the anchor portion and the movable portion, and a detection portion. The supporting portion includes a first connection arm connecting the anchor portion and the movable portion to each other and a leg portion extending from the anchor portion in a direction opposite to the first connection arm, the leg portion being displaced in a direction opposite to a displacement direction of the movable portion when the supporting portion rotates. A stopper surface is disposed at a position to which a distal end portion of the leg portion is contactable when the leg portion is displaced in the direction opposite to the displacement direction of the movable portion. Displacement of the movable portion is restricted when the distal end portion of the leg portion contacts the stopper surface.

Abstract translation: 物理量传感器包括锚固部分，在高度方向上可移动的可移动部分，可转动地连接到锚定部分和可移动部分的支撑部分，以及检测部分。 所述支撑部包括将所述锚固部和所述可动部彼此连接的第一连接臂和从所述锚定部沿与所述第一连接臂相反的方向延伸的脚部，所述腿部沿与所述第一连接臂相反的方向移位 支撑部旋转时的可动部的方向。 止动器表面设置在腿部在与可动部的移动方向相反的方向移位的状态下，腿部的前端部可接触的位置。 当腿部的远端部分接触止动表面时，可动部分的位移受到限制。

公开(公告)号：US20120272734A1

公开(公告)日：2012-11-01

申请号：US13227305

申请日：2011-09-07

Applicant: Won Kyu Jeung ,  Ho Seop Jeong

Inventor： Won Kyu Jeung ,  Ho Seop Jeong

IPC: G01P15/00

CPC classification number: G01C19/5755 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

Abstract: Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110 on which a hole 200 penetrating in a thickness direction is formed, a mass body 120 disposed on a bottom of a central portion 113 of the membrane 110, and a post 130 disposed on a bottom of an edge 115 of the membrane 110 to support the membrane 110 and surrounding the mass body 120. By the configuration, the preferred embodiment of the present invention reduces damping force due to viscosity of air at the time of vibration by forming the hole 200 on the membrane 110 to increase displacement or amplitude of the mass body 120, thereby increasing sensitivity of the inertial sensor 100.

Abstract translation: 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100被构造成包括在其上形成有沿厚度方向穿透的孔200的板状膜110，设置在中心部113的底部的质量体120 膜110和设置在膜110的边缘115的底部上的柱130，以支撑膜110并围绕质量体120.通过这种构造，本发明的优选实施例减少了由于粘度而引起的阻尼力 通过在膜110上形成孔200来振动时的空气，以增加质量体120的位移或振幅，由此增加惯性传感器100的灵敏度。

公开(公告)号：US20120186347A1

公开(公告)日：2012-07-26

申请号：US13012671

申请日：2011-01-24

Applicant: Andrew C. McNeil

Inventor： Andrew C. McNeil

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: A microelectromechanical systems (MEMS) sensor (20) includes a substrate (26) and suspension anchors (34, 36) formed on a planar surface (28) of the substrate (26). The MEMS sensor (20) further includes a first movable element (38) and a second movable element (40) suspended above the substrate (26). Compliant members (42, 44) interconnect the first movable element (38) with the suspension anchor 34 and compliant members (46, 48) interconnect the second movable element (40) with the suspension anchor (36). The movable elements (38, 40) have an equivalent shape. The movable elements may be generally rectangular movable elements (38, 40) or L-shaped movable elements (108, 110) in a nested configuration. The movable elements (38, 40) are oriented relative to one another in rotational symmetry about a point location (94) on the substrate (26).

Abstract translation: 微机电系统（MEMS）传感器（20）包括衬底（26）和形成在衬底（26）的平坦表面（28）上的悬挂锚固件（34,36）。 MEMS传感器（20）还包括悬挂在衬底（26）上方的第一可移动元件（38）和第二可移动元件（40）。 第一可移动元件（38）与悬挂锚固件34相互连接的合规构件（42,44）以及将第二可移动元件（40）与悬挂锚固件（36）相互连接的顺应构件（46,48）。 可移动元件（38,40）具有等效的形状。 可移动元件可以是嵌套构造的大致为矩形的可移动元件（38,40）或L形可移动元件（108,110）。 可移动元件（38,40）相对于彼此以关于基底（26）上的点位置（94）的旋转对称的方式定向。

公开(公告)号：US20120042729A1

公开(公告)日：2012-02-23

申请号：US12927282

申请日：2010-11-10

Applicant: Chuan-Wei Wang

Inventor： Chuan-Wei Wang

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0837 ,  G01P2015/0854 ,  G01P2015/0857

Abstract: The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) accelerator with enhanced structural strength. The MEMS accelerator is located on a substrate, and it includes: multiple springs, wherein each spring includes: an anchor, fixed on the substrate; an extensible part, which has a fixed end fixed on the anchor, and a free end floating above the substrate; a proof mass, connected to the free ends of the springs; and multiple in-plane sense electrodes, wherein the extensible part is folded back and forth to form a substantially polygon shape as a whole, in which the fixed end is located within the middle one third length of one side of the substantially polygon shape, and the free end is located within the middle one third length of an opposite side of the substantially polygon shape.

Abstract translation: 本发明公开了一种具有增强的结构强度的MEMS（微机电系统，MEMS）加速器。 MEMS加速器位于基板上，它包括：多个弹簧，其中每个弹簧包括：锚固件，固定在基板上; 可固定端部固定在锚固体上的可伸长部分和浮在基板上方的自由端; 连接弹簧自由端的检测质量; 以及多个面内感测电极，其中，所述可伸展部分来回折叠以形成整体上基本上为多边形的形状，其中所述固定端位于所述大致多边形形状的一侧的中间三分之一长度内，以及 自由端位于基本上多边形形状的相对侧的中间三分之一长度内。