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公开(公告)号：US20220283354A1
公开(公告)日：2022-09-08
申请号：US17628397
申请日：2020-06-22
Applicant: Institute for Laser Technology , Panasonic Corporation
Inventor： Takanori AKETA , Kenichiro TANAKA , Noriaki MIYANAGA
IPC: F21V8/00
Abstract: A light-emitting device includes an optical fiber, a first light source unit, and a second light source unit. The optical fiber includes a wavelength converting portion. The wavelength converting portion is provided between a light incident portion and a light emerging portion. The wavelength converting portion contains a wavelength converting material. The wavelength converting material is excited by excitation light to produce a spontaneous emission of light having a longer wavelength than the excitation light and amplifies the spontaneous emission of light to produce an amplified spontaneous emission of light. The first light source unit makes the excitation light incident on the light incident portion. The second light source unit makes seed light, causing a stimulated emission of light to be produced from the wavelength converting material that has been excited by either the excitation light or the amplified spontaneous emission of light, incident on the light incident portion.
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公开(公告)号：US11802990B2
公开(公告)日：2023-10-31
申请号：US17269153
申请日：2019-08-23
Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD. , RIKEN , Institute for Laser Technology
Inventor： Masashi Iwashimizu , Hiroyuki Daigo , Shingo Nishikata , Kazunori Masukawa , Atsushi Ochiai , Toshikazu Ebisuzaki , Satoshi Wada , Yoshiyuki Takizawa , Masayuki Maruyama , Shinji Motokoshi
CPC classification number: G01W1/10 , G01N15/06 , G02B27/0068 , G01N2015/0693
Abstract: An optical system that obtains characteristics of a transmission path in atmosphere, when laser light propagates through this transmission path, at a place separated from this transmission path and before the propagation, and corrects wavefront of the laser light based on the obtained characteristics, is provided. The optical system is provided with an irradiation device and an atmospheric characteristics obtaining system. The irradiation device irradiates an external target with light via a first optical path. The atmospheric characteristics obtaining system is arranged in a second optical path separated from the first optical path and obtains characteristics of atmospheric environment in the first optical path with respect to the irradiated light. The irradiation device is provided with wavefront correction optics. The wavefront correction optics correct wavefront of the irradiated light based on the obtained characteristics.
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3.发明申请公开(公告)号：US20170127505A1
公开(公告)日：2017-05-04
申请号：US15400116
申请日：2017-01-06
Applicant: Institute for Laser Technology , Gigaphoton Inc.
Inventor： Atsushi SUNAHARA , Georg SOUMAGNE , Yoshifumi UENO , Hideo HOSHINO
IPC: H05G2/00
Abstract: An extreme ultraviolet light generation system may comprise a chamber, a target supply unit configured to supply, to a predetermined region in the chamber, a target having an atomic density of 8.0×1017 atoms/cm3 or higher and 1.3×1018 atoms/cm3 or lower, and a laser apparatus configured to irradiate the predetermined region with a pulse laser beam having an energy density of 10.5 J/cm2 or higher and 52.3 J/cm2 or lower in the predetermined region.
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公开(公告)号：US20150138618A1
公开(公告)日：2015-05-21
申请号：US14368559
申请日：2013-01-17
Inventor： Koichi Hamamoto , Takahiro Yamada , Haik Chosrowjan , Hiroaki Furuse , Masayuki Fujita , Yasukazu Izawa , Junji Kawanaka , Noriaki Miyanaga
CPC classification number: H01S3/10053 , G01J9/02 , G02B26/06 , G02B27/0905 , G02F1/0121 , G02F1/21 , H01S3/0085 , H01S3/1307 , H01S3/2308 , H01S3/2383
Abstract: A multi-beam combining apparatus includes a phase shifting section, a superposing section, an observing section and a phase control section. The phase shifting section generates a plurality of phase-shifted laser beams by shifting the phase of each of the plurality of laser beams. The superposing section generates a plurality of superposed laser beam by superposing the reference laser beam and each of the plurality of phase-shifted laser beams. The observing section generates interference pattern data of a spatial interference pattern which appears when observing each of the superposed laser beams. The phase control section carries out a feedback control of the phase shifts in the phase shifting section based on the interference pattern data obtained for every superposed laser beam, and thereby sets the plurality of phase-shifted laser beams to desired states.
Abstract translation: 多波束组合装置包括相移部分，叠加部分，观察部分和相位控制部分。 相移部分通过移动多个激光束中的每一个的相位来产生多个相移激光束。 叠加部分通过叠加参考激光束和多个相移激光束中的每一个来产生多个叠加的激光束。 观察部产生观察每个叠加的激光束时出现的空间干涉图案的干涉图案数据。 相位控制部根据对每个叠加的激光束获得的干涉图案数据，对相移部中的相移进行反馈控制，从而将多个相移激光束设定为期望的状态。
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公开(公告)号：US11977219B2
公开(公告)日：2024-05-07
申请号：US17269727
申请日：2019-08-07
Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD. , RIKEN , Institute for Laser Technology
Inventor： Masashi Iwashimizu , Hiroyuki Daigo , Shingo Nishikata , Kazunori Masukawa , Atsushi Ochiai , Toshikazu Ebisuzaki , Satoshi Wada , Yoshiyuki Takizawa , Masayuki Maruyama , Shinji Motokoshi
Abstract: An optical correction is predictively performed based on a result of AI learning previously performed by use of learning data including measurement data. The optical compensation system is provided with wavefront correction optics, a sensor and a controller. The wavefront correction optics corrects a wavefront of light that passes through a given optical path. The sensor obtains environmental information in the optical path. The controller calculates, based on the environmental information, a predicted wavefront disturbance of the light that has passed through the optical path and controls the wavefront correction optics so as to cancel the predicted wavefront disturbance.
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Patent Agency Ranking
6.发明公开公开(公告)号：US20230152163A1
公开(公告)日：2023-05-18
申请号：US17915009
申请日：2021-02-16
Inventor： Koichi HAMAMOTO , Tomoya MORIOKA , Shingo NISHIKATA , Hiroyuki DAIGO , Noriaki MIYANAGA
CPC classification number: G01J9/02 , G02B5/32 , G02B5/3083 , G01J2009/0261
Abstract: A phase difference measuring device is provided with a phase conversion device and a detection device. The phase conversion device converts a first laser beam that passes therethrough so that the first laser beam includes a phase distribution of one cycle in an azimuth direction in a cross section of the first laser beam included in an arbitrary virtual plane perpendicular to an optical axis of the first laser beam. The detection device detects an azimuth angle of an intensity centroid of an interference pattern generated by at least a part of a first laser beam that has passed through the phase conversion device, and a part of a second laser beam that derives from a laser beam as seed light from which the first laser beam derives, of which an optical intensity is same as the at least a part of the first laser beam, and detects an inter-beam phase difference of the second laser beam.
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公开(公告)号：US20210318534A1
公开(公告)日：2021-10-14
申请号：US17269727
申请日：2019-08-07
Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD. , RIKEN , Institute for Laser Technology
Inventor： Masashi IWASHIMIZU , Hiroyuki DAIGO , Shingo NISHIKATA , Kazunori MASUKAWA , Atsushi OCHIAI , Toshikazu EBISUZAKI , Satoshi WADA , Yoshiyuki TAKIZAWA , Masayuki MARUYAMA , Shinji MOTOKOSHI
Abstract: An optical correction is predictively performed based on a result of AI learning previously performed by use of learning data including measurement data. The optical compensation system is provided with wavefront correction optics, a sensor and a controller. The wavefront correction optics corrects a wavefront of light that passes through a given optical path. The sensor obtains environmental information in the optical path. The controller calculates, based on the environmental information, a predicted wavefront disturbance of the light that has passed through the optical path and controls the wavefront correction optics so as to cancel the predicted wavefront disturbance.
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公开(公告)号：US11868023B2
公开(公告)日：2024-01-09
申请号：US17628397
申请日：2020-06-22
Applicant: Institute for Laser Technology , Panasonic Corporation
Inventor： Takanori Aketa , Kenichiro Tanaka , Noriaki Miyanaga
CPC classification number: G02F1/365 , G02B6/0006 , G02B6/0008 , G02F1/353
Abstract: A light-emitting device includes an optical fiber, a first light source unit, and a second light source unit. The optical fiber includes a wavelength converting portion. The wavelength converting portion is provided between a light incident portion and a light emerging portion. The wavelength converting portion contains a wavelength converting material. The wavelength converting material is excited by excitation light to produce a spontaneous emission of light having a longer wavelength than the excitation light and amplifies the spontaneous emission of light to produce an amplified spontaneous emission of light. The first light source unit makes the excitation light incident on the light incident portion. The second light source unit makes seed light, causing a stimulated emission of light to be produced from the wavelength converting material that has been excited by either the excitation light or the amplified spontaneous emission of light, incident on the light incident portion.
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公开(公告)号：US20210311225A1
公开(公告)日：2021-10-07
申请号：US17269153
申请日：2019-08-23
Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD. , RIKEN , Institute for Laser Technology
Inventor： Masashi IWASHIMIZU , Hiroyuki DAIGO , Shingo NISHIKATA , Kazunori MASUKAWA , Atsushi OCHIAI , Toshikazu EBISUZAKI , Satoshi WADA , Yoshiyuki TAKIZAWA , Masayuki MARUYAMA , Shinji MOTOKOSHI
Abstract: An optical system that obtains characteristics of a transmission path in atmosphere, when laser light propagates through this transmission path, at a place separated from this transmission path and before the propagation, and corrects wavefront of the laser light based on the obtained characteristics, is provided. The optical system is provided with an irradiation device and an atmospheric characteristics obtaining system. The irradiation device irradiates an external target with light via a first optical path. The atmospheric characteristics obtaining system is arranged in a second optical path separated from the first optical path and obtains characteristics of atmospheric environment in the first optical path with respect to the irradiated light. The irradiation device is provided with wavefront correction optics. The wavefront correction optics correct wavefront of the irradiated light based on the obtained characteristics.
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公开(公告)号：US20210270568A1
公开(公告)日：2021-09-02
申请号：US17258817
申请日：2019-07-03
Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD. , RIKEN , Institute for Laser Technology
Inventor： Masashi IWASHIMIZU , Hiroyuki DAIGO , Shingo NISHIKATA , Kazunori MASUKAWA , Atsushi OCHIAI , Toshikazu EBISUZAKI , Satoshi WADA , Yoshiyuki TAKIZAWA , Masayuki MARUYAMA , Shinji MOTOKOSHI
Abstract: A laser irradiation apparatus is provided with a controller that calculates at least one predicted movement position into which a target is predicted to move at a specific time in future, a transmission laser source that generates a transmission laser, irradiation optics configured to emit the transmission laser to the target and emit search laser to the predicted movement position and wavefront correction optics. The wavefront correction optics are configured to correct a wavefront of the transmission laser at the specific time based on observation light that returns when the search laser is emitted to the predicted movement position.
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