OPTICAL MODULATOR
    165.
    发明申请

    公开(公告)号:US20220179247A1

    公开(公告)日:2022-06-09

    申请号:US17593924

    申请日:2019-08-14

    Abstract: In order to provide an optical modulator capable of preventing damage to the substrate and preventing deterioration of the properties of the modulator by reducing the stress on the substrate generated by the modulation electrode, there is provided an optical modulator 1, including: a substrate 5 having an electro-optic effect; an optical waveguide 10 formed on the substrate 5; and a modulation electrode (signal electrode S and ground electrode G) provided on the substrate 5 and modulating a light wave propagating in the optical waveguide 10, wherein a resin 8 to reduce the stress on the substrate 5 generated by the modulation electrode is arranged between a part of the bottom surface of the modulation electrode and the substrate 5 facing a part of the bottom surface of the modulation electrode.

    OPTICAL WAVEGUIDE ELEMENT AND OPTICAL WAVEGUIDE DEVICE

    公开(公告)号:US20220057661A1

    公开(公告)日:2022-02-24

    申请号:US17599717

    申请日:2019-09-26

    Abstract: In an optical modulation element using a thinly processed substrate, cracking of the substrate during electrical connection is prevented, and poor connection or a reduction in manufacturing yield is prevented. An optical waveguide element includes an optical substrate on which an optical waveguide and a conductor pattern are formed, and a support substrate that supports the optical substrate, in which the conductor pattern includes at least one electrical connection area defined as a range in which electrical connection is performed, the optical substrate has a substrate removal portion in which a material of the optical substrate has been removed to penetrate through the optical substrate at a portion corresponding to the electrical connection area, and at least a part of the electrical connection area is formed on the support substrate via the substrate removal portion.

    Electrostatic chuck device
    168.
    发明授权

    公开(公告)号:US11201076B2

    公开(公告)日:2021-12-14

    申请号:US16761461

    申请日:2018-11-06

    Inventor: Ryuuji Hayahara

    Abstract: This electrostatic chuck device includes an electrostatic chuck part which has a placement surface on one main surface thereof to place a plate-shaped sample and has an electrode for electrostatic attraction; a temperature controlling base part configured to cool the electrostatic chuck part; and a heater element disposed between the electrostatic chuck part and the temperature controlling base part, in which the electrostatic chuck part and the temperature controlling base part are parts in which a plurality of through holes communicating in a thickness direction are provided, the heater element has a first site formed in a band shape and a second site continuous with the first site, wherein the second site is formed to have in a band shape and a closed ring shape, one through hole of the through holes is disposed on an inner peripheral side of the second site in plan view.

    Optical modulator and optical transmission apparatus using same

    公开(公告)号:US11156857B2

    公开(公告)日:2021-10-26

    申请号:US16961413

    申请日:2019-01-11

    Abstract: An initial change and a secular change in an optical characteristic and a high frequency characteristic in a case where an optical modulator is mounted in a package of an optical transmission apparatus are suppressed while improving a space utilization rate in the package of the optical transmission apparatus. An optical modulator that is electrically connected to an electric circuit configured on a circuit board, includes a package that houses an optical modulation element, in which the package has, on a bottom surface facing the circuit board, a plurality of first protruding bodies protruding from the bottom surface.

    OPTICAL WAVEGUIDE DEVICE, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE USING SAME

    公开(公告)号:US20210302679A1

    公开(公告)日:2021-09-30

    申请号:US17213517

    申请日:2021-03-26

    Abstract: An optical waveguide device includes a substrate on which an optical waveguide is formed, and a reinforcing block disposed on the substrate, along an end surface of the substrate on which an input portion or an output portion of the optical waveguide is disposed, in which an optical component that is joined to both the end surface of the substrate and an end surface of the reinforcing block is provided, a material used for a joining surface of the optical component and a material used for the substrate or the reinforcing block have at least different linear expansion coefficients of a direction parallel to the joining surface, and an area of a joining portion of the optical component is set to be smaller than an area of the end surfaces including joining portions of the substrate and the reinforcing block.

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