公开(公告)号：US12244972B2

公开(公告)日：2025-03-04

申请号：US17776800

申请日：2020-11-04

Applicant: Tokyo Electron Limited

Inventor： Yuichiro Kunugimoto ,  Keishi Hamada ,  Takafumi Hayama ,  Motoi Okada ,  Shoki Hamaguchi

IPC: H04N7/18 ,  B05C11/00 ,  B05C11/10 ,  G03F7/16 ,  G06T7/00 ,  H04N5/91 ,  H04N23/69 ,  H04N23/80

Abstract: A monitoring apparatus for a substrate processing apparatus includes: an imaging unit that captures an image of a nozzle of the substrate processing apparatus and a surface of a substrate held by a substrate holder of the substrate processing apparatus; a monitoring data generation unit that generates monitoring video data based on imaging video data captured by the imaging unit during an execution of a substrate process performed by the substrate processing apparatus including a first process and a second process; and a monitoring condition changing unit that changes a generation condition of the monitoring video data during the execution of the substrate process so that at least a resolution or a number of frames of the monitoring video data during an execution of the second process is different from the monitoring video data during an execution of the first process.

公开(公告)号：US10248030B2

公开(公告)日：2019-04-02

申请号：US15897477

申请日：2018-02-15

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toyohisa Tsuruda ,  Yuichiro Kunugimoto ,  Takafumi Hayama ,  Keishi Hamada

IPC: G03F7/20 ,  G03F7/30 ,  H01L21/67 ,  G06F17/30

Abstract: A method for evaluating a process recipe used in a liquid processing apparatus that performs a liquid processing by supplying a processing liquid from a nozzle to a substrate while rotating a holding part horizontally holding the substrate about a vertical axis, includes: storing the process recipe in a first storage part, which includes time-series data of a first combination of parameter values including a position of the nozzle and a rotation speed of the substrate; reading the process recipe from the first storage part; reading a pre-prepared risk data from a second storage part, which is determined by associating a second combination of parameter values with a risk information corresponding to a liquid splash risk; and displaying an assisting data for the first combination of parameter values in the process recipe, based on the process recipe and the pre-prepared risk data read from the first and second storage parts.