公开(公告)号：US11935936B2

公开(公告)日：2024-03-19

申请号：US17055852

申请日：2019-03-28

Applicant: ULVAC, INC.

Inventor： Yuusuke Ujihara ,  Motoshi Kobayashi ,  Yasuhiko Akamatsu ,  Tomohiro Nagata ,  Ryouta Nakamura ,  Junichi Nitta ,  Yasuo Nakadai

IPC: H01L29/49 ,  C22C21/00 ,  C22F1/04 ,  C23C14/14 ,  H01L21/285 ,  C23C14/34

CPC classification number: H01L29/49 ,  C22C21/00 ,  C22F1/04 ,  C23C14/14 ,  H01L21/285 ,  C23C14/34

Abstract: [Object] It is an object of the present invention to provide an aluminum alloy film having excellent bending resistance and heat resistance, and a thin film transistor including the aluminum alloy film.
[Solving Means] In order to achieve the above-mentioned object, an aluminum alloy film according to an embodiment of the present invention includes: an Al pure metal that includes at least one type of a first additive element selected from the group consisting of Zr, Sc, Mo, Y, Nb, and Ti. A content of the first additive element is 0.01 atomic % or more and 1.0 atomic % or less. Such an aluminum alloy film has excellent bending resistance and excellent heat resistance. Further, also etching can be performed on the aluminum alloy film.

公开(公告)号：US20240301545A1

公开(公告)日：2024-09-12

申请号：US18429838

申请日：2024-02-01

Applicant: ULVAC, INC.

Inventor： Takahito Kimoto ,  Masashi Yasuda ,  Toshiharu Kurauchi ,  Shunsuke Sasaki ,  Yuusuke Ujihara

IPC: C23C14/26

CPC classification number: C23C14/26

Abstract: A vacuum evaporation method includes a vaporization step in which use is made of an evaporation boat including: a boat main body having a containing part of an evaporation material as an evaporation source; and electrode mounting plate parts respectively extending outward at both ends of the boat main body. A wire-shaped evaporation material is fed from above a bottom plate of the boat main body defining the containing part of the evaporation material, in a manner to come into contact with the bottom plate. Electric current is applied across both the electrode mounting plate parts in order to heat the boat main body, thereby evaporating the evaporation material inside the containing part. The vacuum evaporation method further includes a displacement step of continuously or intermittently displacing, while the wire-shaped evaporation material is being fed, a front end part of the wire-shaped evaporation material relative to the boat main body.