-
公开(公告)号:US20060046167A1
公开(公告)日:2006-03-02
申请号:US10933090
申请日:2004-09-01
Applicant: Bo Wu , Abdurrahman Sezginer , Franz Zach
Inventor: Bo Wu , Abdurrahman Sezginer , Franz Zach
IPC: G03C5/00
CPC classification number: G03F7/70941 , G03F1/44 , G03F7/70591
Abstract: Flare of an imaging system is measured using resist by employing the imaging system to directly expose a first part of the resist at an image plane of the imaging system to a first dose of radiation and to indirectly expose a second part of the resist as a result of flare. The imaging system exposes the second part of the resist to a second dose of radiation. Flare of the imaging system is determined from a pattern that is formed in the second part of the resist.
Abstract translation: 使用抗蚀剂通过使用成像系统将成像系统的图像平面处的抗蚀剂的第一部分直接暴露于第一剂量的辐射并且间接暴露抗蚀剂的第二部分来测量成像系统的耀斑,结果 的耀斑。 成像系统将抗蚀剂的第二部分暴露于第二剂量的辐射。 从形成在抗蚀剂的第二部分的图案确定成像系统的光斑。
-
公开(公告)号:US20060021546A1
公开(公告)日:2006-02-02
申请号:US10898724
申请日:2004-07-23
Applicant: Bo Wu , Jeffrey Banning , Randall Bridgeman , Donald Titterington
Inventor: Bo Wu , Jeffrey Banning , Randall Bridgeman , Donald Titterington
IPC: C09D11/00
CPC classification number: C09D11/34
Abstract: Processes for preparing phase change inks comprising admixing (a) a phase change ink carrier; (b) a colorant of the formula or mixtures thereof, wherein M1, z, A1, R1, R2, R3, R4, R5, R6, R7, a, b, c, d, Y, Q, Q−, A1, and CA are as defined herein; and (c) a metal salt of the formula (M2v+)w(A2w−)v of which the metal portion M2 is either a metal ion having positive charge +v, a metal-containing moiety, or a mixture thereof, and A2 is an anion having negative charge −w, wherein M1 and M2 can be the same as or different from each other, wherein A1 and A2 can be the same as or different from each other, said admixing occurring at a temperature at which the ink carrier is a liquid.
Abstract translation: 制备相变油墨的方法,包括混合(a)相变油墨载体; (b)下式的着色剂或其混合物,其中M 1,z,A 1,R 1,R 2 R 3,R 4,R 5,R 6,R 7, a,b,c,d,Y,Q,Q 1,A 1和CA如本文所定义; 和(c)式(M 2)的金属盐(M 2 H 2 O) 其中金属部分M 2 2是具有正电荷的金属离子+ v,含金属的部分或其混合物 ,并且A 2是具有负电荷-w的阴离子,其中M 1和M 2 2可以彼此相同或不同 其中A 1和A 2可以彼此相同或不同,所述混合在墨载体为液体的温度下发生。
-
公开(公告)号:US20060004123A1
公开(公告)日:2006-01-05
申请号:US10881047
申请日:2004-06-30
Applicant: Bo Wu , Donald Titterington , Mary Ryan-Hotchkiss
Inventor: Bo Wu , Donald Titterington , Mary Ryan-Hotchkiss
CPC classification number: C09D11/34
Abstract: Disclosed is a phase change ink composition comprising (1) an ink carrier comprising (A) a first component which comprises an ester-amide material, and (B) a second component which comprises either (i) a material selected from the group consisting of urethane compounds, urea compounds, urethane-urea compounds, and mixtures thereof, (ii) a polyalkylene wax, or (iii) a mixture thereof; and (2) a colorant.
Abstract translation: 公开了一种相变油墨组合物,其包含(1)油墨载体,其包含(A)包含酯 - 酰胺物质的第一组分和(B)第二组分,其包含(i)选自以下的材料: 氨基甲酸酯化合物,脲化合物,氨基甲酸酯 - 脲化合物及其混合物,(ii)聚亚烷基蜡,或(iii)它们的混合物; 和(2)着色剂。
-
公开(公告)号:US20050270523A1
公开(公告)日:2005-12-08
申请号:US10860853
申请日:2004-06-04
Applicant: Bo Wu , Abdurrahman Sezginer
Inventor: Bo Wu , Abdurrahman Sezginer
CPC classification number: G03F7/70941 , G03F1/44 , G03F7/70591
Abstract: A method of measuring flare in an optical lithographic system utilizes an exposure mask with first and second discrete opaque features each having rotational symmetry of order greater than four and of different respective areas. The exposure mask is positioned in the lithographic system such that actinic radiation emitted by the lithographic system illuminates the sensitive surface of an exposure target through the exposure mask. The extent to which regions of the sensitive surface that are within the geometric image of a feature of the exposure mask are exposed to actinic radiation during due to flare is measured.
Abstract translation: 一种在光学平版印刷系统中测量光斑的方法利用具有第一和第二离散不透明特征的曝光掩模,每个不透明特征具有大于四的旋转对称性以及不同的相应区域。 曝光掩模位于光刻系统中,使得由光刻系统发射的光化辐射通过曝光掩模照射曝光目标的敏感表面。 测量在曝光掩模的特征的几何图像内的敏感表面的区域在由于耀斑期间暴露于光化辐射的程度。
-
公开(公告)号:US06835238B1
公开(公告)日:2004-12-28
申请号:US10606631
申请日:2003-06-26
Applicant: Bo Wu , Jeffery H. Banning , James M. Duff , Wolfgang G. Wedler , Jule W. Thomas, Jr. , Randall R. Bridgeman
Inventor: Bo Wu , Jeffery H. Banning , James M. Duff , Wolfgang G. Wedler , Jule W. Thomas, Jr. , Randall R. Bridgeman
IPC: C09D1102
CPC classification number: C09D11/34
Abstract: A phase change ink composition comprising a phase change ink carrier and a colorant compound of the formula wherein M is either (1) a metal ion having a positive charge of +y wherein y is an integer which is at least 2, said metal ion being capable of forming a compound with at least two chromogen moieties, or (2) a metal-containing moiety capable of forming a compound with at least two chromogen moieties, z is an integer representing the number of chromogen moieties associated with the metal and is at least 2, and R1, R2, R3, R4, R5, R6, R7, a, b, c, d, Y, Q−, A, and CA are as defined herein.
Abstract translation: 一种相变油墨组合物,其包含相变油墨载体和M形式的着色剂化合物是(1)具有正电荷+ y的金属离子,其中y是至少为2的整数,所述金属离子能够 形成具有至少两个色素部分的化合物,或(2)能够与至少两个色素部分形成化合物的含金属部分,z是表示与金属相关的至少2个的色原部分的数目的整数,并且至少为 R 1,R 2,R 3,R 4,R 5,R 6,R 7,a,b,c,d,Y,Q - ,A和CA如本文所定义。
-
-
-
-