摘要:
An improved optical endpoint detector is disclosed in which two photocells are used in conjunction with analog multipliers and variable voltage sources, all under microprocessor control. The combination enables one to measure the ratio of intensity of different emission lines, as well as their individual outputs and alternative process monitoring signals.
摘要:
An integrating photometer for measuring total exposures to ultraviolet radiation. The circuit for the photometer includes a threshold limiter to suppress operation of the integrator until the illumination level exceeds a predetermined threshold. A power saving circuit turns the photometer off when no illumination is received during a predetermined time interval.
摘要:
A light measuring device includes one or more photodiodes, which generate current in relation to the received light, and at least one capacitor for integrating the generated current. The amount of charge stored in the at least one capacitor at the completion of the integration is roughly detected by the number of capacitors used and/or the voltage across the capacitor. A current source capable of producing different levels of current in accordance with the detected amount of charge is provided for changing the amount of charge stored in the at least one capacitor. The time needed to change the amount of charge stored in the at least one capacitor is measured so as to obtain the value of total amount of the change in the charge stored in the at least one capacitor and to thus obtain the value of the received amount of light intensity.