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公开(公告)号：US20090027937A1
公开(公告)日：2009-01-29
申请号：US12177818
申请日：2008-07-22
IPC分类号： H02M7/538
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： A high frequency power supply, in particular a plasma supply device, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz with at least one switch bridge, which has two series connected switching elements, wherein one of the switching elements is connected to a reference potential varying in operation, and is activated by a driver, and wherein the driver has a differential input with two signal inputs and is connected to the reference potential varying in operation.
摘要翻译： 一种高频电源，特别是等离子体供应装置，用于在具有两个串联连接的开关元件的至少一个开关桥上产生具有至少3MHz的基本频率的大于1kW的输出功率，其中， 开关元件连接到在操作中变化的参考电位，并且由驱动器激活，并且其中驱动器具有具有两个信号输入的差分输入并连接到在操作中变化的参考电位。
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公开(公告)号：US08222885B2
公开(公告)日：2012-07-17
申请号：US12177818
申请日：2008-07-22
IPC分类号： H02M3/158
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： A high frequency power supply, in particular a plasma supply device, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz with at least one switch bridge, which has two series connected switching elements, wherein one of the switching elements is connected to a reference potential varying in operation, and is activated by a driver, and wherein the driver has a differential input with two signal inputs and is connected to the reference potential varying in operation.
摘要翻译： 一种高频电源，特别是等离子体供应装置，用于在具有两个串联连接的开关元件的至少一个开关桥上产生具有至少3MHz的基本频率的大于1kW的输出功率，其中， 开关元件连接到在操作中变化的参考电位，并且由驱动器激活，并且其中驱动器具有具有两个信号输入的差分输入并连接到在操作中变化的参考电位。
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公开(公告)号：US08129653B2
公开(公告)日：2012-03-06
申请号：US12166963
申请日：2008-07-02
IPC分类号： B23K10/00
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasma supply device includes at least one inverter connected to a DC power supply, which inverter has at least one switching element, and an output network. The output network is arranged on a printed circuit board. The output network can therefore be designed low priced and accurately.
摘要翻译： 等离子体供给装置以大于3MHz的基本上恒定的基本频率产生大于500W的输出功率，并对供给所产生的输出功率的等离子体处理进行供电，并从反射功率返回到等离子体供应装置。 等离子体供给装置包括连接到直流电源的至少一个逆变器，该逆变器具有至少一个开关元件和输出网络。 输出网络布置在印刷电路板上。 因此，输出网络的设计价格低廉且准确。
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公开(公告)号：US20100171428A1
公开(公告)日：2010-07-08
申请号：US12687483
申请日：2010-01-14
IPC分类号： H05B31/00
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： Operation of a plasma supply device having at least one switching bridge with at least two switching elements, and configured to deliver a high frequency output signal having a power of >500 W and a substantially constant fundamental frequency>3 MHz to a plasma load is accomplished by determining at least one operating parameter, at least one environmental parameter of at least one switching element and/or a switching bridge parameter, determining individual drive signals for the switching elements taking into account the at least one operating parameter, the at least one environmental parameter and/or the switching bridge parameter, and individually driving the switching elements with a respective drive signal.
摘要翻译： 具有至少一个具有至少两个开关元件的开关桥的等离子体供给装置的操作被实现，其被配置为将具有大于500W的功率和基本恒定的基频> 3MHz的高频输出信号传送到等离子体负载 通过确定至少一个操作参数，至少一个开关元件和/或开关桥接参数的至少一个环境参数，确定考虑了至少一个操作参数的开关元件的各个驱动信号，所述至少一个环境 参数和/或开关桥接参数，并用相应的驱动信号分别驱动开关元件。
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公开(公告)号：US20090026181A1
公开(公告)日：2009-01-29
申请号：US12178372
申请日：2008-07-23
IPC分类号： B23K9/00
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： A plasma supply device includes a full bridge circuit that is connected to a DC power supply and that has two half bridges each with two series connected switching elements. The plasma supply device further includes a primary winding of a power transformer connected to centers of the half bridges between the switching elements. The primary winding includes a tapping connectable to an alternating current center between the potentials of the DC power supply.
摘要翻译： 等离子体供给装置包括全桥电路，其连接到直流电源并且具有两个半桥，每个具有两个串联的开关元件。 等离子体供给装置还包括连接到开关元件之间的半桥的中心的电力变压器的初级绕组。 初级绕组包括可连接到直流电源的电位之间的交流中心的抽头。
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公开(公告)号：US08482205B2
公开(公告)日：2013-07-09
申请号：US12687483
申请日：2010-01-14
IPC分类号： H01J7/24
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： Operation of a plasma supply device having at least one switching bridge with at least two switching elements, and configured to deliver a high frequency output signal having a power of >500 W and a substantially constant fundamental frequency >3 MHz to a plasma load is accomplished by determining at least one operating parameter, at least one environmental parameter of at least one switching element and/or a switching bridge parameter, determining individual drive signals for the switching elements taking into account the at least one operating parameter, the at least one environmental parameter and/or the switching bridge parameter, and individually driving the switching elements with a respective drive signal.
摘要翻译： 具有至少一个具有至少两个开关元件的开关桥的等离子体供给装置的操作被实现为等离子体负载，将具有> 500W的功率和基本上恒定的基频> 3MHz的高频输出信号传送到等离子体负载 通过确定至少一个操作参数，至少一个开关元件和/或开关桥接参数的至少一个环境参数，确定考虑到所述至少一个操作参数的开关元件的各个驱动信号，所述至少一个环境 参数和/或开关桥接参数，并用相应的驱动信号分别驱动开关元件。
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公开(公告)号：US08357874B2
公开(公告)日：2013-01-22
申请号：US12178372
申请日：2008-07-23
IPC分类号： B23K10/00
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： A plasma supply device includes a full bridge circuit that is connected to a DC power supply and that has two half bridges each with two series connected switching elements. The plasma supply device further includes a primary winding of a power transformer connected to centers of the half bridges between the switching elements. The primary winding includes a tapping connectable to an alternating current center between the potentials of the DC power supply.
摘要翻译： 等离子体供给装置包括全桥电路，其连接到直流电源并且具有两个半桥，每个具有两个串联的开关元件。 等离子体供给装置还包括连接到开关元件之间的半桥的中心的电力变压器的初级绕组。 初级绕组包括可连接到直流电源的电位之间的交流中心的抽头。
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公开(公告)号：US20090026968A1
公开(公告)日：2009-01-29
申请号：US12166963
申请日：2008-07-02
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasma supply device includes at least one inverter connected to a DC power supply, which inverter has at least one switching element, and an output network. The output network is arranged on a printed circuit board. The output network can therefore be designed low priced and accurately.
摘要翻译： 等离子体供给装置以大于3MHz的基本上恒定的基本频率产生大于500W的输出功率，并对供给所产生的输出功率的等离子体处理进行供电，并从反射功率返回到等离子体供应装置。 等离子体供给装置包括连接到直流电源的至少一个逆变器，该逆变器具有至少一个开关元件和输出网络。 输出网络布置在印刷电路板上。 因此，输出网络的设计价格低廉且准确。
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公开(公告)号：US08154897B2
公开(公告)日：2012-04-10
申请号：US12178414
申请日：2008-07-23
申请人： Michael Glueck , Alex Miller , Erich Pivit
发明人： Michael Glueck , Alex Miller , Erich Pivit
IPC分类号： H02M7/537
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： An RF power supply, in particular a plasma supply device, for generating an output power greater than 500 W at an output frequency of at least 3 MHz includes at least one inverter connectable to a DC power supply, which inverter comprises at least one switching element and an output network. An accompanying line connects an electrical component to the inverter by a lead-in of the output network.
摘要翻译： 用于在至少3MHz的输出频率下产生大于500W的输出功率的RF电源，特别是等离子体供给装置包括至少一个可连接到DC电源的逆变器，该逆变器包括至少一个开关元件 和输出网络。 伴随线路通过输出网络的引入将电气部件连接到逆变器。
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公开(公告)号：US20090027936A1
公开(公告)日：2009-01-29
申请号：US12178414
申请日：2008-07-23
申请人： Michael Glueck , Alex Miller , Erich Pivit
发明人： Michael Glueck , Alex Miller , Erich Pivit
IPC分类号： H02M7/5387
CPC分类号： G01R21/06 , G01R23/02 , H01J37/32045 , H02M7/003 , H02M7/5383 , H03H7/40 , H05B41/2806 , H05H1/46 , Y02B20/22
摘要： An RF power supply, in particular a plasma supply device, for generating an output power greater than 500 W at an output frequency of at least 3 MHz includes at least one inverter connectable to a DC power supply, which inverter comprises at least one switching element and an output network. An accompanying line connects an electrical component to the inverter by a lead-in of the output network.
摘要翻译： 用于在至少3MHz的输出频率下产生大于500W的输出功率的RF电源，特别是等离子体供给装置包括至少一个可连接到DC电源的逆变器，该逆变器包括至少一个开关元件 和输出网络。 伴随线路通过输出网络的引入将电气部件连接到逆变器。
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