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公开(公告)号:US10475738B2
公开(公告)日:2019-11-12
申请号:US15391822
申请日:2016-12-27
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kung-Hong Lee , Mu-Kai Tsai , Chung-Hsing Lin
IPC: H01L23/522 , H01L49/02 , H01L27/088 , H01L27/092 , H01L21/8234 , H01L21/8238 , H01L29/78
Abstract: A semiconductor device preferably includes: a first metal-oxide semiconductor (MOS) transistor on a substrate; a first ferroelectric (FE) layer connected to the first MOS transistor; a second MOS transistor on the substrate; and a second FE layer connected to the second MOS transistor. Preferably, the first FE layer and the second FE layer include different capacitance.
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公开(公告)号:US20180182860A1
公开(公告)日:2018-06-28
申请号:US15391822
申请日:2016-12-27
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kung-Hong Lee , Mu-Kai Tsai , Chung-Hsing Lin
IPC: H01L29/51 , H01L49/02 , H01L27/088 , H01L27/092 , H01L23/522 , H01L23/532
Abstract: A semiconductor device preferably includes: a first metal-oxide semiconductor (MOS) transistor on a substrate; a first ferroelectric (FE) layer connected to the first MOS transistor; a second MOS transistor on the substrate; and a second FE layer connected to the second MOS transistor. Preferably, the first FE layer and the second FE layer include different capacitance.
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