公开(公告)号：US20070137675A1

公开(公告)日：2007-06-21

申请号：US11702317

申请日：2007-02-05

申请人： Wayne McDermott ,  Gene Parris ,  Dean Roth ,  Hoshang Subawalla

发明人： Wayne McDermott ,  Gene Parris ,  Dean Roth ,  Hoshang Subawalla

IPC分类号： B08B3/00 ,  B08B3/12 ,  B08B7/00

CPC分类号： B08B7/0021 ,  B08B1/00 ,  B08B3/02 ,  B08B3/12 ,  Y10S134/902

摘要： Method for removing flux residue and defluxing residue from an article using a dense processing fluid and a dense rinse fluid is disclosed herein. In one embodiment, there is provided a method comprising: introducing the article comprising contaminants into a processing chamber; contacting the article with a dense processing fluid comprising a dense fluid, at least one processing agent, and optionally a cosolvent to provide a partially treated article; and contacting the partially treated article with a dense rinse fluid comprising the dense fluid and optionally the cosolvent to provide a treated article wherein an agitation source is introducing during at least a portion of the first and/or the second contacting step.

公开(公告)号：US20080004194A1

公开(公告)日：2008-01-03

申请号：US11834800

申请日：2007-08-07

申请人： Wayne McDermott ,  Hoshang Subawalla ,  Andrew Johnson ,  Alexander Schwarz ,  Richard Ockovic

发明人： Wayne McDermott ,  Hoshang Subawalla ,  Andrew Johnson ,  Alexander Schwarz ,  Richard Ockovic

IPC分类号： C11D7/00

CPC分类号： H01L21/6704 ,  H01L21/02101 ,  H01L21/31133

摘要： Methods for generating a single-phase supercritical dense processing fluid have been disclosed. The single-phase supercritical dense processing fluid may be generated in a separate pressurization vessel and transferred to the processing chamber, or alternatively may be generated directly in the processing chamber. At least one processing agent is added to the pressurization vessel, or to the processing chamber, or to the single-phase supercritical dense fluid during transfer from the pressurization vessel to the processing chamber; to produce the single-phase supercritical dense processing fluid. Methods for processing an article with a single-phase supercritical dense processing fluid in a processing chamber are also disclosed.

摘要翻译： 已经公开了生产单相超临界致密加工流体的方法。 单相超临界致密加工流体可以在单独的加压容器中产生并转移到处理室，或者可以直接在处理室中产生。 在从加压容器到处理室的转移期间，至少一种加工剂被加入到加压容器或处理室中，或加到单相超临界稠密流体中; 生产单相超临界浓缩加工液。 还公开了在处理室中用单相超临界致密加工流体处理制品的方法。

公开(公告)号：US20070240740A1

公开(公告)日：2007-10-18

申请号：US11403749

申请日：2006-04-13

申请人： Wayne McDermott

发明人： Wayne McDermott

IPC分类号： B08B3/12

CPC分类号： B01J3/008 ,  B01J19/18 ,  B08B7/0021 ,  G03F1/82 ,  G03F7/423 ,  H01L21/02101 ,  H01L21/31133 ,  H01L21/67023 ,  Y02P20/544

摘要： Method for removing contaminant material from a contaminated article comprising contacting the contaminated article with a reactive cleaning fluid comprising water and an oxidant material at a temperature at or above the critical temperature of the reactive cleaning fluid and a pressure at or above the critical pressure of the reactive cleaning fluid, oxidizing at least a portion of the contaminant material to yield a cleaned article and a product mixture comprising unreacted reactive cleaning fluid and removed contaminant material, and separating the product mixture from the cleaned article.

摘要翻译： 从被污染物品中去除污染物质的方法，包括使污染物品与包含水和氧化剂物质的反应性清洁流体在等于或高于反应性清洁流体的临界温度的温度下接触， 氧化至少一部分污染物质以产生清洁的制品，以及包含未反应的反应性清洁流体和去除的污染物质的产品混合物，以及将产品混合物与经清洁的物品分离。