公开(公告)号：US11798786B2

公开(公告)日：2023-10-24

申请号：US17161808

申请日：2021-01-29

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Andrzej Klimczak ,  Konrad Lewandowski ,  Marcin Golan

IPC: H01J37/32 ,  H03F3/21 ,  H03F3/217

CPC classification number: H01J37/32174 ,  H03F3/2176

Abstract: A power converter configured to generate a high-frequency power signal comprises at least one amplifier stage having first and second amplifier paths each having an amplifier, the first amplifier path outputting a first amplifier path output signal and the second amplifier path outputting a second amplifier path output signal that, has a phase shift relative to the first amplifier path output signal greater than 0° and less than 180°. The first and second amplifier paths are connected to a phase-shifting coupler that is configured to couple the first and second amplifier path output signals to form the high-frequency power signal. At least one amplifier of the first and second amplifier paths comprises a SiC MOSFET.

公开(公告)号：US20210159050A1

公开(公告)日：2021-05-27

申请号：US17161808

申请日：2021-01-29

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Andrzej Klimczak ,  Konrad Lewandowski ,  Marcin Golan

IPC: H01J37/32 ,  H03F3/217

Abstract: A power converter configured to generate a high-frequency power signal comprises at least one amplifier stage having first and second amplifier paths each having an amplifier, the first amplifier path outputting a first amplifier path output signal and the second amplifier path outputting a second amplifier path output signal that, has a phase shift relative to the first amplifier path output signal greater than 0° and less than 180°. The first and second amplifier paths are connected to a phase-shifting coupler that is configured to couple the first and second amplifier path output signals to form the high-frequency power signal. At least one amplifier of the first and second amplifier paths comprises a SiC MOSFET.

公开(公告)号：US11674981B2

公开(公告)日：2023-06-13

申请号：US17161768

申请日：2021-01-29

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Andrzej Klimczak ,  Konrad Lewandowski ,  Marcin Golan

IPC: G01R19/00 ,  G01R19/165 ,  G01R27/02 ,  H01J37/34 ,  H01J37/32

CPC classification number: G01R19/0061 ,  G01R19/16566 ,  G01R27/02 ,  H01J37/32082 ,  H01J37/3476 ,  H01J2237/24564 ,  H01J2237/332

Abstract: An arc detector for detecting arcs in an RF plasma system includes at least two inputs configured to connect to an RF source, at least one output configured to connect to a plasma load, and a 3 dB coupler connected to the at least two inputs and the at least one output. The arc detector further includes a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, and a differentiator configured to differentiate the evaluation quantity. The arc detector additionally includes a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.

公开(公告)号：US20210156893A1

公开(公告)日：2021-05-27

申请号：US17161768

申请日：2021-01-29

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Andrzej Klimczak ,  Konrad Lewandowski ,  Marcin Golan

IPC: G01R19/00 ,  G01R19/165 ,  G01R27/02 ,  H01J37/34 ,  H01J37/32

Abstract: An arc detector for detecting arcs in an RF plasma system includes at least two inputs configured to connect to an RF source, at least one output configured to connect to a plasma load, and a 3 dB coupler connected to the at least two inputs and the at least one output. The arc detector further includes a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, and a differentiator configured to differentiate the evaluation quantity. The arc detector additionally includes a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.