Cleaning apparatus for an exhaust path of a process reaction chamber

    公开(公告)号:US10510517B2

    公开(公告)日:2019-12-17

    申请号:US16082023

    申请日:2017-01-26

    IPC分类号: H01J37/32 B08B7/00 B08B9/027

    摘要: A cleaning apparatus of an exhaust path of a process reaction chamber used in a manufacturing of articles including a semiconductor or an LCD. The cleaning apparatus of the exhaust path includes a housing having an inflow pipe, connected to an upstream end of the exhaust path, an outflow pipe, connected to a downstream end of the exhaust path, and a connecting pipe disposed between the inflow pipe and the outflow pipe. A radio frequency generator in the housing applies radio frequency power to the inflow pipe and to the outflow pipe via respective coils. Plasma induced within the inflow and outflow pipes from RF power applied via the respective coils causes the generation of radicals from the exhaust gas flowing within. The radicals act to dislodge accumulated particulates within the exhaust path downstream of the cleaning apparatus.

    Flexible cable connecting structure and bridge structure

    公开(公告)号:US10480137B2

    公开(公告)日:2019-11-19

    申请号:US16079985

    申请日:2017-02-24

    摘要: A flexible cable connecting structure and a bridge structure. The connecting structure includes a flexible cable; the first portion connected to a top end and a second portion connected to a bottom end by using a spherical bearing pair. By using a hinge assembly and a spherical hinge assembly, a rotatable connection between the cable and a bridge structure is implemented to avoid force uniformity of steel wires inside the cable due to inclination, thus helps prolong the service life of the cable. The connecting ends of the cable are located in a lower part of an arch rib and an upper part of a bridge floor, respectively located within a line of sight range, making it convenient for maintenance. The cable can be prefabricated in a factory, which ensures construction quality and reduces time of site construction.