Method of measuring phase difference and apparatus for carrying out the
same
    92.
    发明授权
    Method of measuring phase difference and apparatus for carrying out the same 失效
    测量相位差的方法和执行相位差的装置

    公开(公告)号:US5604591A

    公开(公告)日:1997-02-18

    申请号:US420837

    申请日:1995-04-11

    申请人: Junichi Kitagawa

    发明人: Junichi Kitagawa

    IPC分类号: G01J9/02 G01B9/02

    CPC分类号: G01J9/02

    摘要: A phase difference introduced by a half-tone mask including transparent portions and phase shift portions is measured by projecting two light fluxes onto these portions and forming an interference image by combining the two light fluxes. A light flux emitted by a light source is converted by a rotatable polarizer into a linearly polarized light flux having a polarizing direction which can be adjusted at will by rotating the polarizer, and then the linearly polarized light flux is transmitted through a birefringent prism to obtain two light fluxes polarized in different directions. Intensities of these light fluxes can be adjusted in opposite senses by rotating the polarized such that intensities of light fluxes emanating from the photomask become substantially identical with each other. One of the two light fluxes is made incident upon the transparent portion and the other light flux is made incident upon the phase shift portion. The two light fluxes transmitted through the photomask are combined by a birefringent prism and a phase compensating plate to obtain an interference image. By detecting an intensity of the interference image, the phase difference introduced by the photomask can be measured.

    摘要翻译: 由包括透明部分和相移部分的半色调掩模引入的相位差通过将两个光束投射到这些部分上并通过组合两个光束而形成干涉图像来测量。 由光源发射的光束通过可旋转的偏振器转换成具有偏振方向的线偏振光束,该偏振方向可以通过旋转偏振器而随意调节,然后线偏振光束透射通过双折射棱镜,以获得 两个光束在不同方向上极化。 这些光通量的强度可以通过旋转极化而以相反的方式进行调节,使得从光掩模发出的光通量的强度彼此基本相同。 两个光束中的一个入射到透明部分上,另一个光束入射到相移部分上。 通过光掩模传输的两个光束通过双折射棱镜和相位补偿板组合以获得干涉图像。 通过检测干涉图像的强度,可以测量由光掩模引入的相位差。