Poly-insulator-poly capacitor and fabrication method thereof

    公开(公告)号:US11444151B2

    公开(公告)日:2022-09-13

    申请号:US17142268

    申请日:2021-01-06

    Inventor: Linggang Fang

    Abstract: A poly-insulator-poly (PIP) capacitor including a substrate having a capacitor forming region; a first capacitor dielectric layer on the capacitor forming region; a first poly electrode on the first capacitor dielectric layer; a second capacitor dielectric layer on the first poly electrode; and a second poly electrode on the second capacitor dielectric layer. A third poly electrode is disposed adjacent to a first sidewall of the second poly electrode. A third capacitor dielectric layer is disposed between the third poly electrode and the second poly electrode. A fourth poly electrode is disposed adjacent to a second sidewall of the second poly electrode opposite to the first sidewall. A fourth capacitor dielectric layer is disposed between the fourth poly electrode and the second poly electrode.

    Device comprising capacitor and forming method thereof

    公开(公告)号:US10263000B2

    公开(公告)日:2019-04-16

    申请号:US15697459

    申请日:2017-09-07

    Inventor: Linggang Fang

    Abstract: A device including a capacitor includes an isolation structure, a first control gate, a first selective gate and a first dielectric layer. The isolation structure is disposed in a substrate. The first control gate and the first selective gate are disposed directly above the isolation structure. The first dielectric layer is vertically sandwiched by the first control gate and the first selective gate, thereby constituting the capacitor. The present invention also provides a method of forming the device including the capacitor.

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