摘要:
An electrical interface (20) for a Coriolis sensor (10, 11, 13) having an independent, non-zero bias voltage Vb and a plurality of transresistance amplifiers that are referenced to ground. The electrical interface (20) may be used for both a cloverleaf microgyroscope (10, 11) and a hemispherical resonator gyroscope (13). The electrical interface (20) of the present invention reduces the complexity of the control electronics (50) required to control the Coriolis sensor (10, 11, 13) and allows a combination of analog and digital electronics thereby reducing the cost of the Coriolis sensor (10, 11, 13) and its associated control electronics (50).
摘要:
A microgyroscope has a baseplate made of the same material as the rest of the microgyroscope. The baseplate is a silicon baseplate having a heavily p-doped epilayer covered by a thick dielectric film and metal electrodes. The metal electrodes are isolated from the ground plane by the dielectric. This provides very low parasitic capacitive coupling between the electrodes. The thick dielectric reduces the capacitance between the electrodes and the ground plane.
摘要:
An improved interferometer is produced by modifying a conventional interferometer to include amplitude and/or frequency modulation of a coherent light source at radio or higher frequencies. The phase of the modulation signal can be detected in an interfering beam from an interferometer and can be used to determine the actual optical phase of the beam. As such, this improvement can be adapted to virtually any two-beam interferometer, including, for example, Michelson, Mach-Zehnder, and Sagnac interferometers. The use of an amplitude modulated coherent light source results in an interferometer that combines the wide range advantages of coherent interferometry with the precise distance measurement advantages of white light interferometry.
摘要:
A cascaded electrostatic actuator can be formed from a substantially planar substrate. The cascaded electrostatic actuator can be formed in a plane of the substrate. Various embodiments are described.
摘要:
A cascaded electrostatic actuator can be formed from a substantially planar substrate. The cascaded electrostatic actuator can be formed in a plane of the substrate. Various embodiments are described.
摘要:
A device may comprise an upper module cover, a lower module cover, an outer frame, and an actuator having a movable frame. The movable frame may be at least partially disposed intermediate the upper module cover and the lower module cover. A hinge flexure may interconnect the outer frame and the movable frame such that the movable frame is rotatable with respect to the outer frame. The upper module cover and/or the lower module cover may be adapted to limit a movement of the movable frame.
摘要:
An impulse actuated mechanism for, e.g., a digital camera shutter, includes a shutter blade disposed at a first end of a flexure having an opposite second end fixed so as to constrain the blade to move along a planar, relatively long, first trajectory between opposite initial and final blade positions, and a short-throw, high force blade actuator that includes a stator and a stage supported for movement relative to the stator and along a second trajectory intersecting the initial blade position, and a mechanism for accelerating the stage along the second trajectory and against the blade such that at least some of the momentum of the stage is imparted to the blade, causing the blade to move along the first trajectory from the initial blade position to the final blade position, where it blocks the passage of light through a light aperture of the camera.
摘要:
A positioning system for a miniature electronic device. The positioning system has a first portion including a damper and a second portion connected to the first portion. The second portion positions a payload of the miniature electronic device. The miniature electronic device may be a miniature camera, or other device.
摘要:
A method and system for enhancing the resolution of a camera are disclosed. For example, a single lens can be placed at a predetermined position and the position of a lens assembly can be adjusted so as to enhance the resolution of the camera. The single lens can then be moved so as to effect focusing of the camera while the position of the lens assembly tends to maintain enhanced resolution thereof.
摘要:
A micro-machined MEMS resonator gyroscope and accelerometer is fabricated from an epilayer semiconductor wafer to incorporate a substantially planar, H-shaped resonator mass suspended from a support plate by two opposed elongated springs that couple to the relatively short crossbar member of the H. The masses are harmonically oscillated relative to the support plate and a baseplate portion, and two orthogonal modes of the structure corresponding to the two nearly degenerate fundamental torsional modes thereof are used for sensing angular rate about one axis, and linear acceleration along two axes, of the sensor. The H-shaped mass advantageously incorporates a relatively high length-to-width aspect ratio, and in one embodiment, the springs may advantageously incorporate either a square cross-section, such that the structure can be tuned to substantially match the fundamental frequencies of the two resonance modes of the structure by removing, e.g., by an etching process, a small amount of material from the upper surfaces of the springs.