公开(公告)号：US07696675B2

公开(公告)日：2010-04-13

申请号：US11704103

申请日：2007-02-06

申请人： Shigeo Kanna

发明人： Shigeo Kanna

IPC分类号： H03H9/64 ,  H03H9/25

CPC分类号： H03H9/02551

摘要： A surface acoustic wave device includes: a quartz substrate; and at least a single-type IDT electrode provided on a surface of the quartz substrate for exciting a Rayleigh surface acoustic wave in the upper limit mode of the surface acoustic wave stop band with the following relationships satisfied; φ=0°, 110°≦θ≦140°, and 38°≦|ψ|≦44°, when the quartz substrate cut angles and the surface acoustic wave propagation direction are represented by Euler angles (φ, θ, ψ), and wherein the electrode thickness relative to wavelength set such that H/λ≧0.1796η3−0.4303η2+0.2071η+0.0682, with the thickness of the IDT electrode defined as H, the width of an electrode IDT finger defined as d, the pitch between the electrode fingers of the IDT electrode as P, the wavelength of the surface acoustic wave as λ, and where η=d/P.

摘要翻译： 表面声波装置包括：石英基板; 以及设置在所述石英衬底的表面上的至少一个单一型IDT电极，用于激励所述表面声波阻带的上限模式中的瑞利表面声波，满足以下关系： 当石英衬底切割角度和表面声波传播方向由欧拉角（＆phgr）表示时，φ= 0°，110°＆nlE;＆Thetas;＆nlE; 140°和38°＆nlE; |ψ| ;ψ），并且其中相对于波长设定的电极厚度使得H /λ≥0.1796＆eegr; 3-0.4303＆eggr2 + 0.2071＆eegr +0.0682，其中IDT电极的厚度定义为H， 电极IDT手指的宽度定义为d，IDT电极的电极指之间的间距为P，表面声波的波长为λ，以及eegr = d / P。

公开(公告)号：US20100063782A1

公开(公告)日：2010-03-11

申请号：US12207329

申请日：2008-09-09

申请人： Sangpil Yoon ,  Shigeo Kanna

发明人： Sangpil Yoon ,  Shigeo Kanna

IPC分类号： G06F17/11

CPC分类号： G06F17/5018 ,  G06F2217/80

摘要： The embodiments of the present invention provide methods and systems for simulating a SAW and/or an LSAW device, while taking into account the temperature and residual stress of the device into consideration. The simulation involves transforming an equation of variational principle of elasticity into an equation of variational total potential energy with combined effects of temperature and residual stress. The transformation considers frequency-temperature relation and the effect of initial deformation caused by residual stress. The equation of variational total potential energy is then transformed into a finite element equation by considering the periodic constraints of the SAW or LSAW device. Afterwards, the finite element equation is solved to obtain eigen values and frequencies of the SAW or LSAW device. By considering the effects of stress and residual stress simultaneously during equation transformation, solving the eigen values and frequencies of the SAW or LSAW device becomes a single step process, instead of a multi-step process.

摘要翻译： 本发明的实施例提供了用于模拟SAW和/或LSAW装置的方法和系统，同时考虑到装置的温度和残余应力。 模拟包括将弹性变分原理方程转换为具有温度和残余应力的综合影响的变分总势能方程。 该变换考虑了频率 - 温度关系以及由残余应力引起的初始变形的影响。 然后通过考虑SAW或LSAW器件的周期性约束，将变分总势能的方程转化为有限元方程。 然后，求解有限元方程以获得SAW或LSAW器件的本征值和频率。 通过在等式变换期间同时考虑应力和残余应力的影响，解决SAW或LSAW器件的本征值和频率成为单步骤过程，而不是多步骤过程。

公开(公告)号：US07571648B2

公开(公告)日：2009-08-11

申请号：US11752674

申请日：2007-05-23

申请人： Yook-Kong Yong ,  Mihir S Patel ,  Shigeo Kanna ,  Masako Tanaka

发明人： Yook-Kong Yong ,  Mihir S Patel ,  Shigeo Kanna ,  Masako Tanaka

IPC分类号： G01P9/04

CPC分类号： G01C19/5642

摘要： An angular velocity sensor includes a protrusion protruding in a Y′-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y′ axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected.

摘要翻译： 一种角速度传感器包括沿Y'轴方向突出并在旋转的Y切割石英板的主表面上沿X轴方向延伸的突起，以及形成在主表面上的激励电极和检测电极， 这个突出。 该激发电极激发石英基板上的X轴方向的厚度 - 剪切振动，从而突出突出的振动。 然后，由于在与围绕Y'轴的旋转相对应的与突起的振动正交的方向作用的科里奥利力，突起被弯曲和位移。 突起处的位移作为应力施加到石英基板。 检测电极检测该应力的变化，从而检测加到角速度传感器的角速度。

公开(公告)号：US20070182278A1

公开(公告)日：2007-08-09

申请号：US11704103

申请日：2007-02-07

申请人： Shigeo Kanna

发明人： Shigeo Kanna

IPC分类号： H03H9/25

CPC分类号： H03H9/02551

摘要： A surface acoustic wave device includes: a quartz substrate; and at least a single-type IDT electrode provided on a surface of the quartz substrate for exciting a Rayleigh surface acoustic wave in the upper limit mode of the surface acoustic wave stop band with the following relationships satisfied; φ=0, 110°≦θ≦140°, and 38°≦|ψ|≦44°, when the quartz substrate cut angles and the surface acoustic wave propagation direction are represented by Euler angles (φ, θ, ψ), and wherein the electrode thickness relative to wavelength set such that H/λ≧0.1796η3−0.4303η2+0.2071η+0.0682, with the thickness of the IDT electrode defined as H, the width of an electrode IDT finger defined as d, the pitch between the electrode fingers of the IDT electrode as P, the wavelength of the surface acoustic wave as λ, and where η=d/P.

摘要翻译： 表面声波装置包括：石英基板; 以及设置在所述石英衬底的表面上的至少一个单一型IDT电极，用于激励所述表面声波阻带的上限模式中的瑞利表面声波，满足以下关系： 当石英衬底切割角度和表面声波传播方向由欧拉角（phi，θ，θ）表示时，phi = 0,110°<=θ<= 140°和38°<= | psi | psi），并且其中相对于波长设置的电极厚度使得H /λ> = 0.1796eta 3 -0.4303eta2 + 0.2071eta + 0.0682，其厚度 IDT电极定义为H，电极IDT手指的宽度定义为d，IDT电极的电极指之间的间距为P，表面声波的波长为λ，其中eta = d / P。

公开(公告)号：US07042133B2

公开(公告)日：2006-05-09

申请号：US10671698

申请日：2003-09-29

申请人： Shigeo Kanna

发明人： Shigeo Kanna

IPC分类号： H03H9/25

CPC分类号： H03H9/02551 ,  H03H9/02834

摘要： The invention miniaturizes a surface acoustic wave device on which a plurality of surface acoustic wave elements are disposed and connected together in parallel on a plate, and provides a good temperature characteristic in a wide temperature range. A surface acoustic wave device according to the invention includes a plurality of surface acoustic wave elements disposed on a main surface of a quartz plate cut out with a Euler angle at (0°, 113° to 135°, +/−(40 to 49)°). Surface acoustic waves have propagation directions “ψ” which are different each other. When the Euler angle is set at (0°, θ, ψ), it is possible to reduce differences in each propagation direction by setting each propagation angle so as to satisfy a formula: ψ=0.3295θ+3.3318°+/−1.125°. This makes it possible to decrease the angle among the surface acoustic wave elements, and thereby miniaturizes the surface acoustic wave elements.

摘要翻译： 本发明使多个表面声波元件在其上平行设置并连接在一起的表面声波装置小型化，并且在宽温度范围内提供良好的温度特性。 根据本发明的表面声波装置包括多个表面声波元件，其设置在（0°，113°至135°，+/-（40至49°）的欧拉角切割的石英板的主表面上 ）°）。 表面声波具有彼此不同的传播方向“psi”。 当欧拉角设置为（0°，θ，psi）时，可以通过设置每个传播角度来减小每个传播方向的差异，以满足公式：psi = 0.3295theta + 3.3318°+/- 1.125° 。 这使得可以减小表面声波元件之间的角度，从而使表面声波元件小型化。

公开(公告)号：US06856218B2

公开(公告)日：2005-02-15

申请号：US10329445

申请日：2002-12-27

申请人： Takashi Yamazaki ,  Keigo Iizawa ,  Shigeo Kanna

发明人： Takashi Yamazaki ,  Keigo Iizawa ,  Shigeo Kanna

IPC分类号： H03H9/02 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/25 ,  H03H9/02543

摘要： The invention provides an in-plane rotational ST-cut SAW resonator that is formed of an in-plane rotational ST-cut crystal plate having Eulerian angles of (0°, 113° to 135°, and ±(40° to 49°)). The in-plane rotational ST-cut SAW resonator can include an interdigital transducer (IDT) electrode for exciting a Rayleigh wave on the main surface. The ratio Lt/Pt of the electrode width Lt and the interelectrode pitch Pt of the IDT electrode is 0.5 or more and 0.65 or less. Accordingly, a reduction in the fluctuation in resonance frequency relative to the variations in an IDT electrode of a surface acoustic wave device by using the in-plane rotated ST-cut crystal plate around the Z′-axis can be achieved.

摘要翻译： 本发明提供一种面内旋转ST切割SAW谐振器，其由具有（0°，113°至135°和±（40°至49°））的欧拉角的平面内旋转ST切割晶体板形成， ）。 平面内旋转ST切割SAW谐振器可以包括用于激励主表面上的瑞利波的叉指式换能器（IDT）电极。 电极宽度Lt的比率Lt / Pt和IDT电极的电极间间距Pt为0.5以上且0.65以下。 因此，通过使用围绕Z'轴的平面内旋转的ST切割晶体板，可以实现相对于声表面波器件的IDT电极的变化的共振频率的波动的减小。

公开(公告)号：US5912602A

公开(公告)日：1999-06-15

申请号：US731752

申请日：1996-10-18

申请人： Michiaki Takagi ,  Shigeo Kanna ,  Eishi Momosaki

发明人： Michiaki Takagi ,  Shigeo Kanna ,  Eishi Momosaki

IPC分类号： H03H9/145 ,  H03H9/02 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/6433 ,  H03H9/02834 ,  H03H9/14594 ,  H03H9/6463 ,  H03H9/14547

摘要： A high-precision surface acoustic wave (SAW) device improves the frequency-temperature characteristics of a conventional surface acoustic wave device several-fold. In this high-precision surface acoustic wave device, two one-port SAW resonators, or two two-port SAW resonators, alternatively, two one-port-resonator-type, two-port-resonator-type or transversal-type filters are placed in parallel with each other. Further, these resonators or filters are excited and are elastically coupled to each other in such a way as to be in an oblique symmetry mode. Moreover, the frequency-temperature characteristics of the two elements are made to differ from each other. Furthermore, a flat frequency-temperature characteristic, which cannot be realized by a single element, is realized by being synthesized from the frequency-temperature characteristics of the two elements.

摘要翻译： 高精度表面声波（SAW）器件将常规声表面波器件的频率 - 温度特性提高了几倍。 在这种高精度表面声波装置中，放置了两个单口SAW谐振器或两个两端口SAW谐振器，或者两个单端口谐振器型，两端口谐振器型或横向型滤波器 彼此平行。 此外，这些谐振器或滤波器被激励并且以使其处于倾斜对称模式的方式彼此弹性耦合。 此外，使两个元件的频率 - 温度特性彼此不同。 此外，通过从两个元件的频率 - 温度特性合成，实现了通过单个元件不能实现的平坦的频率 - 温度特性。