公开(公告)号：US20180112331A1

公开(公告)日：2018-04-26

申请号：US15788972

申请日：2017-10-20

Applicant: U.S. Army Research Laboratory ATTN: RDRL-LOC-I

Inventor： Melanie Will Cole ,  Mathew P. Ivill ,  Daniel Shreiber

IPC: C30B30/02 ,  B05D1/00 ,  B05D3/06 ,  C30B29/32 ,  C01G23/00

CPC classification number: C30B30/02 ,  B05D1/005 ,  B05D3/06 ,  C01G23/006 ,  C23C18/1212 ,  C23C18/1291 ,  C23C18/1295 ,  C30B7/00 ,  C30B29/32 ,  H01L29/786

Abstract: Integrated non-linear complex oxide (NLCO) thin film artificial structures include tailored microstructural and crystalline phases for designed material architectures and a method of fabrication. A nano-scale poly crystal-amorphous composite film includes an amorphous matrix surrounding crystalline domains/inclusions of the form of particles, platelets, rods and/or needles, etc. Artificial thin film layered material configurations include bilayers, repeat “unit cell” bilayers with variable stacking periodicity (N), and multilayers whereby each individual layer, ni, exhibits a different microstructural crystallinity phase state, hence the microstructural phase state is variable in the vertical direction perpendicular to the substrate. NLCO elements can be organized in array configurations. The method to create the integrated NLCO thin film artificial structures combines metal-organic solution deposition (MOSD) film fabrication and microwave irradiation (MWI) processing, is tailorable and creates artificial thin film material structures composed of differing microstructural crystalline phase states simultaneously within a single thermal treatment step.