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    Scatterometer having a computer system that reads data from selected pixels of the sensor array
    11.
    发明授权
    Scatterometer having a computer system that reads data from selected pixels of the sensor array 有权
    散射计具有从传感器阵列的选定像素读取数据的计算机系统

    公开(公告)号：US07511293B2

    公开(公告)日：2009-03-31

    申请号：US11361309

    申请日：2006-02-24

    申请人： Chris Raymond ,  Steve Hummel

    发明人： Chris Raymond ,  Steve Hummel

    IPC分类号： G01N21/86

    CPC分类号： G01B11/0616 ,  G01B11/24 ,  G01B11/30 ,  G01N21/21 ,  G01N21/274 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/956 ,  G01N23/2251 ,  G01N2021/4792 ,  G03F7/70625

    摘要： Scatterometers and methods of using scatterometry to determine several parameters of periodic microstructures, pseudo-periodic structures, and other very small structures having features sizes as small as 100 nm or less. Several specific embodiments of the present invention are particularly useful in the semiconductor industry to determine the width, depth, line edge roughness, wall angle, film thickness, and many other parameters of the features formed in microprocessors, memory devices, and other semiconductor devices. The scatterometers and methods of the invention, however, are not limited to semiconductor applications and can be applied equally well in other applications.

    摘要翻译： 散射计和使用散射测定法确定周期性微结构，伪周期结构以及特征尺寸小至100nm或更小的其它非常小的结构的几个参数的方法。 本发明的几个特定实施例在半导体工业中特别有用，以确定在微处理器，存储器件和其它半导体器件中形成的特征的宽度，深度，线边缘粗糙度，壁角度，膜厚度以及许多其它参数。 然而，本发明的散射仪和方法不限于半导体应用，并且可以在其它应用中同样适用。

    Self-sealing door water shield barrier
    15.
    发明授权
    Self-sealing door water shield barrier 失效
    自密封门防水屏障

    公开(公告)号：US06676195B1

    公开(公告)日：2004-01-13

    申请号：US10295447

    申请日：2002-11-15

    申请人： Donald P. Marriott ,  Steve Hummel

    发明人： Donald P. Marriott ,  Steve Hummel

    IPC分类号： B60R1302

    CPC分类号： B60J5/0418 ,  B60B33/045 ,  B60R13/0243 ,  B60R13/06

    摘要： An apparatus and method for manufacturing a vehicle door barrier or shield for attachment to an inner door trim panel mountable on a vehicle door in which the barrier self-seals the opening between the vehicle door and the interior passenger compartment. The barrier is formed of a resilient gasket material that is shaped or formed with a peripheral rail or spring attachment surface that is compressed as the interior vehicle door trim panel is fastened to the interior surface of the door sheet metal to effect a watertight seal about the periphery of the door. The attachment surface carrying a seal material is disposed in an interference position with the door inner panel when the joined inner door trim panel and the barrier are mounted on the door inner panel. The interference deflects the attachment surface to create a joining force to secure the seal material to the door inner panel. The attachment surface may be a continuous shaped section of the barrier and/or a cantilevered edge portion of varying cross section.

    摘要翻译： 一种用于制造车门屏障或屏蔽件的装置和方法，用于附接到可安装在车门上的内门装饰板，其中屏障自身密封车门和内部乘客舱之间的开口。 障碍物由弹性垫圈材​​料形成，其形状或形成有外围轨道或弹簧附接表面，当周围轨道或弹簧附接表面被压缩时，内部车辆门装饰板被紧固到门金属板的内表面上，以围绕门金属板 外围的门。 当连接的内门装饰板和挡板安装在门内板上时，承载密封材料的附接表面设置在与门内板的干涉位置。 该干涉使安装表面偏转以形成连接力，以将密封材料固定到门内板。 附接表面可以是阻挡层的连续成形部分和/或具有不同横截面的悬臂边缘部分。