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公开(公告)号:US20220179247A1
公开(公告)日:2022-06-09
申请号:US17593924
申请日:2019-08-14
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Kosuke OKAHASHI , Norikazu MIYAZAKI , Masayuki MOTOYA
Abstract: In order to provide an optical modulator capable of preventing damage to the substrate and preventing deterioration of the properties of the modulator by reducing the stress on the substrate generated by the modulation electrode, there is provided an optical modulator 1, including: a substrate 5 having an electro-optic effect; an optical waveguide 10 formed on the substrate 5; and a modulation electrode (signal electrode S and ground electrode G) provided on the substrate 5 and modulating a light wave propagating in the optical waveguide 10, wherein a resin 8 to reduce the stress on the substrate 5 generated by the modulation electrode is arranged between a part of the bottom surface of the modulation electrode and the substrate 5 facing a part of the bottom surface of the modulation electrode.
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公开(公告)号:US20250102840A1
公开(公告)日:2025-03-27
申请号:US18896034
申请日:2024-09-25
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Yu KATAOKA , Kosuke OKAHASHI
IPC: G02F1/035
Abstract: An optical waveguide device includes a substrate, an optical waveguide of a rib type formed on the substrate, and modulation electrodes disposed on the substrate to interpose the optical waveguide of the rib type, in which the modulation electrodes include a plurality of segment electrodes disposed in proximity to the optical waveguide of the rib type and disposed along the optical waveguide of the rib type, and a signal transmission portion electrically connected to the segment electrode and transmitting a modulation signal, a thickness of the signal transmission portion is larger than a thickness of the segment electrode, a buffer layer is disposed between the signal transmission portion and the optical waveguide of the rib type in at least a portion where the signal transmission portion crosses the optical waveguide of the rib type, and no buffer layer is disposed between the substrate and the segment electrode.
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3.
公开(公告)号:US20240255783A1
公开(公告)日:2024-08-01
申请号:US18390112
申请日:2023-12-20
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Kosuke OKAHASHI , Yu KATAOKA
CPC classification number: G02F1/035 , G02F1/0327
Abstract: An optical waveguide device includes an optical waveguide formed on a substrate, in which an optical modulator section that modulates a light wave propagating through the optical waveguide is formed in a part of the optical waveguide, in which a first dielectric layer covers the optical waveguide, and a second dielectric layer formed of a different material from the first dielectric layer is disposed on the first dielectric layer in a part of the optical waveguide excluding the optical modulator section.
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4.
公开(公告)号:US20240255784A1
公开(公告)日:2024-08-01
申请号:US18518311
申请日:2023-11-22
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Shotaro HIRATA , Kosuke OKAHASHI
IPC: G02F1/035
CPC classification number: G02F1/035
Abstract: An optical waveguide device includes an optical waveguide formed on a substrate, in which a protuberant portion is formed on a surface of the substrate, the optical waveguide is disposed on the protuberant portion and is formed to have a larger width than a width of a part of the protuberant portion, and a low refractive index layer is disposed to cover the optical waveguide and to be in contact with at least a part of the protuberant portion, and has a lower refractive index than the optical waveguide.
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5.
公开(公告)号:US20230221590A1
公开(公告)日:2023-07-13
申请号:US17915716
申请日:2020-12-18
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Masayuki MOTOYA , Kosuke OKAHASHI
IPC: G02F1/035
CPC classification number: G02F1/035
Abstract: Provided is an optical waveguide device in which both signal electrode collapse and signal electrode peeling/damage can be prevented. An optical waveguide device in which an optical waveguide is formed on a substrate and a control electrode for controlling a light wave propagating through the optical waveguide is disposed on the substrate, is characterized in that, the control electrode includes a signal electrode, and the signal electrode has a narrow portion, where a width of the signal electrode on a substrate side is narrow, and a wide portion, where a width of the signal electrode on an upper portion side of the signal electrode is wide, a prevention film that is disposed in contact with the narrow portion of the signal electrode and that prevents the signal electrode from collapsing, is provided on the substrate, and at a position of the signal electrode where the narrow portion and the wide portion are connected, a surface of the prevention film is formed as a curved surface protruding toward the signal electrode, and a side surface of the signal electrode is formed along the curved surface.
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公开(公告)号:US20230026594A1
公开(公告)日:2023-01-26
申请号:US17757951
申请日:2020-10-20
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Kosuke OKAHASHI , Shingo TAKANO
Abstract: In order to provides an optical waveguide element and an optical modulator that can prevent the damage to the substrate and the deterioration of the properties of the substrate that may occur due to the stress, by reducing the influence of stress on the substrate by the buffer layer, the optical waveguide 1 is provided with a substrate 5 having an electro-optical effect; an optical waveguide 10 formed on the substrate 5; a first buffer layer 9a provided on the substrate 5; and a second buffer layer 9b provided under the substrate 5, wherein the first buffer layer 9a and the second buffer layer 9b are composed of substantially the same material and have substantially the same thickness, and the first buffer layer 9a and the second buffer layer 9b are formed to be in contact with an upper surface and lower surface of the substrate 5, respectively.
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公开(公告)号:US20220197104A1
公开(公告)日:2022-06-23
申请号:US17599916
申请日:2019-09-26
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Norikazu MIYAZAKI , Kosuke OKAHASHI , Masayuki MOTOYA
Abstract: Provided is an optical modulator that can be driven at lower voltage through the use of differential signal output. An optical modulator includes a substrate 1 and optical waveguides (21, 22) and a control electrode that are formed on the substrate, in which the optical waveguide includes Mach-Zehnder type optical waveguide, the control electrode is provided with two ground electrodes sandwiching three signal electrodes; the three signal electrodes are constituted by second and third signal electrodes that sandwich a first signal electrode, and have a wiring structure in which one modulation signal of the differential signal is applied to the first signal electrode, and the other modulation signal of the differential signal is applied to the second and third signal electrodes; and one branched waveguide (21) out of two Mach-Zehnder type optical waveguides is disposed between the first and second signal electrodes, and the other branched waveguide (22) is disposed between the first and third signal electrodes.
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公开(公告)号:US20250013085A1
公开(公告)日:2025-01-09
申请号:US18289102
申请日:2022-03-30
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Kosuke OKAHASHI , Shingo TAKANO
IPC: G02F1/035
Abstract: An object of the present invention is to provide an optical waveguide device that prevents peeling of an optical waveguide substrate and that suppresses a propagation loss of a light wave of an optical waveguide.
An optical waveguide device of the present invention includes an optical waveguide substrate 1 on which an optical waveguide 10 is formed, a reinforcing substrate 11 disposed under the optical waveguide substrate, a lower buffer layer B1 disposed between the optical waveguide substrate and the reinforcing substrate to join both of the optical waveguide substrate and the reinforcing substrate, and an upper buffer layer B2 disposed on an upper side of the optical waveguide substrate in contact with the optical waveguide substrate, in which a thickness d2 of the upper buffer layer is formed to be smaller than a thickness d1 of the lower buffer layer (d2-
9.
公开(公告)号:US20240255785A1
公开(公告)日:2024-08-01
申请号:US18564441
申请日:2022-01-31
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Kosuke OKAHASHI , Masayuki MOTOYA
CPC classification number: G02F1/0356 , G02F1/0311 , G02F1/0316
Abstract: An object of the present invention is to suppress deterioration in a drift characteristic by removing unnecessary light propagating through a substrate. Furthermore, an optical waveguide device that can also suppress a propagation loss of a high-frequency signal is provided. An optical waveguide device of the present invention is an optical waveguide device including an optical waveguide 10 formed on a substrate 1, and an electrode (SE1, GE1) disposed on the substrate, in which a first underlayer 21 of a first material formed on an upper surface of the substrate 1 and a second underlayer 20 of a second material different from the first material formed on an upper surface of the first underlayer are disposed in at least a part of a region on the substrate in which the electrode is formed, and the electrode is formed on an upper side of the second underlayer.
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10.
公开(公告)号:US20240241396A1
公开(公告)日:2024-07-18
申请号:US18291679
申请日:2021-09-30
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Yu KATAOKA , Kosuke OKAHASHI
IPC: G02F1/035
CPC classification number: G02F1/0356
Abstract: An optical waveguide device in which deterioration of characteristics such as velocity matching, characteristic impedance matching, and an optical loss caused by positional deviation of each electrode layer is suppressed even in a case where a control electrode is formed with a plurality of electrode layers is provided. An optical waveguide device includes a substrate 1 consisting of a material having an electro-optic effect, an optical waveguide 2 formed on the substrate 1, and control electrodes (E1, E2) disposed on the substrate to interpose the optical waveguide between the control electrodes in order to apply an electric field to the optical waveguide 2, in which the control electrodes include at least two or more electrode layers disposed in a sequence of first electrode layers E1 and second electrode layers E2 on the substrate, an insulating layer IL that covers a space between the first electrode layers between which the optical waveguide is interposed and that extends to at least a part of upper surfaces of the first electrode layers is disposed, and at least a part of the second electrode layers E2 is formed on an upper surface of the insulating layer IL.
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