公开(公告)号：US08084947B2

公开(公告)日：2011-12-27

申请号：US12586597

申请日：2009-09-24

申请人： William McClure Hooke ,  Allen Richard Martin ,  Mark Alan Ray ,  Gary Elder McGuire ,  Brian Douglas Schultz

发明人： William McClure Hooke ,  Allen Richard Martin ,  Mark Alan Ray ,  Gary Elder McGuire ,  Brian Douglas Schultz

IPC分类号： H05B31/26

CPC分类号： H01J37/32348 ,  A61L2/0011 ,  A61L2/14 ,  A61L9/22 ,  H01J37/32009 ,  H05H1/46 ,  H05H2001/4682

摘要： A method of generating a glow discharge plasma involves providing a pair of electrodes spaced apart by an electrode gap, and having a dielectric disposed in the electrode gap between the electrodes; placing the electrodes within an environment, wherein the electrode gap can be provided with a gas or gas mixture containing carbon at a specified pressure; and applying a rapid rise time voltage pulse across the electrodes to cause an extreme overvoltage condition, wherein the rapid rise time is less than a plasma generation time so that the extreme overvoltage condition occurs prior to current flow across the electrode gap. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.

摘要翻译： 产生辉光放电等离子体的方法包括提供一对由电极间隔开的电极，并且在电极之间的电极间隙中设置电介质; 将电极放置在环境中，其中电极间隙可以设置有在特定压力下含有碳的气体或气体混合物; 以及跨越电极施加快速上升时间电压脉冲以引起极端的过电压状态，其中快速上升时间小于等离子体产生时间，使得极限过电压状态发生在电流跨越电极间隙的电流之前。 该摘要不被认为是限制性的，因为其他实施例可能偏离本摘要中描述的特征。

公开(公告)号：US07615931B2

公开(公告)日：2009-11-10

申请号：US11120153

申请日：2005-05-02

申请人： William McClure Hooke ,  Allen Richard Martin ,  Mark Alan Ray ,  Gary Elder McGuire

发明人： William McClure Hooke ,  Allen Richard Martin ,  Mark Alan Ray ,  Gary Elder McGuire

IPC分类号： H05B31/26

CPC分类号： H01J37/32348 ,  A61L2/0011 ,  A61L2/14 ,  A61L9/22 ,  H01J37/32009 ,  H05H1/46 ,  H05H2001/4682

摘要： A dielectric barrier plasma discharge device consistent with certain embodiments of the present invention has a pair of electrodes spaced apart by an electrode gap. A dielectric is disposed between the electrodes. The electrode gap is provided with a gas at a specified pressure. A rapid rise time voltage pulse generator produces a voltage pulse across the electrodes to cause an extreme overvoltage condition, wherein the rapid rise time is less than a plasma generation time so that the extreme overvoltage condition occurs prior to current flow across the electrode gap. Due to the high voltages and high current densities, the product yields an extremely high instantaneous power density. This extreme overvoltage condition is also believed to lead to production of shock waves and runaway free electrons. The resulting plasma can be utilized to carry out many potential tasks including, but not limited to etching, deposition, and sterilization. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.

摘要翻译： 与本发明的某些实施例一致的电介质阻挡等离子体放电装置具有由电极间隙隔开的一对电极。 在电极之间设置电介质。 电极间隙设有规定压力的气体。 快速上升时间电压脉冲发生器在电极之间产生电压脉冲以产生极端的过电压状态，其中快速上升时间小于等离子体产生时间，使得极限过电压状态发生在跨过电极间隙的电流流动之前。 由于高电压和高电流密度，产品产生极高的瞬时功率密度。 这种极端的过电压条件也被认为会导致产生冲击波和失控的自由电子。 所得到的等离子体可用于执行许多潜在任务，包括但不限于蚀刻，沉积和灭菌。 该摘要不被认为是限制性的，因为其他实施例可能偏离本摘要中描述的特征。

公开(公告)号：US08344627B1

公开(公告)日：2013-01-01

申请号：US13329565

申请日：2011-12-19

申请人： William McClure Hooke ,  Allen Richard Martin ,  Gary Elder McGuire ,  Mark Alan Ray

发明人： William McClure Hooke ,  Allen Richard Martin ,  Gary Elder McGuire ,  Mark Alan Ray

IPC分类号： H05B31/26

CPC分类号： H01J37/32348 ,  A61L2/0011 ,  A61L2/14 ,  A61L9/22 ,  H01J37/32009 ,  H05H1/46 ,  H05H2001/4682

摘要： A method of generating a glow discharge plasma involves providing a pair of electrodes spaced apart by an electrode gap, and having a dielectric disposed in the electrode gap between the electrodes; placing the electrodes within an environment, wherein the electrode gap can be provided with a gas or gas mixture containing carbon at a specified pressure; and applying a rapid rise time voltage pulse across the electrodes to cause an extreme overvoltage condition, wherein the rapid rise time is less than a plasma generation time so that the extreme overvoltage condition occurs prior to current flow across the electrode gap. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.

摘要翻译： 产生辉光放电等离子体的方法包括提供一对由电极间隔开的电极，并且在电极之间的电极间隙中设置电介质; 将电极放置在环境中，其中电极间隙可以设置有在特定压力下含有碳的气体或气体混合物; 以及跨越电极施加快速上升时间电压脉冲以引起极端的过电压状态，其中快速上升时间小于等离子体产生时间，使得极限过电压状态发生在电流跨越电极间隙的电流之前。 该摘要不被认为是限制性的，因为其他实施例可能偏离本摘要中描述的特征。

公开(公告)号：US20100079073A1

公开(公告)日：2010-04-01

申请号：US12586597

申请日：2009-09-24

申请人： William McClure Hooke ,  Allen Richard Martin ,  Mark Alan Ray ,  Gary Elder McGuire ,  Brian Douglas Schultz

发明人： William McClure Hooke ,  Allen Richard Martin ,  Mark Alan Ray ,  Gary Elder McGuire ,  Brian Douglas Schultz

IPC分类号： H05H1/24

CPC分类号： H01J37/32348 ,  A61L2/0011 ,  A61L2/14 ,  A61L9/22 ,  H01J37/32009 ,  H05H1/46 ,  H05H2001/4682

摘要： A method of generating a glow discharge plasma involves providing a pair of electrodes spaced apart by an electrode gap, and having a dielectric disposed in the electrode gap between the electrodes; placing the electrodes within an environment, wherein the electrode gap can be provided with a gas or gas mixture containing carbon at a specified pressure; and applying a rapid rise time voltage pulse across the electrodes to cause an extreme overvoltage condition, wherein the rapid rise time is less than a plasma generation time so that the extreme overvoltage condition occurs prior to current flow across the electrode gap. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.

摘要翻译： 产生辉光放电等离子体的方法包括提供一对由电极间隔开的电极，并且在电极之间的电极间隙中设置电介质; 将电极放置在环境中，其中电极间隙可以设置有在特定压力下含有碳的气体或气体混合物; 以及跨越电极施加快速上升时间电压脉冲以引起极端的过电压状态，其中快速上升时间小于等离子体产生时间，使得极限过电压状态发生在电流跨越电极间隙的电流之前。 该摘要不被认为是限制性的，因为其他实施例可能偏离本摘要中描述的特征。

公开(公告)号：US07615933B2

公开(公告)日：2009-11-10

申请号：US11980034

申请日：2007-10-30

申请人： William McClure Hooke ,  Allen Richard Martin ,  Mark Alan Ray

发明人： William McClure Hooke ,  Allen Richard Martin ,  Mark Alan Ray

IPC分类号： H05B37/02

CPC分类号： H01J37/32348 ,  A61L2/0011 ,  A61L2/14 ,  A61L9/22 ,  H01J37/32009 ,  H05H1/46 ,  H05H2001/4682

摘要： A method of generating a fast-rise time voltage step to produce an overvoltage condition for a dielectric barrier plasma discharge involves providing a pair of electrodes spaced apart by an electrode gap and at least one dielectric disposed in the gap; generating fast-rise time voltage step such that the rise time to achieve said overvoltage condition is equal to or less than the time required to generate the plasma thereby establishing the overvoltage condition prior to current flow across said electrode gap. Power from storage capacitor banks discharge into the electrode gap through a switch. The switch is capable of standing-off voltage sufficient to create the overvoltage condition when the switch is open. The discharge current pulse across the said electrode gap is terminated by charging properties of the said dielectric(s) in the said electrode gap. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.

摘要翻译： 产生快速上升时间电压阶跃以产生电介质阻挡等离子体放电的过电压条件的方法包括提供由电极间隙隔开的一对电极和设置在间隙中的至少一个电介质; 产生快速上升时间电压阶跃，使得实现所述过电压状态的上升时间等于或小于产生等离子体所需的时间，从而在电流流经所述电极间隙之前建立过电压状态。 存储电容器组的功率通过开关放电到电极间隙。 该开关能够在开关断开时足以产生过电压状态的隔离电压。 通过在所述电极间隙中的所述电介质的充电特性来终止跨所述电极间隙的放电电流脉冲。 该摘要不被认为是限制性的，因为其他实施例可能偏离本摘要中描述的特征。