公开(公告)号：US09325149B2

公开(公告)日：2016-04-26

申请号：US14368559

申请日：2013-01-17

Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD. ,  Institute for Laser Technology ,  OSAKA UNIVERSITY

Inventor： Koichi Hamamoto ,  Takahiro Yamada ,  Haik Chosrowjan ,  Hiroaki Furuse ,  Masayuki Fujita ,  Yasukazu Izawa ,  Junji Kawanaka ,  Noriaki Miyanaga

IPC: G02B26/00 ,  H01S3/10 ,  G01J9/02 ,  G02B26/06 ,  G02B27/09 ,  H01S3/13 ,  H01S3/23 ,  G02F1/01 ,  G02F1/21 ,  H01S3/00

CPC classification number: H01S3/10053 ,  G01J9/02 ,  G02B26/06 ,  G02B27/0905 ,  G02F1/0121 ,  G02F1/21 ,  H01S3/0085 ,  H01S3/1307 ,  H01S3/2308 ,  H01S3/2383

Abstract: A multi-beam combining apparatus includes a phase shifting section, a superposing section, an observing section and a phase control section. The phase shifting section generates a plurality of phase-shifted laser beams by shifting the phase of each of the plurality of laser beams. The superposing section generates a plurality of superposed laser beam by superposing the reference laser beam and each of the plurality of phase-shifted laser beams. The observing section generates interference pattern data of a spatial interference pattern which appears when observing each of the superposed laser beams. The phase control section carries out a feedback control of the phase shifts in the phase shifting section based on the interference pattern data obtained for every superposed laser beam, and thereby sets the plurality of phase-shifted laser beams to desired states.

Abstract translation: 多波束组合装置包括相移部分，叠加部分，观察部分和相位控制部分。 相移部分通过移动多个激光束中的每一个的相位来产生多个相移激光束。 叠加部分通过叠加参考激光束和多个相移激光束中的每一个来产生多个叠加的激光束。 观察部产生观察每个叠加的激光束时出现的空间干涉图案的干涉图案数据。 相位控制部根据对每个叠加的激光束获得的干涉图案数据，对相移部中的相移进行反馈控制，从而将多个相移激光束设定为期望的状态。