公开(公告)号：US20230078309A1

公开(公告)日：2023-03-16

申请号：US18056806

申请日：2022-11-18

Applicant: NGK Insulators, Ltd.

Inventor： Kenichi NODA ,  Takeshi HAGIO

IPC: B01D67/00

Abstract: A drying method for a separation membrane includes supplying a gas for drying to the separation membrane so that a value obtained by dividing the difference between a maximum value and a minimum value of a flow rate of the gas for drying on a membrane surface of the separation membrane by the minimum value of the flow rate is less than or equal to 15%. The gas for drying is less than or equal to 40 degree C. and contains a water-soluble gas that has a solubility in 1 cm3 of water of greater than or equal to 0.5 cm3 in conditions of 40 degree C. and 1 atmosphere.

公开(公告)号：US20230058637A1

公开(公告)日：2023-02-23

申请号：US18047713

申请日：2022-10-19

Applicant: NGK Insulators, Ltd.

Inventor： Yutaka UNNO ,  Tomohiro HARA

IPC: H01J37/32 ,  H01L21/683 ,  C23C16/458

Abstract: A wafer support table includes a ceramic base having a wafer placement surface and including an RF electrode and a heater electrode embedded, the RF electrode being closer to the wafer placement surface; a hole extending from a surface of the ceramic base opposite the wafer placement surface toward the RF electrode; and an RF rod through having a top end joined to the RF electrode or joined to a conductive member connected to the RF electrode, wherein the RF rod is a hybrid rod including a first rod member that is made of Ni and constitutes a portion of the RF rod from the top end to a predetermined position and a second rod member that is joined to the first rod member and constitutes a portion of the RF rod from the predetermined position to the base end and is made of a non-magnetic material.

公开(公告)号：US20230055928A1

公开(公告)日：2023-02-23

申请号：US17813051

申请日：2022-07-18

Applicant: NGK Insulators, Ltd.

Inventor： Hiroshi TAKEBAYASHI ,  Tatsuya KUNO ,  Seiya INOUE

IPC: C23C16/458 ,  H01J37/32 ,  H01L21/687 ,  H01L21/67

Abstract: A wafer placement table includes a ceramic base, a first cooling base, and a second cooling base. The ceramic base has a wafer placement surface and incorporates a wafer attracting electrode and a heater electrode. The first cooling base is bonded via a metal bonding layer to a surface of the ceramic base on a side opposite to the wafer placement surface and has a first refrigerant flow channel capable of switching between supply and stop of supply of first refrigerant. The second cooling base is attached via a space layer, capable of supplying heat-transfer gas, to a surface of the first cooling base on a side opposite to the metal bonding layer and has a second refrigerant flow channel capable of switching between supply and stop of supply of second refrigerant.

公开(公告)号：US11579112B2

公开(公告)日：2023-02-14

申请号：US15938211

申请日：2018-03-28

Applicant: NGK INSULATORS, LTD.

Inventor： Takashi Hino

IPC: G01N27/407 ,  G01N27/406 ,  G01N27/41

Abstract: A sensor element includes an element base made of an oxygen-ion conductive solid electrolyte, an internal space provided inside the element base, an electrochemical pump cell that pumps oxygen in and out between the internal space and outside, and a porous thermal shock resistant layer provided to an outermost peripheral part in a predetermined range at one end part of the element base, at which a gas inlet is provided. A thermal diffusion time in a thickness direction of the thermal shock resistant layer is 0.4 sec to 1.0 sec inclusive. A thermal diffusion time at a leading end part of the thermal shock resistant layer covering the gas inlet at a farthest leading end position at the one end part is longest, and a thermal diffusion time at a pump surface is longer than a thermal diffusion time at a heater surface.

公开(公告)号：US11573197B2

公开(公告)日：2023-02-07

申请号：US17172104

申请日：2021-02-10

Applicant: NGK INSULATORS, LTD.

Inventor： Shotaro Niizuma ,  Yusuke Watanabe ,  Toshihiro Hirakawa ,  Hayami Aota

IPC: G01N27/407 ,  G01N33/00

Abstract: A gas sensor includes a sensor element, a tubular body made of metal, and a sealing material. The sensor element has a surface. The tubular body has a through hole which is formed along the axial direction and through which the sensor element is inserted. The sealing material is placed inside the through hole and between the inner peripheral surface of the through hole and the sensor element. The sealing material covers a part of the surface of the sensor element. When the sensor element is viewed in cross section from a second direction perpendicular to a first direction corresponding to the longitudinal direction of the sensor element, the sealing material forms a first inclination angle of not less than 10° and not more than 80° with respect to the surface.

公开(公告)号：US11569434B2

公开(公告)日：2023-01-31

申请号：US17452491

申请日：2021-10-27

Applicant: NGK INSULATORS, LTD.

Inventor： Yudai Uno ,  Tomoyoshi Tai ,  Keiichiro Asai ,  Masato Niwa

IPC: H01L41/18 ,  H01L41/09 ,  H01L41/187 ,  G02B26/08

Abstract: A vibrating plate-bonded body includes a supporting substrate composed of silicon, a vibrating plate composed of a highly rigid ceramics and having a thickness of 100 μm or smaller, and a bonding layer between the supporting substrate and vibrating plate, contacting a bonding surface of the vibrating plate and composed of α-Si. The arithmetic average roughness Ra of the bonding surface of the vibrating plate is 0.01 nm or more and 10.0 nm or less, and the pit density of the bonding surface of the vibrating plate is 10 counts or more per 100 μm2.

公开(公告)号：US11567033B2

公开(公告)日：2023-01-31

申请号：US16715110

申请日：2019-12-16

Applicant: NGK INSULATORS, LTD.

Inventor： Yusuke Watanabe ,  Takashi Hino ,  Mika Kai

IPC: G01N27/407 ,  G01N27/406 ,  G01N27/41

Abstract: A sensor element includes: an element base including: a ceramic body made of an oxygen-ion conductive solid electrolyte, and having an inlet at one end portion thereof; at least one internal chamber located inside the ceramic body, and communicating with the gas inlet; and an electrochemical pump cell including an outer electrode, an inner electrode facing the chamber, and a solid electrolyte therebetween, and a porous leading-end protective layer covering a leading end surface and four side surfaces in a predetermined range of the element base on the one end portion, wherein the protective layer has an extension extending into the gas inlet and fixed to an inner wall surface of the ceramic body demarcating the gas inlet, and a gap communicating with the gas inlet is located in the protective layer, with demarcated by a portion of the protective layer continuous with the extension.

公开(公告)号：US11565209B2

公开(公告)日：2023-01-31

申请号：US17457332

申请日：2021-12-02

Applicant: NGK Insulators, Ltd.

Inventor： Fumihiko Yoshioka ,  Yudai Kurimoto

IPC: B01D46/00 ,  B01D46/24

Abstract: A honeycomb filter includes a honeycomb structure body having a porous partition wall disposed to surround a plurality of cells and a plugging portion disposed at one end of the cells, wherein the plurality of cells are arranged in a square grid pattern along a first direction and a second direction in a section orthogonal to an extending direction of the cells, the shape in the section is a deformed square having a specific corner, the specific corner includes a first curved portion, a second curved portion, and a connecting portion, a radius of curvature R1 of the first curved portion and a radius of curvature R2 of the second curved portion are 40 to 80 μm, respectively, and a center distance between a center of curvature O1 of the first curved portion and a center of curvature O2 of the second curved portion is 80 to 200 μm.

公开(公告)号：US11561333B2

公开(公告)日：2023-01-24

申请号：US16994014

申请日：2020-08-14

Applicant: NGK INSULATORS, LTD.

Inventor： Jungo Kondo ,  Yuichi Iwata ,  Tetsuya Ejiri

IPC: F21V8/00 ,  F21V9/08

Abstract: A white light generating device, for generating white light from an excitation light of a laser light having a wavelength of from 280 nm-495 nm, includes a fluorescent body generating a fluorescence having a wavelength longer than a wavelength of the excitation light. The fluorescent body includes an emission-side end surface emitting excitation light and fluorescence, an opposing end surface on an opposite side of the emission-side end surface, and an outer peripheral surface. The emission-side end surface has an area larger than an area of the opposing end surface, and the outer peripheral surface of the fluorescent body includes a part inclined with respect to a central axis of the fluorescent body by from 3.4°-23° over an entire periphery of the fluorescent body. The emission-side end surface has an area of from 0.3 mm2-1.52 mm2.

公开(公告)号：US20230019439A1

公开(公告)日：2023-01-19

申请号：US17933153

申请日：2022-09-19

Applicant: NGK Insulators, Ltd.

Inventor： Tatsuya KUNO

IPC: H01L21/683 ,  H01L21/687 ,  H01J37/32

Abstract: An electrostatic chuck includes: a disk-shaped ceramic plate having a wafer placement surface on a surface thereof; an electrostatic electrode embedded in the ceramic plate; and gas grooves that are divided in a plurality of zones when the ceramic plate is seen from above and each of which is independently provided in the wafer placement surface so as to extend from one to the other of a pair of gas supply/discharge openings for a corresponding one of the zones. A pattern in which a gas is supplied to each of the gas grooves provided for a corresponding one of the zones is selectable between a first pattern in which the gas flows from one to the other of the pair of gas supply/discharge openings and a second pattern in which the gas flows from the other to the one of the pair of gas supply/discharge openings.