公开(公告)号：US07977878B2

公开(公告)日：2011-07-12

申请号：US10589602

申请日：2005-02-16

申请人： Hiroyuki Kyushima ,  Hideki Shimoi ,  Akihiro Kageyama ,  Keisuke Inoue ,  Masuo Ito

发明人： Hiroyuki Kyushima ,  Hideki Shimoi ,  Akihiro Kageyama ,  Keisuke Inoue ,  Masuo Ito

IPC分类号： H01J43/20 ,  H01J43/26

CPC分类号： H01J43/08 ,  H01J9/26 ,  H01J43/04 ,  H01J43/24

摘要： The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.

摘要翻译： 本发明涉及具有能够容易地实现高检测精度和精细处理的结构的光电倍增管及其制造方法。 光电倍增管包括具有内部保持在真空状态的外壳，而响应于入射光发射电子的光电阴极，电子倍增器级联从光电阴极发射的电子和用于取出二次电子的阳极 在电子倍增器部分中产生的电极被布置在外壳中。 外壳的一部分由具有平坦部分的玻璃基板构成，而电子倍增器部分和阳极中的每一个二维地布置在玻璃基板的平坦部分上。

公开(公告)号：US07928657B2

公开(公告)日：2011-04-19

申请号：US11921934

申请日：2006-06-01

申请人： Hiroyuki Kyushima ,  Hideki Shimoi ,  Hiroyuki Sugiyama ,  Hitoshi Kishita ,  Suenori Kimura ,  Yuji Masuda ,  Takayuki Ohmura

发明人： Hiroyuki Kyushima ,  Hideki Shimoi ,  Hiroyuki Sugiyama ,  Hitoshi Kishita ,  Suenori Kimura ,  Yuji Masuda ,  Takayuki Ohmura

IPC分类号： H01J40/00 ,  H01J40/16

CPC分类号： H01J43/06

摘要： The present invention relates to a photomultiplier having a fine configuration capable of realizing stable detection accuracy. The photomultiplier has a housing whose inside is maintained vacuum, and a photocathode, an electron-multiplier section, and an anode are disposed in the housing. In particular, one or more control electrodes disposed in an internal space of the housing which surrounds the electron-multiplier section and the anode are electrically connected via one or more connection parts extending from an electron emission terminal of the electron-multiplier section. In this configuration, due to a voltage, instead of the applying between an electron entrance terminal and the electron emission terminal of the electron-multiplier section, being applied between the electron entrance terminal and the control electrodes, an electric potential gradient which is increased gradually from the photocathode side toward the anode side is formed in the electron-multiplier section, and a sufficient electric potential difference is provided between the electron emission terminal of the electron-multiplier section and the anode, which makes it possible to obtain stable detection accuracy.

摘要翻译： 本发明涉及具有能够实现稳定的检测精度的精细结构的光电倍增管。 光电倍增管具有内部保持真空的壳体，并且光电阴极，电子倍增器部分和阳极设置在壳体中。 特别地，设置在外壳的内部空间中的一个或多个控制电极，其围绕电子倍增器部分和阳极通过从电子倍增器部分的电子发射端延伸的一个或多个连接部分电连接。 在该结构中，由于电压而不是在电子入射端子和电子倍增器部分的电子发射端子之间施加，而被施加在电子入射端子和控制电极之间，逐渐增加的电位梯度 在电子倍增部形成从光电阴极侧朝向阳极侧，在电子倍增部的电子发射端与阳极之间设置充分的电位差，能够得到稳定的检测精度。

公开(公告)号：US07838810B2

公开(公告)日：2010-11-23

申请号：US12224378

申请日：2007-02-27

申请人： Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J31/50 ,  H01J40/14

CPC分类号： H01J43/28

摘要： A vacuum vessel is configured by hermetically joining a faceplate to one end of a side tube and a stem to the other end via a tubular member. A photocathode, a focusing electrode, dynodes, a drawing electrode, and anodes are arranged within the vacuum vessel. At the center of the stem an air discharging tube is connected. The air discharging tube includes an outer side tube and an inner side tube, which are disposed coaxially and connected to each other at the stem side. The outer side tube has high adhesiveness with the stem and the inner side tube is thin and has small stress when being cut, thereby enabling the joint with the vacuum vessel not to be damaged when the air discharging tube is sealed.

摘要翻译： 真空容器通过经由管状构件将面板与侧管的一端气密地接合到另一端而构成。 在真空容器内设置光电阴极，聚焦电极，倍增极，牵伸电极和阳极。 在阀杆的中心连接一个排气管。 排气管包括同轴并且在杆侧彼此连接的外侧管和内侧管。 外侧管与杆的密合性高，内侧管较薄，切断时的应力小，能够在排气管密封的情况下使真空容器的接头不被损坏。

公开(公告)号：US07741759B2

公开(公告)日：2010-06-22

申请号：US11922007

申请日：2006-06-28

申请人： Hiroyuki Sugiyama ,  Keisuke Inoue ,  Hitoshi Kishita ,  Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hiroyuki Sugiyama ,  Keisuke Inoue ,  Hitoshi Kishita ,  Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J43/00

CPC分类号： H01J43/28 ,  H01J5/24 ,  H01J9/26

摘要： A photomultiplier tube 1 is an electron tube comprising an envelope 5 including a frame 3b having at least one end part formed with an opening and an upper substrate 2 airtightly joined to the opening, and a photocathode 6 contained within the envelope 5, the photocathode 6 emitting a photoelectron into the envelope 5 in response to light incident thereon from the outside; wherein multilayer metal films 10b, 10a each constituted by a metal film made of titanium, a metal film made of platinum, and a metal film made of gold laminated in this order are formed at the opening and the joint part between the upper substrate 2 and opening; and wherein the frame 3b and upper side substrate 2 are joined to each other by holding a joint layer 14 containing indium between the respective multilayer metal films 10b, 10a.

摘要翻译： 光电倍增管1是包括外壳5的电子管，外壳5包括框架3b，框架3b具有形成有开口的至少一个端部和与开口气密地接合的上基板2，以及容纳在外壳5内的光电阴极6，光电阴极6 响应于从外部入射到其上的光，将光电子发射到信封5中; 其中，在上部基板2和第二基板2之间的开口部和接合部形成有由钛构成的金属膜，铂金属膜和金制金属膜构成的多层金属膜10b，10a， 开口 并且其中框架3b和上侧基板2通过在各个多层金属膜10b，10a之间保持包含铟的接合层14而彼此接合。

公开(公告)号：US20090200940A1

公开(公告)日：2009-08-13

申请号：US12225412

申请日：2007-03-07

申请人： Hideki Shimoi ,  Kazuhiro Hara ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Kazuhiro Hara ,  Hiroyuki Kyushima

IPC分类号： H01J43/20

CPC分类号： H01J43/20

摘要： A vacuum vessel (18) is configured by hermetically joining a faceplate (13) with one end of a side tube (15) and hermetically joining a stem (50) with another end via a ring-shaped side tube (37). Within the vacuum vessel (18), a focus electrode (17), dynodes (Dy1-Dy9), an anode (25), and a dynode (Dy10) are arranged from the side of a photocathode (14) provided to the faceplate (13). The dynode (Dy10) is supported on spacers (33) and a positioning protrusion (31) provided on the stem (50). The anode (25) is placed on support members (21). The focus electrode (17), the dynodes (Dy1-Dy9), and the anode (25) are stacked with inter-layer members (23) interposed therebetween, the inter-layer members (23) being located coaxially with the support members (21), to ensure high anti-vibration performance. Because the anode (25) and the dynode (Dy10) have no insulating body therebetween, light emission is suppressed and noises can be reduced.

摘要翻译： 真空容器（18）通过将面板（13）与侧管（15）的一端气密接合并通过环形侧管（37）与另一端气密地连接在一起的杆（50）构成。 在真空容器（18）内，从设置在面板（18）的光电阴极（14）的一侧配置聚焦电极（17），倍增极（Dy1-Dy9），阳极（25）和倍增极（Dy10） 13）。 倍增极（Dy10）被支撑在间隔件（33）和设置在杆（50）上的定位突起（31）上。 阳极（25）放置在支撑构件（21）上。 聚焦电极（17），倍增电极（Dy1-Dy9）和阳极（25）被层叠，层间部件（23）插入其间，层间部件（23）与支撑部件 21），以确保高抗振性能。 由于阳极（25）和倍增极（Dy10）之间没有绝缘体，所以抑制了发光，并且可以降低噪声。

公开(公告)号：US07189956B2

公开(公告)日：2007-03-13

申请号：US11189006

申请日：2005-07-26

申请人： Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J21/20 ,  H01J43/04

CPC分类号： H01J43/28

摘要： In a photomultiplier, a ring-like side tube is not interposed between a side tube and a stem in the radial direction, and the side tube is joined to the ring-like side tube in a state of being directly capped onto a portion of the stem that protrudes out from an open end face at the upper side of the ring-like side tube. The enlargement of the photomultiplier in the radial direction due to overlapping of the side tube and the ring-like side tube can thereby be restricted and a high density, a high degree of integration, etc., can be realized in mounting the photomultiplier.

摘要翻译： 在光电倍增管中，环状侧管在径向上不夹在侧管和杆之间，侧管与环状侧管接合，直接被盖在一部分 杆从环状侧管的上侧的开口端面突出。 由此，可以限制由于侧管和环状侧管的重叠而在径向方向上的光电倍增管的放大，并且在安装光电倍增管时可以实现高密度，高集成度等。

公开(公告)号：US07132639B2

公开(公告)日：2006-11-07

申请号：US11189135

申请日：2005-07-26

申请人： Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J21/20 ,  H01J43/04

CPC分类号： H01J43/28

摘要： A holding member or a base member, through which stem pins are passed and one surface of which is held by the holding member, is joined to the stem pins and the holding member by fusion by the melting of the base member. Upon melting, a volume of the base member is made to escape into a base member seep portion, and a stem is arranged as a two-layer arrangement formed by the holding of the base member by the holding member. When the holding member is joined to the inner surface of the base member, the inner surface of the stem is improved in positional precision, flatness, and levelness, while when the holding member is joined to the outer surface of the base member, the outer surface of the stem is improved in positional precision, flatness, and levelness.

摘要翻译： 保持构件或基部构件通过杆销通过，其一个表面由保持构件保持，通过基座构件的熔化而熔化而连接到杆销和保持构件。 在熔化时，基体的体积被排出到基体部分渗出部分中，并且杆被布置为通过保持部件保持基体部件而形成的双层布置。 当保持构件接合到基部构件的内表面时，杆的内表面的位置精度，平坦度和水平度提高，而当保持构件接合到基部构件的外表面时，外部 杆的表面在位置精度，平整度和水平度方面得到改善。

公开(公告)号：US20060028134A1

公开(公告)日：2006-02-09

申请号：US11246528

申请日：2005-10-11

申请人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

发明人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

IPC分类号： H01J43/04

CPC分类号： H01J31/507 ,  H01J43/045 ,  H01J43/22

摘要： A dynode constituting an electron multiplier or a photomultiplier may be provided with eight rows of channels each defined by an outer frame and a partitioning part of the dynode. In each channel, a plurality of electron multiplying holes may be arranged. In specified positions of the outer frame and the partitioning part of the dynode, glass receiving parts wider than the outer frame and the partitioning part may be provided integrally with the dynode. Glass parts may be bonded to all the glass receiving parts. The glass parts may be bonded by applying glass to the glass receiving parts and hardening the glass and each may have a generally dome-like convex shape. Each dynode may be formed after the dome-like glass part may be bonded to the glass receiving part.

公开(公告)号：US06762555B1

公开(公告)日：2004-07-13

申请号：US09701284

申请日：2000-11-28

申请人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi ,  Tomoyuki Okada ,  Masuo Ito

发明人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi ,  Tomoyuki Okada ,  Masuo Ito

IPC分类号： H01J4328

CPC分类号： G01N23/046 ,  G01N23/06 ,  G01N2223/419 ,  H01J43/04 ,  H01J43/28

摘要： A photomultiplier tube has a side tube with a stem plate fixed on one end and a faceplate fixed on the other. The side tube is formed of metal, and at least the portion of the stem plate contacting the metal side tube is formed of metal. The side tube and stem plate are fused together by laser welding or electron beam welding to form an airtight vessel, such that the outer edge of the stem plate does not protrude further externally than the outer surface of the side tube.

摘要翻译： 光电倍增管具有侧管，杆管固定在一端，固定在另一端。 侧管由金属形成，并且杆板的至少与金属侧管接触的部分由金属形成。 侧管和杆板通过激光焊接或电子束焊接熔合在一起形成气密容器，使得杆板的外边缘不比侧管的外表面更外侧突出。

公开(公告)号：US06650050B1

公开(公告)日：2003-11-18

申请号：US09937077

申请日：2001-09-21

申请人： Hiroyuki Kyushima ,  Hideki Shimoi

发明人： Hiroyuki Kyushima ,  Hideki Shimoi

IPC分类号： H01J4300

CPC分类号： H01J43/22

摘要： In a photomultiplier tube 1, an etching technique is used to form electron multiplying holes 8a in plate-shaped dynodes 8 that are stacked in multiple layers. To perform this etching process, a pattern frame 22 is disposed around a plate-shaped dynode substrate 20. A bridge portion 23 is provided for connecting the pattern frame 22 to an edges 20a of the dynode substrate 20. The dynode substrate 20 is masked, and the etching process is performed to form a plurality of electron multiplying holes 8a in the dynode substrate 20. Subsequently, the bridge portion 23 is cut near the dynode substrate 20, leaving a small bridge remainder 8c on the edge 8b of the dynode 8. In order to suppress noise generated by these bridge remainders, the bridge remainders 8c on neighboring dynodes 8 are arranged in positions such that straight lines parallel to the dynode stacking direction and passing through the bridge remainder 8c do not overlap each other, thereby further improving the basic characteristics of the photomultiplier tube 1.

摘要翻译： 在光电倍增管1中，使用蚀刻技术来形成层叠多层的板状倍增极8中的电子倍增孔8a。 为了进行该蚀刻处理，在平板状的倍增电极基板20的周围配置有图案框22.设置有用于将图案框架22与倍增电极基板20的边缘20a连接的桥接部23.多极基板20被遮蔽， 并且执行蚀刻处理以在倍增电极基板20中形成多个电子倍增孔8a。接着，在倍增电极基板20附近切割桥接部分23，在倍增极8的边缘8b上留下小的桥接余数8c。 为了抑制由这些桥接电路产生的噪声，相邻的倍增电极8上的桥接电极8c被布置成使得平行于倍增极堆叠方向并且通过桥接余数8c的直线彼此不重叠的位置，从而进一步改善 光电倍增管1的基本特性。