Method of characterizing flare
    1.
    发明授权
    Method of characterizing flare 有权
    表征火炬的方法

    公开(公告)号:US07277165B2

    公开(公告)日:2007-10-02

    申请号:US10860853

    申请日:2004-06-04

    IPC分类号: G01N21/00

    摘要: A method of measuring flare in an optical lithographic system utilizes an exposure mask with first and second discrete opaque features each having rotational symmetry of order greater than four and of different respective areas. The exposure mask is positioned in the lithographic system such that actinic radiation emitted by the lithographic system illuminates the sensitive surface of an exposure target through the exposure mask. The extent to which regions of the sensitive surface that are within the geometric image of a feature of the exposure mask are exposed to actinic radiation during due to flare is measured.

    摘要翻译: 一种在光学平版印刷系统中测量光斑的方法利用具有第一和第二离散不透明特征的曝光掩模,每个不透明特征具有大于四的旋转对称性以及不同的相应区域。 曝光掩模位于光刻系统中,使得由光刻系统发射的光化辐射通过曝光掩模照射曝光目标的敏感表面。 测量在曝光掩模的特征的几何图像内的敏感表面的区域在由于耀斑期间暴露于光化辐射的程度。

    Characterizing flare of a projection lens
    2.
    发明申请
    Characterizing flare of a projection lens 有权
    表征投影镜头的耀斑

    公开(公告)号:US20060046167A1

    公开(公告)日:2006-03-02

    申请号:US10933090

    申请日:2004-09-01

    IPC分类号: G03C5/00

    摘要: Flare of an imaging system is measured using resist by employing the imaging system to directly expose a first part of the resist at an image plane of the imaging system to a first dose of radiation and to indirectly expose a second part of the resist as a result of flare. The imaging system exposes the second part of the resist to a second dose of radiation. Flare of the imaging system is determined from a pattern that is formed in the second part of the resist.

    摘要翻译: 使用抗蚀剂通过使用成像系统将成像系统的图像平面处的抗蚀剂的第一部分直接暴露于第一剂量的辐射并且间接暴露抗蚀剂的第二部分来测量成像系统的耀斑,结果 的耀斑。 成像系统将抗蚀剂的第二部分暴露于第二剂量的辐射。 从形成在抗蚀剂的第二部分的图案确定成像系统的光斑。

    Method of characterizing flare
    3.
    发明申请
    Method of characterizing flare 有权
    表征火炬的方法

    公开(公告)号:US20050270523A1

    公开(公告)日:2005-12-08

    申请号:US10860853

    申请日:2004-06-04

    IPC分类号: G01N21/88 G03F1/14 G03F7/20

    摘要: A method of measuring flare in an optical lithographic system utilizes an exposure mask with first and second discrete opaque features each having rotational symmetry of order greater than four and of different respective areas. The exposure mask is positioned in the lithographic system such that actinic radiation emitted by the lithographic system illuminates the sensitive surface of an exposure target through the exposure mask. The extent to which regions of the sensitive surface that are within the geometric image of a feature of the exposure mask are exposed to actinic radiation during due to flare is measured.

    摘要翻译: 一种在光学平版印刷系统中测量光斑的方法利用具有第一和第二离散不透明特征的曝光掩模,每个不透明特征具有大于四的旋转对称性以及不同的相应区域。 曝光掩模位于光刻系统中,使得由光刻系统发射的光化辐射通过曝光掩模照射曝光目标的敏感表面。 测量在曝光掩模的特征的几何图像内的敏感表面的区域在由于耀斑期间暴露于光化辐射的程度。

    Characterizing flare of a projection lens
    4.
    发明授权
    Characterizing flare of a projection lens 有权
    表征投影镜头的耀斑

    公开(公告)号:US07189481B2

    公开(公告)日:2007-03-13

    申请号:US10933090

    申请日:2004-09-01

    IPC分类号: G03F9/00

    摘要: Flare of an imaging system is measured using resist by employing the imaging system to directly expose a first part of the resist at an image plane of the imaging system to a first dose of radiation and to indirectly expose a second part of the resist as a result of flare. The imaging system exposes the second part of the resist to a second dose of radiation. Flare of the imaging system is determined from a pattern that is formed in the second part of the resist.

    摘要翻译: 使用抗蚀剂通过使用成像系统将成像系统的图像平面处的抗蚀剂的第一部分直接暴露于第一剂量的辐射并且间接暴露抗蚀剂的第二部分来测量成像系统的耀斑,结果 的耀斑。 成像系统将抗蚀剂的第二部分暴露于第二剂量的辐射。 从形成在抗蚀剂的第二部分的图案确定成像系统的光斑。

    Method for characterization of the illuminator in a lithographic system
    5.
    发明申请
    Method for characterization of the illuminator in a lithographic system 审中-公开
    光刻系统中照明器的表征方法

    公开(公告)号:US20060072097A1

    公开(公告)日:2006-04-06

    申请号:US10960357

    申请日:2004-10-06

    IPC分类号: G03B27/72

    CPC分类号: G03B27/72 G03F7/70133

    摘要: Pupil intensity distribution of an imaging system is measured by exposing an image field of a radiation detector with a bright feature, positioning the detector at a distance away from the image plane, and exposing the image field of the detector with a bright feature, resulting in a cumulative exposure of the image field of the detector from the two exposures. A characteristic of a spatial pattern in the cumulative exposure of the image field of the detector is then determined.

    摘要翻译: 成像系统的瞳孔强度分布通过用具有明亮特征的放射线检测器的图像场曝光来测量,将检测器定位在远离图像平面的距离处,并且用明亮特征曝光检测器的图像场,导致 来自两次曝光的检测器的图像场的累积曝光。 然后确定检测器的图像场的累积曝光中的空间图案的特性。

    Wink gesture input for a head-mountable device
    8.
    发明授权
    Wink gesture input for a head-mountable device 有权
    用于头戴式装置的眨眼手势输入

    公开(公告)号:US09128522B2

    公开(公告)日:2015-09-08

    申请号:US13550791

    申请日:2012-07-17

    IPC分类号: G06F3/00 G06F3/01

    CPC分类号: G06F3/013 G06F3/017

    摘要: This disclosure relates to proximity sensing for wink detection. An illustrative method includes receiving data from a receiver portion of a proximity sensor. The receiver portion is disposed at a side section of a head-mountable device (HMD). When a wearer wears the HMD, the receiver portion is arranged to receive light reflected from an eye area of the wearer, the proximity sensor detects a movement of the eye area, and the data represents the movement. The method includes determining that the data corresponds to a wink gesture. The method also includes selecting a computing action to perform, based on the wink gesture. The method further includes performing the computing action.

    摘要翻译: 本公开涉及用于眨眼检测的接近感测。 说明性方法包括从接近传感器的接收器部分接收数据。 接收器部分设置在可头戴式装置(HMD)的侧部。 当穿戴者穿戴HMD时,接收器部分被布置成接收从佩戴者的眼睛区域反射的光,接近传感器检测眼睛区域的移动,并且数据表示移动。 该方法包括确定数据对应于眨眼手势。 该方法还包括基于眨眼手势选择执行计算动作。 该方法还包括执行计算动作。

    Method, system and device for implementing identity identifier and location separation
    9.
    发明授权
    Method, system and device for implementing identity identifier and location separation 有权
    用于实现身份识别和位置分离的方法,系统和设备

    公开(公告)号:US08914486B2

    公开(公告)日:2014-12-16

    申请号:US13257909

    申请日:2009-11-05

    摘要: The present invention discloses a method, system and device for implementing identity identifier and location separation, to solve the technical problem that the change of the host IP address results in the connection interrupt of the terminal in the process of moving. By separating and mapping the identity identifier and location identifier, the present invention eliminates the network limitation because of the IP addresses with dual functions of the identity identifier and location identifier; the terminal host identity identifier and the terminal location identifier are mapped, the IP address is used for route only, and the host identity is denoted by the host identifier. Consequently, when the host address is changed because of moving or multi-homing and so on, the route is changed, the host identifier still keeps unchanged, and the network application and connection are not interrupted. Therefore, the continuity of the session can be implemented, the mobility, the multi-homing, the dynamic reallocation of IP addresses, and the inter-access among the different network area can be implemented effectively.

    摘要翻译: 本发明公开了一种用于实现身份识别和位置分离的方法,系统和装置,以解决主机IP地址的变化导致终端在移动过程中的连接中断的技术问题。 通过分离和映射身份标识符和位置标识符,本发明消除了网络限制,因为具有身份标识符和位置标识符的双重功能的IP地址; 映射终端主机身份标识符和终端位置标识符,IP地址仅用于路由,主机标识由主机标识符表示。 因此,当主机地址由于移动或多归属等而改变时,路由被改变,主机标识符仍然保持不变,并且网络应用和连接不被中断。 因此,可以实现会话的连续性,可以有效地实现移动性,多归属,IP地址的动态重新分配以及不同网络区域之间的相互访问。