ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND PRODUCTION METHOD FOR ELECTROSTATIC CHUCK MEMBER

    公开(公告)号:US20250069931A1

    公开(公告)日:2025-02-27

    申请号:US18721088

    申请日:2022-12-09

    Abstract: Provided is an electrostatic chuck member including: a dielectric substrate having a placement surface on which a sample is mounted, wherein the dielectric substrate comprises a first supporting plate and a second supporting plate which are stacked in a thickness direction thereof; and an adsorption electrode embedded in the dielectric substrate, in which a gas flow path is provided by a recessed groove, which is provided between the first supporting plate and the second supporting plate which have surfaces facing each other, wherein the recessed groove is formed in at least one of the surfaces thereof and is covered with the other thereof, a dimension of the gas flow path in a height direction is 90 μm or more and 300 μm or less, and a width dimension of the gas flow path is 500 μm or more and less than 3000 μm.

    COMPOSITION FOR FORMING LIGHT SCATTERING COMPOSITE BODY, LIGHT SCATTERING COMPOSITE BODY AND METHOD FOR PRODUCING SAME

    公开(公告)号:US20180062049A1

    公开(公告)日:2018-03-01

    申请号:US15555972

    申请日:2015-03-06

    Abstract: By using a composition for forming a light scattering composite, including surface-modified inorganic oxide particles surface-modified by a surface modification material having one or more functional groups selected from an alkenyl group, an H—Si group, and an alkoxy group, and an uncured matrix resin composition, in which an average dispersed particle diameter of the surface-modified inorganic oxide particles is 3 nm or more and 150 nm or less, and a content of the surface-modified inorganic oxide particles is 0.01% by mass or more and 15% by mass or less in a total solid content, it is possible to provide a white optical semiconductor light emitting device which has excellent light transmitting properties and scattering properties even if the content of light scattering particles is reduced, and as a result, further suppresses blue light irradiation and enhances a white light luminance, while enhancing color rendering properties.

    COMPOSITE COMPOSITION OF INORGANIC OXIDE PARTICLES AND SILICONE RESIN, METHOD OF MANUFACTURING THE SAME, TRANSPARENT COMPOSITE, AND METHOD OF MANUFACTURING THE SAME
    8.
    发明申请
    COMPOSITE COMPOSITION OF INORGANIC OXIDE PARTICLES AND SILICONE RESIN, METHOD OF MANUFACTURING THE SAME, TRANSPARENT COMPOSITE, AND METHOD OF MANUFACTURING THE SAME 审中-公开
    无机氧化物颗粒和硅氧烷树脂的复合组合物,其制造方法,透明复合材料及其制造方法

    公开(公告)号:US20150105522A1

    公开(公告)日:2015-04-16

    申请号:US14576945

    申请日:2014-12-19

    Abstract: A method of manufacturing a composite composition, having: bonding a dispersant to the surfaces of inorganic oxide particles to provide dispersibility in a hydrophobic solvent to the inorganic oxide particles, and then dispersing the inorganic oxide particles in a hydrophobic solvent; substituting the dispersant bonded to the surfaces of the inorganic oxide particles with a surface modifier, which is a polydimethylsiloxane-skeleton polymer having one functional group at one terminal end, in the hydrophobic solvent in which the organic oxide particles are dispersed to bond the functional group of the polydimethylsiloxane-skeleton polymer to the surfaces of the inorganic oxide particles; and conjugating a silicone resin and the inorganic oxide particles obtained in the previous step, wherein the surface thereof is modified by bonding the polydimethylsiloxane-skeleton polymer having one functional group at one terminal end thereof, to obtain a composite composition.

    Abstract translation: 一种复合组合物的制造方法,其特征在于,具有:将分散剂粘合到无机氧化物粒子的表面,在疏水性溶剂中赋予无机氧化物粒子的分散性,然后将无机氧化物粒子分散在疏水性溶剂中; 将分散有有机氧化物颗粒的疏水性溶剂中的表面改性剂(其末端具有一个官能团的聚二甲基硅氧烷 - 骨架聚合物)的表面改性剂与无机氧化物颗粒表面接合的分散剂代替键合官能团 的聚二甲基硅氧烷 - 骨架聚合物的无机氧化物颗粒的表面; 并与上述工序中得到的硅氧烷树脂和无机氧化物粒子共轭,其表面通过在一个末端键合具有一个官能团的聚二甲基硅氧烷骨架聚合物而得到复合组合物。

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